Mask for deposition, mask assembly including the same and method of forming the mask assembly

Patent metadata

Field	Value
Publication number	US-9583708-B2
Application number	US-201414291276-A
Country	US
Kind code	B2
Filing date	May 30, 2014
Priority date	Jul 30, 2013
Publication date	Feb 28, 2017
Grant date	Feb 28, 2017

Abstract

A mask for deposition includes a mask main body extended in a first direction and having a first thickness, and including ends opposite to each other in the first direction and supported by a frame while a tensile force is applied to the mask in the first direction; and a plurality of active patterns separated from each other in the first direction in a center area of the mask main body, and having a second thickness less than the first thickness.

First claim

What is claimed is:

1. A mask for deposition, comprising:
a mask main body defining:
in a same plane, a length of the mask extended in a first direction and a width of the mask which is smaller than the length and extended in a second direction crossing the first direction,
ends of the mask which are opposite to each other in the first direction to be supported by a frame while a tensile force is applied to the mask in the first direction,
in a thickness direction perpendicular to the plane, a first thickness of the mask as a maximum thickness of the mask main body, and
in a center area thereof, a plurality of active patterns of the mask separated from each other in the first direction, the plurality of active patterns defining a second thickness of the mask less than the first thickness,
wherein the second thickness defined by the plurality of active patterns defines a plurality of active openings in an active pattern among the plurality of active patterns,
wherein the mask main body further defines a first dummy pattern of the mask between an outermost active pattern in the first direction among the plurality of active patterns and an end of the mask, the first dummy pattern defining a third thickness of the mask between the first thickness and the second thickness.

2. The mask of claim 1 , wherein the mask main body further defines a plurality of first dummy patterns of the mask between an outermost active pattern in the first direction among the plurality of active patterns and an end of the mask, the plurality of first dummy patterns defining a third thickness of the mask between the first thickness and the second thickness.

3. The mask of claim 1 , wherein
a plurality of first dummy openings are defined in the first dummy pattern, and
a first distance between neighboring active openings is less than a second distance between neighboring first dummy openings.

4. The mask of claim 1 , wherein the main mask body further defines:
a second dummy pattern of the mask between neighboring active patterns among the plurality of active patterns.

5. The mask of claim 4 , wherein
the second dummy pattern defines the second thickness of the mask.

6. The mask of claim 4 , wherein
the second dummy pattern defines the third thickness of the mask.

7. The mask of claim 4 , wherein the main mask body further defines a plurality of second dummy patterns of the mask respectively between neighboring active patterns from among the plurality of active patterns.

8. The mask of claim 4 , wherein
a plurality of second dummy openings are defined in the second dummy pattern, and
a first distance between the neighboring active openings is less than a third distance between neighboring second dummy openings.

Assignees

• Samsung Display Co Ltd

Inventors

• Ko Jung-Woo

Classifications

• H01L51/0011 Primary

  Electricity · mapped topic

• B05C21/005

  Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20) · CPC title

• Y10T29/49826

  Assembling or joining · CPC title

• C23C14/042 Primary

  using masks · CPC title

• H05B33/10 Primary

  Apparatus or processes specially adapted to the manufacture of electroluminescent light sources · CPC title