Plasma-enhanced deposition of film stacks
US-12385138-B2 · Aug 12, 2025 · US
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Breiling Patrick G patents
Breiling Patrick G is listed as an inventor on 17 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Breiling Patrick G |
| Total patents | 17 |
| First publication | Jan 15, 2015 |
| Latest publication | Aug 12, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
A wafer chuck assembly with thermal insulation for rf connections
US-2025054736-A1 · Feb 13, 2025 · US
Method and apparatus for radio frequency grid design in an esc to reduce film asymmetry
US-2025038034-A1 · Jan 30, 2025 · US
Electrostatic chuck with seal surface
US-12142509-B2 · Nov 12, 2024 · US
Showerhead Faceplate Having Flow Apertures Configured for Hollow Cathode Discharge Suppression
US-2024112890-A1 · Apr 4, 2024 · US
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression
US-11837443-B2 · Dec 5, 2023 · US
Pecvd apparatus for in-situ deposition of film stacks
US-2023366094-A1 · Nov 16, 2023 · US
Remote plasma architecture for true radical processing
US-2023332291-A1 · Oct 19, 2023 · US
Showerhead Faceplate Having Flow Apertures Configured for Hollow Cathode Discharge Suppression
US-2023099566-A1 · Mar 30, 2023 · US
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression
US-11515124-B2 · Nov 29, 2022 · US
Recent patents
Latest publications not already listed above.
Showerhead Faceplate Having Flow Apertures Configured for Hollow Cathode Discharge Suppression
US-2021210310-A1 · Jul 8, 2021 · US
Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression
US-10984987-B2 · Apr 20, 2021 · US
Electrostatic chuck with seal surface
US-2021013080-A1 · Jan 14, 2021 · US
Showerhead Faceplate Having Flow Apertures Configured for Hollow Cathode Discharge Suppression
US-2020118795-A1 · Apr 16, 2020 · US
Pecvd apparatus for in-situ deposition of film stacks
US-2019376186-A1 · Dec 12, 2019 · US
PECVD apparatus for in-situ deposition of film stacks
US-10214816-B2 · Feb 26, 2019 · US
In-situ deposition of film stacks
US-2015013607-A1 · Jan 15, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 12 |
| Novellus Systems Inc | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/3244 | 8 |
| H01J37/32623 | 7 |
| H01J37/32596 | 7 |
| C23C16/45565 | 7 |
| H10P72/0468 | 5 |