Plasma-enhanced deposition of film stacks

Patent metadata

Field	Value
Publication number	US-12385138-B2
Application number	US-202318351681-A
Country	US
Kind code	B2
Filing date	Jul 13, 2023
Priority date	Mar 25, 2010
Publication date	Aug 12, 2025
Grant date	Aug 12, 2025

Abstract

A method of depositing a film stack including films of different compositions in a process station using a plasma is described. The method includes: in a first plasma-activated film deposition phase, depositing a first film having a first film composition on a substrate, and, in a second plasma-activated deposition phase, depositing a second film having a second film composition on the first film, where the second film composition is different from the first film composition. Deposition of the first film can include delivering at least two first deposition phase reactants to the process station via a delivery line; and deposition of the second film can include delivering at least two second deposition phase reactants to the process station via the same delivery line that was used during deposition of the first film. The method may also include a step of purging the delivery line.

First claim

The invention claimed is:

1. A method for depositing, on a substrate, a film stack including films of different compositions in a process station using a plasma, the method comprising:
(a) in a first plasma-activated film deposition phase, depositing a first film having a first film composition on the substrate;
(b) in a second plasma-activated deposition phase, depositing a second film having a second film composition on the first film, wherein the second film composition is different from the first film composition, and wherein the second film comprises a different set of elements from the first film, wherein (a) comprises delivering at least two first deposition phase reactants to the process station via a delivery line; and (b) comprises delivering at least two second deposition phase reactants to the process station via the same delivery line that was used in (a); and
(c) purging the delivery line between (a) and (b) to remove the first deposition phase reactants from the delivery line.

2. The method of claim 1 , wherein the at least two first deposition phase reactants comprise a silicon-containing reactant and an oxygen-containing reactant, and wherein the at least two second deposition phase reactants comprise a silicon-containing reactant and a nitrogen-containing reactant.

3. The method of claim 1 , wherein the at least two first deposition phase reactants comprise a silicon-containing reactant and ammonia (NH 3 ), and the at least two second deposition phase reactants comprise a silicon-containing reactant and oxygen (O 2 ).

4. The method of claim 1 , wherein the at least two first deposition phase reactants comprise silane (SiH 4 ) and ammonia (NH 3 ), and the at least two second deposition phase reactants comprise TEOS (tetraethyl orthosilicate) and oxygen (O 2 ).

5. The method of claim 1 , wherein the first film and the second film are each selected from the group consisting of silicon nitride and silicon oxide.

6. The method of claim 1 , further comprising: sustaining the plasma while transitioning a composition of the plasma from a first plasma composition of the first plasma-activated film deposition phase to a second plasma composition of the second plasma-activated film deposition phase, wherein the second plasma composition is different from the first plasma composition.

7. The method of claim 6 , wherein sustaining the plasma includes maintaining a constant plasma volume.

8. The method of claim 6 , wherein sustaining the plasma includes maintaining a constant delivered power to the plasma.

9. The method of claim 1 , further comprising:
purging the process station with a purging gas after the first film deposition phase and before the second film deposition phase while sustaining the plasma during the purging of the process station.

10. The method of claim 1 , wherein (a) comprises generating a plasma using a low-frequency plasma source and a high-frequency plasma source, and wherein the low-frequency plasma source power is decreased from a higher power used during the first film deposition phase to a lower power or to zero power during purging of the process station after the first film deposition phase.

11. The method of claim 1 , further comprising repeating (a)-(c).

Assignees

• Novellus Systems Inc

Inventors

• Haverkamp Jason Dirk
• Subramonium Pramod
• Womack Joseph L
• Niu Dong
• Fox Keith
• Alexy John B
• Breiling Patrick G
• Petraglia Jennifer L
• Sriram Mandyam A
• Antonelli George Andrew
• Van Schravendijk Bart J

Classifications

• H10P72/0468

  comprising a chamber adapted to a particular process · CPC title

• H10P72/0466

  characterised by the construction of the load-lock chamber · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P14/69215

  the material being a silicon oxide, e.g. SiO2 · CPC title

• H10P14/6903

  containing silicon · CPC title