Electrochemical assembly for forming semiconductor features
US-2024084473-A1 · Mar 14, 2024 · US
US12104264B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12104264-B2 |
| Application number | US-202117554677-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 17, 2021 |
| Priority date | Dec 17, 2021 |
| Publication date | Oct 1, 2024 |
| Grant date | Oct 1, 2024 |
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An electrochemical deposition system includes a cathode and a printhead. The printhead is spaced apart from the cathode, movable relative to the cathode, and comprises a plurality of deposition anodes. The system further comprises a capacitive sensor that includes a first electrically-conductive layer, at a known location relative to the cathode, and a second electrically-conductive layer, at a known location relative to the printhead. The system additionally includes a processor, electrically coupled with the capacitive sensor and configured to determine a distance between the cathode and the printhead in response to a capacitance of the capacitive sensor.
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What is claimed is: 1. A method of electrochemically forming a part, the method comprising steps of: determining a capacitance of a capacitive sensor, comprising: a first electrically-conductive layer, at a known location relative to a cathode; and a second electrically-conductive layer, at a known location relative to a printhead, which comprises a plurality of deposition anodes; determining a distance between the first electrically-conductive layer and the second electrically-conductive layer in response to the capacitance of the capacitive sensor; determining at least one of a position, orientation, or planarity of the cathode and the printhead, relative to each other, in response to the distance between the first-electrically-conductive layer and the second electrically-conductive layer; adjusting at least one of the position, orientation, or planarity of at least one of the cathode and the printhead, relative to each other, in response to a corresponding one of the position, orientation, or planarity of the cathode relative to the printhead being outside of a threshold; electrochemically forming a layer of material onto the cathode; at least partially submerging the cathode and the printhead in a fluidic dielectric, wherein the capacitance of the capacitive sensor is determined when the cathode and the printhead are at least partially submerged in the fluidic dielectric; and replacing the fluidic dielectric with electrolyte solution such that the cathode and the printhead are at least partially submerged in the electrolyte solution, wherein the layer of material is electrochemically formed onto the cathode when the cathode and the printhead are submerged in the electrolyte solution. 2. The method according to claim 1 , further comprising a step of measuring a voltage response between the first electrically-conductive layer and the second electrically-conductive layer, wherein the capacitance of the capacitance sensor is determined in response to the voltage response measured between the first electrically-conductive layer and the second electrically-conductive layer. 3. The method according to claim 1 , wherein: the step of determining the capacitance of the capacitive sensor comprises determining the capacitance of a plurality of capacitive sensors where the second electrically-conductive layers of the plurality of capacitive sensors are located around a periphery of the printhead; and the step of adjusting at least one of the position, orientation, or planarity of at least one of the cathode and the printhead, relative to each other, comprises adjusting a tilt of at least one of the cathode and the printhead, relative to each other. 4. The method according to claim 1 , wherein: the second electrically-conductive layer of the capacitive sensor is located at a center of the printhead; and the step of adjusting at least one of the position, orientation, or planarity of at least one of the cathode and the printhead, relative to each other, comprises adjusting a bow of at least one of the cathode and the printhead, relative to each other. 5. The method according to claim 1 , wherein: the step of determining the capacitance of the capacitive sensor comprises determining the capacitance of a plurality of capacitive sensors where the second electrically-conductive layers of the plurality of capacitive sensors are located around a periphery of the printhead; and the step of adjusting at least one of the position, orientation, or planarity of at least one of the cathode and the printhead, relative to each other, comprises adjusting a lateral position of at least one of the cathode and the printhead, relative to each other. 6. The method according to claim 1 , wherein: the step of determining the capacitance of the capacitive sensor comprises determining the capacitance of a plurality of capacitive sensors where the second electrically-conductive layers of some of the plurality of capacitive sensors are located around a periphery of the printhead and where the second electrically-conductive layer of the capacitive sensor is located at a center of the printhead; and the step of adjusting at least one of the position, orientation, or planarity of at least one of the cathode and the printhead, relative to each other, comprises adjusting a tilt of at least one of the cathode and the printhead, relative to each other, and adjusting a bow of at least one of the cathode and the printhead, relative to each other. 7. The method according to claim 1 , wherein: the printhead is spaced apart from the cathode and movable relative to the cathode; and adjusting the at least one of the position, orientation, or planarity of at least one of the cathode and the printhead, relative to each other, comprises moving the printhead and the cathode relative to each other. 8. The method according to claim 1 , wherein: the cathode comprises a seed layer and the first electrically-conductive layer of the capacitive sensor comprises the seed layer; and determining the distance comprises determining a distance between the seed layer and the second electrically-conductive layer. 9. The method according to claim 8 , wherein: the printhead comprises a plurality of deposition anodes and a metal layer separate from the plurality of deposition anodes; the second electrically-conductive layer of the capacitive sensor comprises the metal layer of the printhead; and determining the distance comprises determining a distance between the seed layer and metal layer. 10. The method according to claim 1 , wherein: determining the capacitance of the capacitive sensor comprises determining the capacitance of a plurality of capacitive sensors; each one of the plurality of capacitive sensors comprises the first electrically-conductive layer and a corresponding one of a plurality of second electrically-conductive layers; the second electrically-conductive layer of each one of the plurality of capacitive sensors is spaced apart from the second electrically-conductive layer of any other one of the plurality of capacitive sensors; determining the distance between the first electrically-conductive layer and the second electrically-conductive layer comprises determining the distance between the first electrically-conductive layer and the second electrically-conductive layer of each one of the plurality of capacitive sensors; and determining the at least one of a position, orientation, or planarity of the cathode and the printhead, relative to each other, is based on the distance between the first electrically-conductive layer and the second electrically-conductive layer of each one of the plurality of capacitive sensors. 11. The method according to claim 10 , wherein: the second electrically-conductive layer of at least one of the plurality of capacitive sensors comprises a metal layer separate from the plurality of deposition anodes; and the second electrically-conductive layer of at least one of the plurality of capacitive sensors comprises at least one of the plurality of deposition anodes. 12. The method according to claim 1 , wherein at least one of: the first electrically-conductive layer is fixed to the cathode such that the first electrically-conductive layer co-moves with the cathode; or the second electrically-conductive layer is fixed to the printhead such that the second electrically-conductive layer co-moves with the printhead. 13. A method of electrochemically forming a part, the method comprising steps of: determining a capacitance of a capacitive sensor, comprising: a first electrically-conductive layer, at a known location relative to a cathode; and
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