Temperature-stable, low-dielectric constant material with an ultra-low loss tangent

Patent metadata

Field	Value
Publication number	US-12065381-B2
Application number	US-202016925899-A
Country	US
Kind code	B2
Filing date	Jul 10, 2020
Priority date	Jul 11, 2019
Publication date	Aug 20, 2024
Grant date	Aug 20, 2024

Abstract

Disclosed herein are embodiments of high Q, temperature stable materials with low dielectric constants. In particular, a two-phase material can form based on the rutile phase of titanium oxide along with a spinel structure of ZnAl 2 O 4 . This material can have a dielectric constant below 15 which is simultaneously temperature stable.

First claim

What is claimed is:

1. A temperature-stable, low-dielectric constant material formed out of a ZnO—Al 2 O 3 —TiO 2 ternary system, the material comprising:
a first phase formed out of the ternary system, the first phase being at least one spinel; and
a second phase thermodynamically compatible with the first phase and formed out of the ternary system, the second phase being rutile, the material having a dielectric constant of between 8 and 15 and a loss tangent of less than 0.0001, the ternary system including about 0.5 to about 0.65 mole fraction AlO 1.5 .

2. The temperature-stable, low-dielectric constant material of claim 1 wherein the at least one spinel has a composition of Zn 1+x Al 2−2x Ti x O 4 , x being between 0 and 0.5.

3. The temperature-stable, low-dielectric constant material of claim 1 wherein the at least one spinel has a composition ZnAl 2 O 4 .

4. The temperature-stable, low-dielectric constant material of claim 1 further including MnO 2 .

5. The temperature-stable, low-dielectric constant material of claim 4 wherein the material includes about 0.075 wt. % MnO 2 .

6. The temperature-stable, low-dielectric constant material of claim 1 wherein the material has a firing temperature of between about 1250 and about 1400° C.

7. The temperature-stable, low-dielectric constant material of claim 1 wherein the ternary system includes about 0.3 to about 0.4 mole fraction ZnO, about 0.5 to about 0.65 mole fraction AlO 1.5 , and about 0.01 to about 0.5 mole fraction TiO 2 .

8. The temperature-stable, low-dielectric constant material of claim 1 wherein the at least one spinel includes a first spinel and a second spinel, the first spinel being different from the second spinel.

9. The temperature-stable, low-dielectric constant material of claim 1 wherein the ternary system includes about 0.3 to about 0.4 mole fraction ZnO.

10. The temperature-stable, low-dielectric constant material of claim 1 wherein the ternary system includes about 0.01 to about 0.5 mole fraction TiO 2 .

11. A temperature-stable, low-dielectric constant material formed out of a ZnO—Al 2 O 3 —TiO 2 ternary system, the material comprising:
a first phase formed out of the ternary system, the first phase being at least one spinel; and
a second phase thermodynamically compatible with the first phase and formed out of the ternary system, the second phase being rutile, the material having a dielectric constant of between 8 and 15 and a loss tangent of less than 0.0001, the at least one spinel having a composition of Zn 1+x Al 2−2x Ti x O 4 , and 0<x<1.

12. The temperature-stable, low-dielectric constant material of claim 11 wherein the ternary system includes about 0.5 to about 0.65 mole fraction AlO 1.5 .

13. The temperature-stable, low-dielectric constant material of claim 11 wherein the at least one spinel includes a first spinel and a second spinel, the first spinel being different from the second spinel.

14. The temperature-stable, low-dielectric constant material of claim 11 further including MnO 2 .

15. A radiofrequency component formed out of the temperature-stable, low-dielectric constant material of claim 1 .

16. The radiofrequency component of claim 15 wherein the radiofrequency component is a filter.

17. The radiofrequency component of claim 15 wherein the radiofrequency component is an isolator or a circulator.

18. A radiofrequency component formed out of the temperature-stable, low-dielectric constant material of claim 11 .

19. The radiofrequency component of claim 18 wherein the radiofrequency component is a filter.

20. The radiofrequency component of claim 18 wherein the radiofrequency component is an isolator or a circulator.

Assignees

• Skyworks Solutions Inc

Inventors

• Hill Michael David
• Polisetty Srinivas

Classifications

• C04B35/64

  Burning or sintering processes (C04B33/32 takes precedence {; powder metallurgy B22F}) · CPC title

• C04B2235/656

  characterised by specific heating conditions during heat treatment · CPC title

• C04B2235/3267

  MnO2 · CPC title

• C04B2235/3222

  Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4) · CPC title

• C04B2235/3234

  Titanates, not containing zirconia · CPC title