Rotation plus vibration magnet for magnetron sputtering apparatus

Patent metadata

Field	Value
Publication number	US-2015307985-A1
Application number	US-201514791795-A
Country	US
Kind code	A1
Filing date	Jul 6, 2015
Priority date	Feb 16, 2012
Publication date	Oct 29, 2015
Grant date	—

Abstract

In some embodiments, the present disclosure relates to a plasma processing system having a magnetron that provides a symmetric magnetic track through a combination of vibrational and rotational motion. The disclosed magnetron has a magnetic element that generates a magnetic field. The magnetic element is attached to an elastic element connected between the magnetic element and a rotational shaft that rotates the magnetic element about a center of the sputtering target. The elastic element may vary its length during rotation of the magnetic element to change the radial distance between the rotational shaft and the magnetic element. The resulting magnetic track enables concurrent motion of the magnetic element in both an angular direction and a radial direction. Such motion enables a symmetric magnetic track that provides good wafer uniformity and a short deposition time.

First claim

What is claimed is:

1 . A method of performing a physical vapor deposition process, comprising:
providing power to a magnetron comprising a magnetic element, arranged on a backside of a sputtering target, to generate a magnetic field that extends through the sputtering target; moving the magnetic element in an angular direction around an axis-of-rotation; and generating a secondary magnetic field that pushes the magnetic element toward the axis-of-rotation with a repulsive force that concurrently moves the magnetic element in a radial direction.

2 . The method of claim 1 , wherein the axis-of-rotation extends through a center of the sputtering target.

3 . The method of claim 1 , wherein the secondary magnetic field is generated by a secondary outside magnet disposed around a perimeter of the magnetron.

4 . The method of claim 3 , wherein the secondary outside magnet is laterally positioned around a perimeter of the sputtering target at a location vertically offset from the sputtering target.

5 . The method of claim 3 , wherein the repulsive force has a value equal to a centrifugal force of the magnetic element at a position that is laterally between the axis-of-rotation and the secondary outside magnet, so as to offset the centrifugal force.

6 . The method of claim 3 , wherein the secondary outside magnet has a bottom surface that faces the backside of the sputtering target.

7 . The method of claim 1 , further comprising:
concurrently moving the magnetic element and a counter weight connected to the magnetic element in opposite directions.

8 . The method of claim 1 , further comprising:
dynamically varying a strength of the secondary magnetic field to change a range of motion of the magnetic element within the radial direction.

9 . The method of claim 1 , further comprising:
dynamically varying an orientation of the secondary magnetic field.

10 . The method of claim 1 , wherein the magnetic element comprises concentric ring shaped magnets having an inner ring-shaped magnet and an outer ring-shaped magnet having a same magnetic polarity.

11 . A method of performing a physical vapor deposition process, comprising:
applying a biasing voltage to a sputtering target; moving a magnetic element of a magnetron arranged on a backside of the sputtering target in an angular direction around an axis-of-rotation extending through a center of the sputtering target, wherein the magnetic element is configured to generate one or more magnetic fields that extend through the sputtering target; and generating a secondary magnetic field that pushes the magnetic element toward the axis-of-rotation with a repulsive force that concurrently moves the magnetic element in a radial direction.

12 . The method of claim 11 , wherein the secondary magnetic field is generated by a secondary outside magnet disposed around a perimeter of the magnetron.

13 . The method of claim 12 , wherein the secondary outside magnet has a bottom surface that faces the sputtering target and that vertically overlies the sputtering target.

14 . The method of claim 11 , further comprising:
dynamically varying a range of motion of the magnetic element within the radial direction.

15 . The method of claim 14 , further comprising:
dynamically varying a strength of the secondary magnetic field to change the range of motion of the magnetic element within the radial direction.

16 . The method of claim 11 , further comprising:
dynamically varying an orientation of the secondary magnetic field.

17 . A method of performing a physical vapor deposition process, comprising:
moving a magnetic element of a magnetron, arranged on a backside of a sputtering target, in an angular direction around an axis-of-rotation, wherein the magnetic element is configured to generate one or more magnetic fields that extend through the sputtering target; generating a secondary magnetic field that pushes the magnetic element toward the axis-of-rotation with a repulsive force that concurrently moves the magnetic element in a radial direction; and wherein the secondary magnetic field has a value that causes the repulsive force to be equal to a centrifugal force of the magnetic element at a location within a magnetic track of the magnetic element.

18 . The method of claim 17 , further comprising:
dynamically varying a strength of the secondary magnetic field to change a range of motion of the magnetic element within the radial direction.

19 . The method of claim 17 , wherein the secondary magnetic field is generated by a secondary outside magnet disposed around a perimeter of the magnetron.

20 . The method of claim 19 , wherein the secondary outside magnet has a bottom surface that faces the sputtering target and that vertically overlies the sputtering target.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Lin Bo-Hung
• Tsai Ming-Chih
• Chou You-Hua
• Kao Chung-En

Classifications

• C23C14/351 Primary

  using a magnetic field in close vicinity to the substrate · CPC title

• H01J37/32669 Primary

  Particular magnets or magnet arrangements for controlling the discharge · CPC title

• C23C14/35 Primary

  by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} · CPC title

• H01J37/3455

  Movable magnets · CPC title

• H01J37/3461

  Means for shaping the magnetic field, e.g. magnetic shunts · CPC title