System, method, and user interface for edge ring wear compensation

Patent metadata

Field	Value
Publication number	US-12237203-B2
Application number	US-202217991193-A
Country	US
Kind code	B2
Filing date	Nov 21, 2022
Priority date	Dec 5, 2017
Publication date	Feb 25, 2025
Grant date	Feb 25, 2025

Abstract

A method for adjusting a height of an edge ring arranged around an outer portion of a substrate support includes receiving at least one input indicative of one or more erosion rates of the edge ring. The at least one input includes a plurality of erosion rates for respective usage periods of a substrate processing system. The method further includes determining at least one erosion rate of the edge ring using the plurality of erosion rates for the respective usage periods, monitoring an overall usage of the edge ring and storing the overall usage of the edge ring in a memory, calculating an amount of erosion of the edge ring based on the determined at least one erosion rate and the overall usage of the edge ring, and adjusting the height of the edge ring based on the calculated amount of erosion to compensate for the calculated amount of erosion.

First claim

The invention claimed is:

1. A method for adjusting a height of an edge ring arranged around an outer portion of a substrate support in a substrate processing system, the method comprising:
receiving, from a user interface, at least one input indicative of one or more erosion rates of the edge ring, wherein the at least one input includes a plurality of erosion rates for respective usage periods of the substrate processing system;
determining, by a controller, at least one erosion rate of the edge ring using the plurality of erosion rates for the respective usage periods, wherein determining the at least one erosion rate includes calculating the plurality of erosion rates in the respective usage periods;
monitoring an overall usage of the edge ring and storing the overall usage of the edge ring in a memory;
calculating an amount of erosion of the edge ring based on the determined at least one erosion rate and the overall usage of the edge ring; and
adjusting the height of the edge ring based on the calculated amount of erosion to compensate for the calculated amount of erosion.

2. The method of claim 1 , wherein the at least one input includes an erosion rate as input by a user.

3. The method of claim 1 , wherein the at least one input includes information indicating a type and duration of processing performed in the substrate processing system.

4. The method of claim 1 , wherein the at least one input includes calibration data indicating at least one of the height, a thickness, and a position of the edge ring.

5. The method of claim 1 , wherein calculating the amount of erosion of the edge ring includes calculating the amount of erosion based on the plurality of erosion rates as calculated in the respective usage periods.

6. The method of claim 1 , wherein each of the plurality of erosion rates is different for the respective usage periods.

7. The method of claim 1 , further comprising calculating the plurality of erosion rates using a lookup table that indexes erosion rates to usage periods.

8. The method of claim 1 , further comprising calculating the plurality of erosion rates using a model.

Assignees

• Lam Res Corp

Inventors

• Kamp Tom A
• Leal-Verdugo Carlos

Classifications

• H10P72/0616

  Monitoring of warpages, curvatures, damages, defects or the like · CPC title

• H10P72/7606 Primary

  characterised by edge clamping, e.g. clamping ring · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/0604 Primary

  Process monitoring, e.g. flow or thickness monitoring · CPC title