Increasing the gas efficiency for an electrostatic chuck

Patent metadata

Field	Value
Publication number	US-12493303-B2
Application number	US-202318220705-A
Country	US
Kind code	B2
Filing date	Jul 11, 2023
Priority date	Sep 12, 2014
Publication date	Dec 9, 2025
Grant date	Dec 9, 2025

Abstract

A gas is received through an inlet. A portion of the gas is supplied to an electrostatic chuck. A portion of the gas is re-circulated through a compressor. A pressure of the second portion of the gas is increased. The second portion of the gas is stored in a gas storage.

First claim

What is claimed is:

1 . A non-transitory machine readable medium comprising executable program instructions that, when executed by a data processing system, cause the data processing system to perform operations comprising:
receiving a gas through an inlet, the gas comprising a first portion and a second portion, and the inlet configured to receive the gas having an initial pressure from about 6 torr to about 30 torr; supplying, from a first outlet coupled to the inlet, the first portion of the gas but not the second portion of the gas to the electrostatic chuck; opening a control valve for a first time interval for dumping the second portion of the gas through a vacuum pump, the control valve coupled to the first outlet and to a second outlet, and the control valve coupled to a compressor and coupled to the vacuum pump line; and closing the control valve for a second time interval to re-circulate the second portion of the gas through the compressor to the inlet prior to entering the electrostatic chuck, the second time interval greater than the first time interval, wherein the first interval time is not greater than about 3 seconds, and the second interval time is about 60 seconds, and the compressor is configured to increase a pressure of the second portion of the gas to match the pressure of the gas received at the inlet, the pressure of the gas received at the inlet from about 10 psi to about 25 psi, wherein a controller is coupled to and configured to control all of the inlet, the first outlet, the control valve, and the second outlet.

2 . The non-transitory machine readable medium of claim 1 , further comprising instructions that when executed by the data processing system, cause the data processing system to perform operations comprising:
storing the second portion of the gas in a gas storage coupled to the compressor.

3 . The non-transitory machine readable medium of claim 2 , wherein the gas is helium, argon, neon, krypton, xenon, other inert gas, nitrogen, or any combination thereof.

4 . The non-transitory machine readable medium of claim 2 , wherein the controller has a first configuration to control supplying the second portion of the gas through an orifice to the vacuum pump line for the first time interval, and wherein the controller has a second configuration to control the re-circulating the second portion of the gas for the second time interval.

Assignees

• Applied Materials Inc

Inventors

• Parkhe Vijay D

Classifications

• H10P72/722

  Details of electrostatic chucks · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/72 Primary

  using electrostatic chucks · CPC title

• H01J37/32724

  Temperature · CPC title

• H01J37/32449

  Gas control, e.g. control of the gas flow · CPC title