Enhanced productivity for an etch system through polymer management

Patent metadata

Field	Value
Publication number	US-10037883-B2
Application number	US-201414182970-A
Country	US
Kind code	B2
Filing date	Feb 18, 2014
Priority date	Mar 15, 2013
Publication date	Jul 31, 2018
Grant date	Jul 31, 2018

Abstract

Embodiments described herein generally relate to an apparatus and methods for reducing the deposition of polymers in a semiconductor processing chamber. A heater jacket and heat sources are provided and may be configured to maintain a uniform temperature profile of the processing chamber. A method of maintaining a uniform temperature profile of a dielectric ceiling of the processing chamber is also provided.

First claim

The invention claimed is:

1. An apparatus for processing a substrate, comprising:
a dielectric ceiling having a roughened surface;
a conductive body connected to the dielectric ceiling, the conductive body having a first portion having a first bottom surface disposed within an insulator;
a substrate support disposed in the conductive body, the dielectric ceiling connected with the conductive body defines an interior region above the substrate support and the substrate support is circumscribed by the conductive body;
a pump port coupled to a second portion of the conductive body and in fluid communication with the interior region, the pump port directly coupled to a second bottom surface of the second portion of the conductive body disposed within a heater jacket, the heater jacket having a plurality of heating elements disposed therein operable to maintain the pump port at a temperature of between 80° C. and 130° C., wherein the first bottom surface of the first portion is formed contiguously coplanar with the second bottom surface of the second portion; and
a plurality of heat sources configured to maintain a uniform temperature profile of the dielectric ceiling.

2. The apparatus of claim 1 , wherein the dielectric ceiling comprises a ceramic material.

3. The apparatus of claim 1 , wherein the roughened surface has a surface roughness of between about 20 R a and about 120 R a .

4. The apparatus of claim 1 , wherein the dielectric ceiling is substantially dome shaped.

5. The apparatus of claim 1 , wherein the heater jacket comprises three heating elements.

6. The apparatus of claim 5 , wherein a first heating element is configured to heat a first region of the pump port.

7. The apparatus of claim 5 , wherein a second heating element is configured to heat a second region of the pump port.

8. The apparatus of claim 5 , wherein a third heating element is configured to heat a third region of the pump port.

9. The apparatus of claim 1 , wherein the plurality of heating elements are configured to maintain a uniform temperature profile of the pump port.

10. The apparatus of claim 1 , wherein the heat sources comprise lamps.

11. The apparatus of claim 1 , wherein the heat sources maintain the dielectric ceiling at a constant temperature of between about 80° C. and about 130° C.

12. A heater jacket, comprising:
a jacket body disposed around a pump port directly coupled to a first bottom surface of a first portion of a conductive body while a second portion of the conductive body is disposed free from the jacket body, wherein the second portion of the conductive body is configured to circumscribe a substrate when disposed therein, and the second portion is laterally coupled to the first portion and a second bottom surface of the second portion is formed contiguously coplanar with the first bottom surface of the first portion;
a first heating element disposed adjacent a first region of the pump port;
a second heating element disposed adjacent a second region of the pump port; and
a third heating element disposed adjacent a third region of the pump port, wherein the first heating element, the second heating element, and the third heating element are operable to maintain the pump port at a temperature of between 80° C. and 130° C.

13. The heater jacket of claim 12 , wherein the first heating element is configured to maintain a first temperature, the second heating element is configured to maintain a second temperature, and the third heating element is configured to maintain a third temperature, and wherein the first temperature, the second temperature, and the third temperature are different.

Assignees

• Applied Materials Inc

Inventors

• Chebi Robert
• Granados Alfredo
• Ceng Zhao H
• Wang Jianqi
• Balesan Rajan

Classifications

• H10P72/0434 Primary

  mainly by convection · CPC title

• H10P14/683 Primary

  carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC · CPC title

• H01L21/67109

  Electricity · mapped topic

• H01L21/02118 Primary

  Electricity · mapped topic

• H01J37/32119

  Windows · CPC title