Substrate processing apparatus and method of machining tubular guard

Patent metadata

Field	Value
Publication number	US-12358015-B2
Application number	US-202318484154-A
Country	US
Kind code	B2
Filing date	Oct 10, 2023
Priority date	Feb 15, 2021
Publication date	Jul 15, 2025
Grant date	Jul 15, 2025

Abstract

A substrate processing apparatus includes a rotational holding member that rotates a substrate around a predetermined rotational axis while holding the substrate, a liquid supply member that supplies a liquid to the substrate held by the rotational holding member, and a resin-made tubular guard that surrounds the substrate held by the rotational holding member. The tubular guard has an inner peripheral surface and an uneven portion disposed at the inner peripheral surface. The uneven portion has a plurality of recessed portions and a plurality of protruding portions placed between the recessed portions adjacent to each other. The recessed portion has a width smaller than a diameter of a liquid droplet scattering from the substrate held by the rotational holding member and a depth in which the liquid droplet does not come into contact with a bottom portion of the recessed portion in a state in which the liquid droplet is in contact with the protruding portions. The protruding portion has a width that is smaller than the diameter of the liquid droplet and that is smaller than the width of the recessed portion.

First claim

What is claimed is:

1. A substrate processing apparatus comprising:
a spin chuck that rotates a substrate around a predetermined rotational axis while holding the substrate;
a liquid supply nozzle that supplies a liquid to the substrate held by the spin chuck; and
a resin-made tubular guard that surrounds the substrate held by the spin chuck,
wherein the tubular guard has an inner peripheral surface and an uneven portion disposed at the inner peripheral surface,
the uneven portion has a plurality of recessed portions and a plurality of protruding portions placed between the recessed portions adjacent to each other,
each of the recessed portions has a width smaller than a diameter of a liquid droplet scattering from the substrate held by the spin chuck and a depth in which the liquid droplet does not come into contact with a bottom portion of each of the recessed portions in a state in which the liquid droplet is in contact with the protruding portions,
each of the protruding portions has a width that is smaller than the diameter of the liquid droplet and that is smaller than the width of the recessed portions,
wherein average surface roughness of the uneven portion is 3.0 or more and 6.0 or less.

2. The substrate processing apparatus according to claim 1 , wherein the diameter of the liquid droplet is the diameter of the liquid droplet scattering from the substrate that is rotated by the spin chuck at a rotation speed of 600 rpm or more and 1200 rpm or less.

3. The substrate processing apparatus according to claim 1 , wherein the diameter of the liquid droplet is 1.5 mm or less.

4. The substrate processing apparatus according to claim 1 , wherein the recessed portions include a plurality of circular groove portions along a circumferential direction of the inner peripheral surface, and
the circular groove portions are disposed at the inner peripheral surface with intervals between the circular groove portions in an axial direction along a central axis of the inner peripheral surface.

5. The substrate processing apparatus according to claim 4 , wherein the recessed portions include a plurality of intersection groove portions extending in a direction intersecting the circular groove portions, and
a lattice shape is formed by the intersection groove portions and the circular groove portions.

6. The substrate processing apparatus according to claim 1 , wherein the inner peripheral surface of the tubular guard has a tubular surface extending in a vertical direction and an inclined surface that is connected to an upper end of the tubular surface and that extends obliquely with respect to the tubular surface, and
the recessed portions include a plurality of first recessed portions formed at the inclined surface.

7. The substrate processing apparatus according to claim 6 , wherein the recessed portions include a plurality of second recessed portions formed at the tubular surface.

8. The substrate processing apparatus according to claim 7 , wherein the protruding portions include a plurality of first protruding portions placed between the first recessed portions adjacent to each other and a second protruding portion placed between the second recessed portions adjacent to each other, and
a width of the first protruding portions is smaller than a width of the second protruding portion.

9. The substrate processing apparatus according to claim 1 , wherein the tubular guard is made of hydrophobic resin.

Assignees

• Screen Holdings Co Ltd
• Screem Holdings Co Ltd

Inventors

• Yamaguchi Takahiro
• Sawashima Jun
• Endo Toru
• Aoki Rikuta

Classifications

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/3402

  Mechanical parts of transfer devices · CPC title

• H10P72/0458

  vertical arrangement · CPC title

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0424

  using mainly spraying means, e.g. nozzles · CPC title