Spin treatment apparatus

Patent metadata

Field	Value
Publication number	US-9679787-B2
Application number	US-201414472923-A
Country	US
Kind code	B2
Filing date	Aug 29, 2014
Priority date	Aug 30, 2013
Publication date	Jun 13, 2017
Grant date	Jun 13, 2017

Abstract

A spin treatment apparatus includes an annular liquid receiver, an annular cup body and an annular partitioning member. The annular liquid receiver surrounds a rotating substrate at a distance from an outer periphery of the substrate and is configured to receive liquid flying from the rotating substrate and accommodate the liquid. The annular cup body surrounds the liquid receiver at a distance from an outer periphery of the liquid receiver and forms an annular outer exhaust flow channel for generating an airflow along an upper surface to an outer peripheral surface of the liquid receiver. The annular partitioning member is provided inside the annular liquid receiver and forms an annular inner exhaust flow channel for generating an airflow along an inner peripheral surface to a lower surface of the liquid receiver.

First claim

What is claimed is:

1. A spin treatment apparatus that performs treatment on a substrate while rotating the substrate, the apparatus comprising:
an annular liquid receiver surrounding the rotating substrate at a distance from an outer periphery of the substrate and configured to receive liquid flying from the rotating substrate and accommodate the liquid,
wherein:
the annular liquid receiver includes a plurality of slanted plate members each provided on an inner peripheral surface of the annular liquid receiver in such a manner that each of the plurality of slanted plate members gradually becomes lower along a rotation direction of the substrate and configured to receive liquid flying from the rotating substrate,
the plurality of slanted plate members are arranged in a peripheral direction of the inner peripheral surface of the annular liquid receiver to prevent the liquid flying from any position of the outer periphery of the substrate and traveling in a straight line from hitting the inner peripheral surface of the annular liquid receiver,
an upper end portion of the annular liquid receiver is formed to slant inward over an entire periphery of the annular liquid receiver, and
the plurality of slanted plate members are formed to extend to an inner peripheral surface of the upper end portion.

2. The spin treatment apparatus according to claim 1 , wherein a distance between an adjacent pair of the plurality of slanted plate members is determined to prevent the liquid flying from any position of the outer periphery of the substrate and traveling in a straight line from hitting the inner peripheral surface of the annular liquid receiver.

3. The spin treatment apparatus according to claim 1 , further comprising an annular partitioning member provided inside the annular liquid receiver and forming an annular inner exhaust flow channel to generate an airflow along the inner peripheral surface of the annular liquid receiver.

4. The spin treatment apparatus according to claim 2 , further comprising an annular partitioning member provided inside the annular liquid receiver and forming an annular inner exhaust flow channel to generate an airflow along the inner peripheral surface of the annular liquid receiver.

5. The spin treatment apparatus according to claim 1 , wherein the plurality of slanted plate members are formed so that the liquid flying from any position of the outer periphery of the rotating substrate and traveling in a straight line hits on a lower surface of at least any one of the plurality of slanted plate members.

6. The spin treatment apparatus according to claim 2 , wherein the plurality of slanted plate members are formed so that the liquid flying from any position of the outer periphery of the rotating substrate and traveling in a straight line hits on a lower surface of at least any one of the plurality of slanted plate members.

7. The spin treatment apparatus according to claim 1 , further comprising an annular cup body surrounding the annular liquid receiver at a distance from an outer periphery of the annular liquid receiver and forming an annular outer exhaust flow channel to generate an airflow along from an upper surface to an outer peripheral surface of the annular liquid receiver, wherein:
the annular liquid receiver includes:
an annular movable liquid receiver movable up and down and including the plurality of slanted plate members on an inner peripheral surface thereof, and
an annular stationary liquid receiver configured to accommodate the liquid received by the plurality of slanted plate members,

when the annular movable liquid receiver is up at a liquid receiving position, the liquid flying from the rotating substrate hits the plurality of slanted plate members, and is accommodated in the annular stationary liquid receiver, and
when the annular movable liquid receiver is down at a lid-closing position, the liquid flying from the rotating substrate hits an inner peripheral surface of the annular cup body, and flows through the annular outer exhaust flow channel.

8. The spin treatment apparatus according to claim 2 further comprising an annular cup body surrounding the annular liquid receiver at a distance from an outer periphery of the annular liquid receiver and forming an annular outer exhaust flow channel to generate an airflow along from an upper surface to an outer peripheral surface of the annular liquid receiver, wherein:
the annular liquid receiver includes:
an annular movable liquid receiver movable up and down and including the plurality of slanted plate members on an inner peripheral surface thereof, and
an annular stationary liquid receiver configured to accommodate the liquid received by the plurality of slanted plate members,

when the annular movable liquid receiver is up at a liquid receiving position, the liquid flying from the rotating substrate hits the plurality of slanted plate members, and is accommodated in the annular stationary liquid receiver, and
when the annular movable liquid receiver is down at a lid-closing position, the liquid flying from the rotating substrate hits an inner peripheral surface of the annular cup body, and flows through the annular outer exhaust flow channel.

9. The spin treatment apparatus according to claim 7 , further comprising an annular partitioning member provided inside the annular liquid receiver and forming an annular inner exhaust flow channel to generate an airflow along the inner peripheral surface of the annular liquid receiver.

10. The spin treatment apparatus according to claim 8 , further comprising an annular partitioning member provided inside the annular liquid receiver and forming an annular inner exhaust flow channel to generate an airflow along the inner peripheral surface of the annular liquid receiver.

Assignees

• Shibaura Mechatronics Corp

Inventors

• Furuya Masaaki

Classifications

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0406 Primary

  for cleaning followed by drying, rinsing, stripping, blasting or the like · CPC title

• G03F7/3021

  from a wafer supported on a rotating chuck · CPC title