Semiconductor device and manufacturing method thereof
US-9224792-B2 · Dec 29, 2015 · US
US9711724B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9711724-B2 |
| Application number | US-201414305238-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 16, 2014 |
| Priority date | Dec 18, 2013 |
| Publication date | Jul 18, 2017 |
| Grant date | Jul 18, 2017 |
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A mask has both ends supported on a frame while tensile force is applied in a first direction. The mask includes: a mask main body having a band shape which is extended in the first direction; a plurality of active patterns spaced apart in the first direction from each other in the mask main body and having a first shape; a plurality of first ribs surrounding borders of the plurality of respective active patterns and defining a shape of the active pattern; and a plurality of first dummy patterns surrounding the plurality of first ribs, respectively, and having a second shape.
Opening claim text (preview).
What is claimed is: 1. A mask having opposite ends supported on a frame while tensile force is applied in a first direction, said mask comprising: a mask main body having a band shape which is extended in the first direction; a plurality of active patterns spaced apart from each other in the first direction formed in the mask main body, each of the active patterns having a first shape, each active pattern including a plurality of holes; a plurality of first ribs, each of the first ribs enclosing a respective one of the plurality of active patterns, said each of the first ribs defining a shape of said respective one of the active patterns; and a plurality of first dummy patterns, each of the first dummy patterns completely enclosing a respective one of the plurality of first ribs, an outer shape of each first dummy pattern having a second shape, each first dummy pattern including a plurality of holes. 2. The mask of claim 1 , wherein the second shape is a quadrangular shape. 3. The mask of claim 2 , wherein the first shape is a circular shape. 4. The mask of claim 2 , wherein the first shape is a polygonal shape. 5. The mask of claim 1 , wherein said each of the active patterns and said each of the first dummy patterns has one of a stripe pattern form and a dot pattern form. 6. The mask of claim 1 , wherein said each of the first ribs has a larger thickness than the active patterns and the first dummy patterns. 7. The mask of claim 6 , wherein said each of the first ribs includes at least one groove which is dented from a bottom thereof. 8. The mask of claim 6 , wherein said each of the first ribs includes at least one groove which is dented from a top thereof. 9. The mask of claim 1 , further comprising a plurality of second ribs and a plurality of second dummy patterns, each second rib being positioned between a respective one of the first ribs and a respective one of the first dummy patterns, each second dummy pattern, which includes a plurality of holes, being positioned between a respective one of the first ribs and a respective one of the second ribs. 10. The mask of claim 9 , wherein said each second rib has an extended shape of said respective one of the first ribs. 11. The mask of claim 10 , wherein said each active pattern, said each first dummy pattern, and said each second dummy pattern has one of a stripe pattern form and a dot pattern form. 12. The mask of claim 9 , wherein said each active pattern, said each first dummy pattern, and said each second dummy pattern has one of a stripe pattern form and a dot pattern form. 13. The mask of claim 9 , wherein said each active pattern has a pattern which is different from a pattern of the first dummy pattern and a pattern of the second dummy pattern. 14. A mask assembly comprising at least one mask as recited in claim 1 , said mask assembly further comprising a frame including an opening, said at least one mask being positioned in the opening. 15. The mask assembly of claim 14 , wherein the mask is provided in plural; and wherein the plurality of masks are disposed in the opening in a second direction which crosses the first direction.
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