Reaction products of heterocyclic nitrogen compounds polyepoxides and polyhalogens

Patent metadata

Field	Value
Publication number	US-2016143152-A1
Application number	US-201414254792-A
Country	US
Kind code	A1
Filing date	Apr 16, 2014
Priority date	Apr 16, 2014
Publication date	May 19, 2016
Grant date	—

Abstract

Reaction products of heterocyclic nitrogen compounds, polyepoxide compounds and polyhalogen compounds may be used as levelers in metal electroplating baths, such as copper electroplating baths, to provide good throwing power. Such reaction products may plate metal with good surface properties and good physical reliability.

First claim

What is claimed is:

1 . A compound comprising a reaction product of one or more heterocyclic nitrogen compounds comprising at least two reactive nitrogen atoms with the proviso that at least one of the reactive nitrogen atoms is in the ring of the one or more heterocyclic nitrogen compounds; one or more polyepoxide compounds and one or more polyhalogen compounds.

2 . The compound of claim 1 , wherein the one or more heterocyclic nitrogen compounds are chosen from imidazoles, triazoles, tetrazoles, pyrazines, benzimidazoles, benzotriazoles, purines, piperazines, pyridazines, triazines, tetrazines and pyrimidines, pyrazoles, piperidines, benzoxazoles, oxazoles, pyridines, morpholines, pyrrolidines, pyrroles, quinolines, isoquinolines and benzothiazoles.

3 . The compound of claim 1 , wherein the one or more heterocyclic nitrogen compounds have a formula:

wherein Q 1 -Q 4 may be nitrogen, oxygen, carbon, or sulfur with the proviso that at least one of the Q 1 -Q 4 is nitrogen, and that only one of the Q 1 -Q 4 may be oxygen or sulfur at any instance, the carbon atoms and nitrogen atoms may be substituted or unsubstituted and R 1 is hydrogen; hydroxyl; linear or branched alkoxy; linear or branched, substituted or unsubstituted (C 1 -C 10 )alkyl; linear or branched, substituted or unsubstituted hydroxy(C 1 -C 10 )alkyl; linear or branched, substituted or unsubstituted alkoxy(C 1 -C 10 )alkyl; linear or branched, substituted or unsubstituted carboxy(C 1 -C 10 )alkyl; linear or branched, substituted or unsubstituted amino(C 1 -C 10 )alkyl; substituted or unsubstituted aryl; linear or branched, substituted or unsubstituted aryl(C 1 -C 10 )alkyl; substituted or unsubstituted sulfonyl; and substituted or unsubstituted amine, with the proviso that when only one of Q 1 -Q 4 is an unsubstituted nitrogen atom, at least one substituent on the ring comprises a reactive nitrogen atom comprising one or more of a primary amino moiety; secondary amino moiety; an aromatic or non-aromatic heterocyclic nitrogen moiety comprising at least one unsubstituted nitrogen atom; an amide moiety; and a Schiff base moiety.

4 . The compound of claim 1 , wherein the one or more heterocyclic nitrogen compounds have a formula:

Wherein Q 2 -Q 4 are carbon, nitrogen, oxygen or sulfur with the proviso that at least one of Q 1 -Q 4 is nitrogen and only one of Q 1 -Q 4 may be sulfur or oxygen at any instance, Q 5 -Q 8 are carbon or nitrogen with the proviso that only two of Q 5 -Q 8 may be nitrogen at an instance, the carbon and nitrogen of the rings may be substituted or unsubstituted and with the proviso that when only one of Q 2 -Q 8 is an unsubstituted nitrogen atom, at least one substituent on the rings comprises a reactive nitrogen atom comprising one or more of a primary amino moiety; secondary amino moiety; an aromatic or non-aromatic heterocyclic nitrogen moiety comprising at least one unsubstituted nitrogen atom; an amide moiety; and a Schiff base moiety.

5 . The compound of claim 1 , wherein the one or more heterocyclic nitrogen compounds have a formula:

wherein Q 9 -Q 14 is nitrogen, carbon or oxygen with the proviso that at least one of Q 9 -Q 14 is nitrogen and there are no more than four nitrogen atoms in the ring, the carbon atoms and nitrogen atoms in the ring may be substituted or unsubstituted, and when only one of Q 9 -Q 14 is an unsubstituted nitrogen atom, at least one substituent on the ring comprises a reactive nitrogen atom comprising one or more of a primary amino moiety; secondary amino moiety; an aromatic or non-aromatic heterocyclic nitrogen moiety comprising at least one unsubstituted nitrogen atom; an amide moiety; and a Schiff base moiety; and when oxygen is present in the ring, only one of Q 9 -Q 14 is oxygen.

6 . The compound of claim 1 , wherein the one or more polyepoxide compounds have a formula:

wherein R 2 and R 3 may be the same or different and are chosen from hydrogen and (C 1 -C 4 )alkyl, A=OR 4 or R 5 ; R 4 ═((CR 6 R 7 ) m O), (aryl-O) p , CR 6 R 7 —Z—CR 6 CR 7 , or OZ′ t O, R 5 ═(CH 2 ) y , B is (C 5 -C 12 )cycloalkyl, Z=a 5- or 6-membered ring, Z′ is R 8 OArOR 8 , (R 9 O) b Ar(OR 9 ), or (R 9 O) b , Cy(OR 9 ), Cy=(C 5 -C 12 )cycloalkyl, R 6 and R 7 are independently chosen from hydrogen, methyl, or hydroxyl, R 8 represents (C 1 -C 8 )alkyl, R 9 represents a (C 2 -C 6 )alkyleneoxy, R 10 is a hydrogen atom, a formyl group, or one or two glycidyl ether groups each optionally containing a carbonyl group constituted by C 4 -C 8 and C 2 -C 4 , R 11 is a hydrogen atom, a methyl group or an ethyl group, and R 12 is a hydrogen atom, a formyl group, or one or two glycidyl ether groups each optionally containing a carbonyl group constituted by C 4 -C 8 and C 2 -C 4 , b=1-10, m=1-6, n=1-4, p=1-6, t=1-4 and y=0-6.

7 . The compound of claim 1 , wherein the one or more polyhalogen compounds have a formula:
X 1 —R 13 —X 2   (VII)
wherein X 1 and X 2 may be the same or different and are halogens chosen from chlorine, bromine, fluorine and iodine. Preferably, X 1 and X 2 are independently chlorine, bromine and iodine. More preferably, X 1 and X 2 are independently chlorine and bromine. R 13 is linear or branched, substituted or unsubstituted (C 1 -C 20 )alkyl, or is a moiety having formula:
—C(HR 14 )—R 15 —C(HR 14 )—  (VIII)

wherein each R 14 is independently selected from hydrogen, halogens chosen from chlorine, bromine, fluorine and iodine, linear or branched, substituted or unsubstituted (C 1 -C 18 )alkyl, substituted or unsubstituted (C 6 -C 12 )cycloalkyl, substituted or unsubstituted (C 6 -C 15 )aryl; R 15 is linear or branched, substituted or unsubstituted (C 1 -C 18 )alkyl, substituted or unsubstituted (C 6 -C 12 )cycloalkyl, substituted or unsubstituted (C 6 -C 15 )aryl, —CH 2 —O—(R 16 —O) d —CH 2 — where R 16 is a substituted or unsubstituted, linear or branched (C 2 -C 10 )alkyl and d is an integer of 1-10.

8 . A composition comprising one or more sources of metal ions, an electrolyte and one or more compounds comprising a reaction product of one or more heterocyclic nitrogen compounds comprising at least two reactive nitrogen atoms with the proviso that at least one of the reactive nitrogen atoms is in the ring of the one or more heterocyclic nitrogen compounds; one or more polyepoxide compounds and one or more polyhalogen compounds.

9 . A method comprising:
a) providing a substrate; b) providing a composition comprising one or more sources of metal ions, an electrolyte and one or more compounds comprising a reaction product of one or more heterocyclic nitrogen compounds comprising at least two reactive nitrogen atoms with the proviso that at least one of the reactive nitrogen atoms is in the ring of the one or more heterocyclic nitrogen compounds; one or more polyepoxide compounds and one or more polyhalogen compounds; c) contacting a substrate with the composition; d) applying a current to the substrate and the composition; and e) depositing a metal on the substrate.

10 . The method of claim 9 , wherein the one or more sources or metal ions are chosen from copper salts and tin salts.

11 . The method of claim 9 wherein the substrate comprises a plurality of one or more of through-holes, trenches and

Assignees

• Rohm & Haas Elect Mat

Inventors

• Kozhukh Julia
• Niazimbetova Zuhra I

Classifications

• C08G59/5046

  heterocyclic · CPC title

• C25D3/58

  containing more than 50% by weight of copper · CPC title

• C25D3/38

  of copper · CPC title

• H05K3/188 Primary

  by direct electroplating · CPC title

• C25D3/60

  containing more than 50% by weight of tin · CPC title