Extreme uniformity heated substrate support assembly

Patent metadata

Field	Value
Publication number	US-12488967-B2
Application number	US-201916403097-A
Country	US
Kind code	B2
Filing date	May 3, 2019
Priority date	May 31, 2018
Publication date	Dec 2, 2025
Grant date	Dec 2, 2025

Abstract

Implementations described herein provide a substrate support assembly which enables temperature uniformity across a workpiece surface. In one embodiment, a substrate support assembly is provided that includes a body. The body made from ceramic. The body having a workpiece support surface and a mounting surface. The workpiece support surface and the bonding chuck body surface having a flatness of less than 10 microns. A first heater is disposed on the bottom surface outside the body. A bonding layer is disposed over the first heater, wherein the bonding layer is electrically insulating and a cooling base having a body made from a metal. The cooling body having an upper cooling body surface and a lower cooling body surface wherein the upper cooling body surface is less than about 10 microns flat.

First claim

We claim:

1 . A substrate support assembly, comprising:
an electrostatic chuck having a chuck body made from ceramic, the chuck body having a workpiece support surface and a bonding chuck body surface, the workpiece support surface and the bonding chuck body surface having a flatness of less than about 10 microns; a cooling base having a cooling body made from a metal or composite, the cooling body of the cooling base having an upper cooling body surface facing the bonding chuck body and a lower cooling body surface, wherein the upper cooling body surface has a flatness of less than about 10 microns; a plurality of heaters arranged in at least 4 separate zones and disposed in contact with the bonding chuck body surface outside the chuck body: a first heater of the plurality of heaters, wherein a first portion of the first heater has a trimmed smaller sectional area and a higher resistance relative to an adjacent second portion of the first heater, wherein the first portion and the second portion are arranged in series along a single electrically continuous path; and a bonding layer disposed over the first heater and the bonding chuck body surface and in contact with the cooling base, wherein the bonding layer is electrically insulating the first heater from the cooling base.

2 . The substrate support assembly of claim 1 , further comprising:
a base plate disposed below the cooling base; and an edge ring circumscribing the electrostatic chuck, the cooling base and the base plate, wherein the edge ring is configured to channel a purge gas to the workpiece support surface.

3 . The substrate support assembly of claim 1 , wherein the bond layer has a thickness of between about 0.3 mm and about 2.0 mm and a thermal conductivity of between about 1.0 W/m-K and about 3.0 W/m-K.

4 . The substrate support assembly of claim 3 , wherein a variation of the thickness of the bond layer therebetween the electrostatic chuck and cooling base is less than 20 microns.

5 . The substrate support assembly of claim 1 , further comprising:
a seal disposed between the electrostatic chuck and the cooling base.

6 . A substrate support assembly, comprising:
an electrostatic chuck having a chuck body made from ceramic, the chuck body having an embedded high voltage chucking electrode; the chuck body having a workpiece support surface and a bonding chuck body surface, the workpiece support surface and the bonding chuck body surface having a flatness of less than about 10 microns; a plurality of heaters arranged in at least 4 separate zones and disposed in contact with the bonding chuck body surface outside the chuck body: a first heater of the plurality of heaters disposed in contact with the bonding chuck body surface outside the chuck body, a first portion of the first heater having a trimmed smaller sectional area and a higher resistance relative to an adjacent second portion portions of the first heater to provide a desired temperature output, wherein the first portion and the second portion are arranged in series along a single electrically continuous path; a cooling base; an insulating layer disposed over the first heater and the bonding chuck body surface and in contact with the cooling base, wherein the insulating layer electrically insulates the first heater from the cooling base, wherein the insulating layer is a bonding layer; and a ceramic shaft having leads connected to the heater and to the chucking electrode embedded in the electrostatic chuck.

7 . The substrate support assembly of claim 6 , wherein the ceramic shaft is bonded to the electrostatic chuck.

8 . The substrate support assembly of claim 6 , wherein the ceramic shaft is bonded to the insulating layer disposed over the first heater.

9 . The substrate support assembly of claim 6 , wherein the insulating layer comprises one of a layer of ceramic, ceramic tape, and glass tape.

10 . A processing chamber comprising:
a chamber body having walls, a bottom and a lid which enclose an internal volume; and a substrate support assembly disposed in the internal volume, the substrate support assembly comprising:
an electrostatic chuck having a chuck body made from ceramic, the chuck body having a workpiece support surface and a bonding chuck body surface, the workpiece support surface and the bonding chuck body surface having a flatness of less than 10 microns;
a cooling base having a cooling body made from a metal, the cooling body of the cooling base having an upper cooling body surface and a lower cooling body surface wherein the upper cooling body surface is less than about 10 microns flat;
a plurality of heaters arranged in at least 4 separate zones and disposed in contact with the bonding chuck body surface outside the chuck body:
a first heater of the plurality of heaters disposed in direct contact with the bonding chuck body surface outside the chuck body, wherein a first portion of the first heater has a trimmed smaller sectional area and a higher resistance relative to adjacent second portion of the first heater, wherein the first portion and the second portion are arranged in series along a single electrically continuous path; and
a bonding layer disposed over the first heater and the bonding chuck body surface and in contact with the cooling base, wherein the bonding layer is electrically insulating the first heater from the cooling base.

11 . The substrate support assembly of claim 10 , further comprising:
a baseplate disposed below the cooling base; and an edge ring circumscribing the electrostatic chuck, the cooling base and the base plate, wherein the edge ring is configured to channel a purge gas to the workpiece support surface and wherein the heaters are arranged in a plurality of zones.

12 . The substrate support assembly of claim 10 , wherein the bond layer has a thickness of between about 0.3 mm and about 2.0 mm, the thickness having a variation of less than about 20 micron, and the bond layer having a thermal conductivity of between about 1.0 W/m-K and about 3.0 W/m-K.

Assignees

• Applied Materials Inc

Inventors

• Benjaminson David
• Parkhe Vijay D
• Kora Siddaramaiah Onkara Swamy
• Floyd Kirby H
• Wang Justin
• Samir Mehmet Tugrul
• Lubomirsky Dmitry

Classifications

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/72

  using electrostatic chucks · CPC title