Plasma-enhanced deposition of film stacks
US-12385138-B2 · Aug 12, 2025 · US
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Fox Keith patents
Fox Keith is listed as an inventor on 18 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Fox Keith |
| Total patents | 18 |
| First publication | Jan 15, 2015 |
| Latest publication | Aug 12, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Low stress films for advanced semiconductor applications
US-12341002-B2 · Jun 24, 2025 · US
Pecvd apparatus for in-situ deposition of film stacks
US-2023366094-A1 · Nov 16, 2023 · US
PECVD apparatus for in-situ deposition of film stacks
US-11746420-B2 · Sep 5, 2023 · US
Multi-channel liquid delivery system for advanced semiconductor applications
US-2022139730-A1 · May 5, 2022 · US
Low stress films for advanced semiconductor applications
US-2022068636-A1 · Mar 3, 2022 · US
Pecvd apparatus for in-situ deposition of film stacks
US-2019376186-A1 · Dec 12, 2019 · US
Method for depositing high deposition rate, thick tetraethyl orthosilicate film with low compressive stress, high film stability and low shrinkage
US-10358717-B2 · Jul 23, 2019 · US
PECVD apparatus for in-situ deposition of film stacks
US-10214816-B2 · Feb 26, 2019 · US
Rapid chamber clean using concurrent in-situ and remote plasma sources
US-10161034-B2 · Dec 25, 2018 · US
Recent patents
Latest publications not already listed above.
Method for depositing high deposition rate, thick tetraethyl orthosilicate film with low compressive stress, high film stability and low shrinkage
US-2018305812-A1 · Oct 25, 2018 · US
Rapid chamber clean using concurrent in-situ and remote plasma sources
US-2018305814-A1 · Oct 25, 2018 · US
Method for deposition of conformal films with catalysis assisted low temperature CVD
US-9388491-B2 · Jul 12, 2016 · US
Pecvd deposition of smooth silicon films
US-2015325435-A1 · Nov 12, 2015 · US
Post-deposition soft annealing
US-9165788-B2 · Oct 20, 2015 · US
PECVD deposition of smooth silicon films
US-9117668-B2 · Aug 25, 2015 · US
In-situ deposition of film stacks
US-9028924-B2 · May 12, 2015 · US
In-situ deposition of film stacks
US-2015013607-A1 · Jan 15, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Novellus Systems Inc | 11 |
| Lam Res Corp | 7 |
| Hollister Alice | 1 |
| Reddy Sirish | 1 |
| Fox Keith | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/6336 | 12 |
| C23C16/402 | 11 |
| H10P14/24 | 11 |
| H01L21/02164 | 10 |
| C23C16/24 | 10 |