Coating film forming apparatus, coating film forming method, and recording medium

Patent metadata

Field	Value
Publication number	US-9613836-B2
Application number	US-201414308784-A
Country	US
Kind code	B2
Filing date	Jun 19, 2014
Priority date	Jun 27, 2013
Publication date	Apr 4, 2017
Grant date	Apr 4, 2017

Abstract

A coating film forming apparatus includes: a substrate holding unit to horizontally hold a substrate; a rotating mechanism to rotate the substrate held by the substrate holding unit; a coating liquid supplying mechanism to supply coating liquid to form a coating film on the substrate; an annular member to rectify a gas stream above a periphery of the substrate when liquid film of the coating liquid is dried by rotation of the substrate, the annular member being provided above the periphery of the substrate and along a circumferential direction of the substrate so as to cover the periphery of the substrate; and a protrusion provided on an inner periphery of the annular member along circumferential direction of the annular member so as to protrude upward to reduce component of the gas stream flowing directly downward near an inner peripheral edge of the annular member.

First claim

What is claimed is:

1. A coating film forming apparatus, comprising:
a substrate holding unit configured to horizontally hold a substrate;
a rotating mechanism configured to rotate the substrate held by the substrate holding unit;
a coating liquid supplying mechanism configured to supply coating liquid onto the substrate such that a coating film is formed on the substrate;
an annular member configured to rectify a gas stream above a periphery of the substrate when a liquid film of the coating liquid is dried with a rotation of the substrate, the annular member being provided above the periphery of the substrate and along a circumferential direction of the substrate so as to cover the periphery of the substrate; and
a protrusion provided on an inner most peripheral edge of the annular member along a circumferential direction of the annular member such that all portions of the protrusion protrudes upward higher than other portions of the annular member to reduce a component of the gas stream flowing directly downward near an inner peripheral edge of the annular member,
the protrusion including an outer surface facing an outer periphery of the annular member, the outer surface of the protrusion having a slanted surface descending toward an inner periphery of the annular member, or an inwardly recessed portion that is recessed toward an inner periphery of the annular member.

2. The apparatus of claim 1 , wherein a difference between a height of a peak portion in an area ranging from the inner peripheral edge of the annular member to a position that is 30 mm distant from the inner peripheral edge toward an outer periphery of the annular member and a height of a lowest portion in a region outside the peak portion in the area is 30 mm or more.

3. The apparatus of claim 1 , wherein the slanted surface is a curved surface.

4. The apparatus of claim 1 , wherein an upper surface of the annular member ascends from an outer periphery of the annular member toward the protrusion.

5. The apparatus of claim 1 , further comprising an elevating mechanism configured to raise and lower the annular member with respect to the substrate,
wherein the elevating mechanism positions the annular member at a first position when the coating liquid is supplied onto the substrate by the coating liquid supplying mechanism, and
wherein the elevating mechanism positions the annular member at a second position after the supply of the coating liquid is terminated, the second position being closer to the rotated substrate than the first position.

Assignees

• Tokyo Electron Ltd

Inventors

• Ichino Katsunori
• Yoshihara Kousuke
• Terashita Yuichi

Classifications

• H10P72/0448 Primary

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• B05D1/005

  Spin coating · CPC title

• G03F7/162

  Coating on a rotating support, e.g. using a whirler or a spinner · CPC title

• B05C11/08

  Spreading liquid or other fluent material by manipulating the work, e.g. tilting · CPC title

• H01L21/6715 Primary

  Electricity · mapped topic