Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus

Patent metadata

Field	Value
Publication number	US-12040200-B2
Application number	US-201815962980-A
Country	US
Kind code	B2
Filing date	Apr 25, 2018
Priority date	Jun 20, 2017
Publication date	Jul 16, 2024
Grant date	Jul 16, 2024

Abstract

A semiconductor processing apparatus is disclosed that may include a reaction chamber joined by an upstream inlet flange and a downstream outlet flange wherein a longitudinal direction of the chamber extends from the inlet flange to the outlet flange and a plurality of ribs are provided on an outer surface of at least an upper chamber wall. The semiconductor processing apparatus may also include at least one array of heating elements disposed above the reaction chamber and at least one variable positioning device coupled to the at least one array of heating elements and configured to controllably adjust the position of the at least one array of heating elements relative to the position of the plurality of ribs.

First claim

What is claimed is:

1. A semiconductor processing apparatus comprising:
a reaction chamber comprising:
an upper chamber wall and a lower chamber wall connected by vertical sidewalls, the chamber walls being joined by an upstream inlet flange and a downstream outlet flange wherein a longitudinal direction of the reaction chamber extends from the inlet flange to the outlet flange; and
a plurality of ribs provided on an outer surface of at least the upper chamber wall, the plurality of ribs being orientated transversely to the longitudinal direction of the reaction chamber;

an array of heating elements disposed above the reaction chamber;
a first variable positioning device coupled to the array of heating elements at a first location, wherein the first variable positioning device controllably adjusts a longitudinal position of the array of heating elements as a unit relative to the plurality of ribs;
a second variable positioning device coupled to the array of heating elements at a second location differing from the first location, wherein the second variable positioning device controllably adjusts a lateral position of the array of heating elements as a unit relative to the plurality of ribs;
a pyrometer disposed above the array of heating elements, wherein the pyrometer senses a temperature of the reaction chamber through an opening in the array of heating elements; and
a positioning device for adjusting lateral and longitudinal positions of the pyrometer.

2. The apparatus of claim 1 , wherein the at least one array of heating elements comprises a plurality of radiant heating lamps.

3. The apparatus of claim 2 , wherein the plurality of radiant heating lamps are of an elongated tube type disposed substantially parallel to the longitudinal direction of the reaction chamber.

4. The apparatus of claim 2 , wherein the plurality of radiant heating lamps are of an elongated tube type disposed substantially perpendicular to the longitudinal direction of the reaction chamber.

5. The apparatus of claim 2 , wherein the plurality of radiant heating lamps is of an elongated tube type disposed substantially parallel and adjacent to one another, wherein the distance between the individual radiant heating lamps is adjustable using one or more of the first variable positioning device and the second variable positioning device.

6. The apparatus of claim 1 , wherein the first variable positioning device controllably adjusts the longitudinal position of the array of heating elements in a direction substantially parallel to the longitudinal direction of the reaction chamber.

7. The apparatus of claim 1 , wherein the second variable positioning device controllably adjusts the lateral position of the array of heating elements in a direction substantially perpendicular to the longitudinal direction of the reaction chamber.

8. The apparatus of claim 1 , further comprising a third variable positioning device coupled to the array of heating elements and configured to controllably adjust a height of the array of heating elements as a unit relative to the upper chamber wall of the reaction chamber.

9. The apparatus of claim 1 , further comprising:
a substrate support disposed within the reaction chamber beneath the array of heating elements, the substrate support configured to support at least one substrate; and
wherein the substrate support has a central axis around which the substrate support rotates.

10. The apparatus of claim 9 wherein the array of heating elements is configured to provide a temperature uniformity difference across a surface of the at least one substrate of less than 1.5° C.

11. The apparatus of claim 1 further comprising:
a pyrometer stand;
a first positioning device disposed on the pyrometer stand and coupled to the pyrometer; and
a second positioning device disposed on the pyrometer stand and coupled to another pyrometer.

12. The apparatus of claim 11 wherein the pyrometer is configured for sensing the temperature within the reaction chamber and the another pyrometer is configured for sensing an external temperature of the reaction chamber.

13. The apparatus of claim 1 , wherein the at least one of the first and second variable positioning devices are configured to provide a displacement of the array of heating elements no greater than approximately 2 centimeters.

14. The apparatus of claim 1 , wherein the reaction chamber comprises a refurbished reaction chamber.

15. The apparatus of claim 1 , further comprising a single piece reflector comprising a plurality of parabolic reflectors disposed adjacent to the array of heating elements the single piece reflector having an opening through which the pyrometer senses the temperature of the reaction chamber.

16. The apparatus of claim 1 , further comprising an additional array of heating elements disposed beneath the reaction chamber.

17. The apparatus of claim 1 , wherein the array of heating elements are disposed in an upper heating housing and the upper heating housing is connected to a reaction chamber housing via one or more hinged mechanisms.

18. The apparatus of claim 17 , wherein the one or more hinged mechanisms are connected to the reaction chamber housing in a fixed position.

19. The apparatus of claim 18 , wherein the one or more hinged mechanisms are configured for raising and lowering the upper heating housing relative to the reaction chamber; and wherein at least one of the one or more hinged mechanisms is further configured for repositioning the upper heating housing in a lowered position with a position tolerance relative to the plurality of ribs of less than 0.25 millimeters.

20. The apparatus of claim 1 , wherein the first variable positioning device and the second variable positioning device are independently adjustable.

21. The apparatus of claim 1 , further comprising:
a two-axis stage connected to the array of heating elements, wherein the first variable positioning device adjusts a first axis of the two-axis stage and the second variable positioning device adjusts a second axis of the two-axis stage.

22. The apparatus of claim 1 , further comprising:
a housing, wherein the array of heating elements is disposed within the housing; and
wherein at least one of the first variable positioning device and the second variable positioning device has a body mounted to the housing.

23. The apparatus of claim 1 , wherein at least one of the first variable positioning device and the second variable positioning device comprises a micrometer.

24. A semiconductor processing apparatus comprising:
a reaction chamber comprising:
an upper chamber wall and a lower chamber wall connected by vertical sidewalls, the chamber walls being joined by an upstream inlet flange and a downstream outlet flange wherein a longitudinal direction of the reaction chamber extends from the inlet flange to the outlet flange; and
a plurality of ribs provided on an outer surface of at least the upper chamber wall, the plurality of ribs being orientated transversely to the longitudinal direction of the reaction chamber;

an array of heating elements disposed above the reaction chamber;
a first variable positioning device coupled to the array of heating elements, wherein the first variable positioning device controllably adjusts a longitudinal position of the array of heating elements as a unit relative to the plurality of ribs;
a second variable positioning device coupled to the array of heat

Assignees

• Asm Ip Holding Bv

Inventors

• Rajavelu Shiva
• Tolle John
• Mccartney Rich

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0431 Primary

  Apparatus for thermal treatment · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• H10P72/04 Primary

  Apparatus for manufacture or treatment · CPC title

• C30B25/105

  by irradiation or electric discharge · CPC title