Ion implanter and beam profiler
US-11205560-B2 · Dec 21, 2021 · US
US12112859B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12112859-B2 |
| Application number | US-202217957310-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 30, 2022 |
| Priority date | Oct 1, 2021 |
| Publication date | Oct 8, 2024 |
| Grant date | Oct 8, 2024 |
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A method that includes accelerating a plurality of ytterbium ions toward a lattice of carbon fibers; wherein at least a portion of the plurality of ytterbium ions is a plurality of ytterbium-176 ions. The method further includes isolating the plurality of ytterbium-176 ions from the plurality of ytterbium ions; and capturing the plurality of ytterbium-176 ions in the lattice of carbon fibers.
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What is claimed is: 1. A method comprising: accelerating a plurality of ytterbium ions toward a lattice of carbon fibers; wherein at least a portion of the plurality of ytterbium ions is a plurality of ytterbium-176 ions; isolating the plurality of ytterbium-176 ions from the plurality of ytterbium ions; and capturing the plurality of ytterbium-176 ions in the lattice of carbon fibers. 2. The method of claim 1 further comprising burning the lattice of carbon fibers to obtain a residue comprising the plurality of ytterbium-176 ions. 3. The method of claim 1 , wherein isolating the plurality of ytterbium-176 ions comprises applying a magnetic field to the plurality of ytterbium ions using a magnetic analyzer, thereby mass separating the plurality of ytterbium ions; and blocking a portion of the plurality of ytterbium ions using a mass-resolving aperture positioned between the magnetic analyzer and the lattice of carbon fibers, wherein the plurality of ytterbium-176 ions pass through the mass-resolving aperture. 4. The method of claim 1 , wherein accelerating the plurality of ytterbium ions toward the lattice of carbon fibers comprises providing the plurality of ytterbium ions with energies greater than 100V. 5. The method of claim 1 , wherein capturing the plurality of ytterbium-176 ions in the lattice of carbon fibers comprises decelerating the plurality of ytterbium-176 ions by deflecting the plurality of ytterbium-176 ions off of a plurality of the carbon fibers of lattice of carbon fibers. 6. The method of claim 1 , further comprising increasing an area of the lattice of carbon fibers that captures the plurality of ytterbium-176 ions by operating an actuator to rotate or translate the lattice of carbon fibers. 7. The method of claim 1 , wherein the lattice of carbon fibers comprises multiple layers of a fibrous carbon material. 8. The method of claim 1 , wherein the lattice of carbon fibers comprises carbon fibers arranged in a plurality of directions. 9. The method of claim 1 , wherein isolating the plurality of ytterbium-176 ions from the plurality of ytterbium ions comprises applying a magnetic field to the plurality of ytterbium ions using a magnetic analyzer, thereby mass separating the plurality of ytterbium ions. 10. The method of claim 1 , wherein isolating the plurality of ytterbium-176 ions from the plurality of ytterbium ions comprises blocking a portion of the plurality of ytterbium ions using a mass-resolving aperture positioned between the magnetic analyzer and the lattice of carbon fibers, wherein the plurality of ytterbium-176 ions pass through the mass-resolving aperture. 11. The method of claim 1 , wherein capturing the plurality of ytterbium-176 ions in the lattice of carbon fibers includes holding the lattice of carbon fibers at a target voltage. 12. The method of claim 11 , further comprising reducing the target voltage to zero before disconnecting the lattice of carbon fibers from a voltage source. 13. The method of claim 1 , further comprising removing the lattice of carbon fibers and replacing the lattice of carbon fibers with a new lattice of carbon fibers. 14. The method of claim 1 , further comprising removing the plurality of ytterbium-176 ions from the lattice of carbon fibers; collecting the plurality of ytterbium-176 ions in a receptacle; and reusing the lattice of carbon fibers. 15. The method of claim 6 , wherein operating the actuator to rotate or translate the lattice of carbon fibers further includes mechanically coupling the lattice of carbon fibers to an interior plate within a vacuum chamber and magnetically coupling the interior plate to an exterior plate outside of the vacuum chamber; wherein the actuator drives rotation or translation of the exterior plate, which magnetically transfers the rotation or translation to the interior plate. 16. The method of claim 15 , further comprising cooling the exterior plate to increase the heat flow away from the lattice of carbon fibers. 17. The method of claim 15 , further comprising heating the exterior plate to increase the heat flow to from the lattice of carbon fibers. 18. The method of claim 1 , further comprising producing a plurality of ytterbium ions with an ion source. 19. The method of claim 18 , wherein producing the plurality of ytterbium ions includes emitting electrons from a filament to ionize a ytterbium vapor.
Separation involving two or more processes covered by different groups selected from groups B01D59/02, B01D59/10, B01D59/20, B01D59/22, B01D59/28, B01D59/34, B01D59/36, B01D59/38, B01D59/44 · CPC title
Separation by electrochemical methods (in general B01J) · CPC title
by ion exchange · CPC title
Other isotopes not provided for in the groups listed above · CPC title
Ion implantation · CPC title
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