Metal mask

Patent metadata

Field	Value
Publication number	US-12398452-B2
Application number	US-202217964176-A
Country	US
Kind code	B2
Filing date	Oct 12, 2022
Priority date	Jun 11, 2021
Publication date	Aug 26, 2025
Grant date	Aug 26, 2025

Abstract

A method of manufacturing a metal mask includes calendering a metal material, so as to form a metal mask substrate, where the metal mask substrate includes a surface and a plurality of grooves formed in the surface, and the grooves all extend in a direction. The surface has at least one sampling region, while at least two grooves are distributed in the sampling region, where an average area ratio of the area of the grooves within the sampling region to the area of the sampling region ranges between 45% and 68%.

First claim

What is claimed is:

1. A metal mask, comprising:
a surface, consisting of a plurality of sampling regions, wherein each of the plurality of sampling regions has a same area;
a pair of long sides, opposite to each other, wherein an extending direction of the long sides is parallel to a first direction;
a pair of short sides, opposite to each other, wherein an extending direction of the short sides is parallel to a second direction, and the first direction is perpendicular to the second direction, wherein an area of the surface is defined by the long sides and the short sides;
a plurality of grooves formed in the surface, and all extending in the first direction, wherein for each of the plurality sampling regions, an average area ratio of an area of the plurality of grooves within the sampling region to an area of the sampling region ranges between 45% and 68%, thereby increasing a suitable roughness of the surface configured to facilitate a subsequent process of the metal mask, wherein a width extending in the second direction of each of the plurality of grooves ranges between 7 μm and 23 μm; and
a plurality of openings, formed in the surface.

2. The metal mask of claim 1 , wherein the plurality of grooves are formed by pressing the metal mask with a calendering roller having a plurality of bumps.

3. The metal mask of claim 1 , wherein the subsequent process is photolithography.

Assignees

• Darwin Precisions Corp

Inventors

• Chen Yun-Heng
• Lin Wen-Yi

Classifications

• B21H8/005

  Embossing sheets or rolls · CPC title

• B23P15/00

  Making specific metal objects by operations not covered by a single other subclass or a group in this subclass · CPC title

• B21B1/227

  Surface roughening or texturing · CPC title

• B05C21/005

  Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20) · CPC title

• G03F7/0015

  Production of aperture devices, microporous systems or stamps · CPC title