Wafer clamping method and semiconductor manufacturing apparatus
US-2025029865-A1 · Jan 23, 2025 · US
US12525481B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12525481-B2 |
| Application number | US-202318137799-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 21, 2023 |
| Priority date | Jun 22, 2022 |
| Publication date | Jan 13, 2026 |
| Grant date | Jan 13, 2026 |
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Official abstract text for this publication.
A clamp assembly includes at least one clamp which is provided to clamp a workpiece in electroless plating, etching, electroplating or cleaning process. The clamp includes a base, a clamping element and a limiting element. The base is mounted on a carrier and includes a guide hole and a first limiting hole which are communicated with each other. The clamping element includes a guide rod and a second limiting hole, the guide rod is inserted into the guide hole to allow the second limiting hole located on the guide hole to be communicated with the first limiting hole. The limiting element is inserted into the first and second limiting holes to integrate the base with the clamping element for clamping the workpiece.
Opening claim text (preview).
What is claimed is: 1 . A clamp assembly comprising at least one clamp which is configured to clamp a workpiece, the at least one clamp comprising: a base configured to be mounted on a carrier and including a body, a guide hole and a first limiting hole, the body includes a first clamping portion, the guide hole and the first limiting hole are located on the body and communicated with each other, and the guide hole and the first limiting hole are arranged with an included angle; a clamping element including a guide rod, a second limiting hole and a second clamping portion, the second limiting hole is located on the guide rod, the guide rod is configured to be inserted into the guide hole to allow the second limiting hole to be communicated with the first limiting hole; and a limiting element configurated to be inserted into the first and second limiting holes to integrate the base with the clamping element and allow the workpiece to be clamped between the first and second clamping portions. 2 . The clamp assembly in accordance with claim 1 , wherein the first limiting hole includes a first portion and a second portion which are communicated with the guide hole, the guide hole is located between the first and second portions, the limiting element is configured to be inserted into the first portion of the first limiting hole and the second limiting hole. 3 . The clamp assembly in accordance with claim 1 , wherein the first limiting hole includes a first portion and a second portion which are communicated with the guide hole, the guide hole is located between the first and second portions, the limiting element is configured to be inserted into the first portion of the first limiting hole, the second limiting hole and the second portion of the first limiting hole. 4 . The clamp assembly in accordance with claim 1 , wherein the base further includes a limiting recess which is configured to accommodate the second clamping portion of the clamping element. 5 . The clamp assembly in accordance with claim 4 , wherein the first clamping portion of the body of the base includes a clamp pad, and the workpiece is configured to be clamped between the second clamping portion and the clamp pad of the first clamping portion. 6 . The clamp assembly in accordance with claim 5 , wherein the first clamping portion of the body of the base further includes a recess, the clamp pad is configured to be placed in the recess, and an edge of the workpiece is configured to be abutted against a recess wall of the recess. 7 . The clamp assembly in accordance with claim 1 , wherein the first clamping portion of the body of the base includes a clamp pad, and the workpiece is configured to be clamped between the second clamping portion and the clamp pad of the first clamping portion. 8 . The clamp assembly in accordance with claim 7 , wherein the first clamping portion of the body of the base further includes a recess, the clamp pad is configured to be placed in the recess, and an edge of the workpiece is configured to be abutted against a recess wall of the recess. 9 . The clamp assembly in accordance with claim 1 , wherein the at least one clamp further includes a positioning element which is configured to be mounted on the clamping element, a positioning hole located on the limiting element is configured to accommodate the positioning element. 10 . The clamp assembly in accordance with claim 9 , wherein the at least one clamp further includes an elastic element which is configured to be mounted on the clamping element, the elastic element is configured to push the positioning element to allow the positioning element to be accommodated in the positioning hole located on the limiting element. 11 . The clamp assembly in accordance with claim 1 further comprising a blocking element, wherein the blocking element is configured to be mounted on the carrier and configured to contact the workpiece.
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