Chemical deposition chamber having gas seal

Patent metadata

Field	Value
Publication number	US-2015004798-A1
Application number	US-201313930289-A
Country	US
Kind code	A1
Filing date	Jun 28, 2013
Priority date	Jun 28, 2013
Publication date	Jan 1, 2015
Grant date	—

Abstract

A system for sealing a processing zone in a chemical deposition apparatus is disclosed, which includes a chemical isolation chamber having a deposition chamber formed within the chemical isolation chamber; a showerhead module having a faceplate, the showerhead module including a plurality of inlets which deliver reactor chemistries to a cavity for processing semiconductor substrates and exhaust outlets which remove reactor chemistries and inert gases from the cavity, and an outer plenum configured to deliver an inert gas; a pedestal module configured to support a substrate and which moves vertically to close the cavity with a narrow gap between the pedestal module and a step around an outer portion of the faceplate; and an inert seal gas feed configured to feed the inert seal gas into the outer plenum, and wherein the inert seal gas flows radially inwardly at least partly through the narrow gap to form a gas seal.

First claim

What is claimed is:

1 . A system for sealing a processing zone in a chemical deposition apparatus, comprising:
a chemical isolation chamber having a deposition chamber formed within the chemical isolation chamber; a showerhead module having a faceplate and a backing plate, the showerhead module including a plurality of inlets which deliver reactor chemistries to a cavity for processing semiconductor substrates and exhaust outlets which remove reactor chemistries and inert gases from the cavity, and an outer plenum configured to deliver an inert gas; a pedestal module configured to support a substrate and which moves vertically to close the cavity with a narrow gap between the pedestal module and a step around an outer portion of the faceplate; and an inert seal gas feed configured to feed the inert seal gas into the outer plenum, and wherein the inert seal gas flows radially inwardly at least partly through the narrow gap to form a gas seal.

2 . The system of claim 1 , comprising:
an annular evacuation passage which removes the inert sealing gases flowing radially inwardly through the narrow gap and from a zone surrounding a periphery of a substrate on an upper surface of the pedestal module.

3 . The system of claim 2 , wherein the annular evacuation passage is located underneath the step of the faceplate.

4 . The system of claim 1 , comprising:
a semiconductor substrate on an upper surface of the pedestal module.

5 . The system of claim 1 , wherein the outer plenum is formed between an outer periphery of the faceplate and an inner periphery of an isolation ring.

6 . The system of claim 5 , wherein the outer plenum is an annular conduit.

7 . The system of claim 1 , wherein the narrow gap has a width of about 5.0 mm to 25.0 mm from an outer edge of the cavity to an outer edge of the faceplate.

8 . The system of claim 1 , wherein the exhaust outlets surround the plurality of inlets.

9 . The system of claim 1 , wherein the inert seal gas is a nitrogen gas or an argon gas.

10 . The system of claim 2 , comprising:
at least one evacuation conduit in fluid communication with the annular evacuation passage; and an evacuation apparatus in fluid communication with the at least one evacuation conduit.

11 . The system of claim 1 , comprising:
at least one evacuation conduit in fluid communication with an intermediate plenum; and an evacuation apparatus in fluid communication with the plurality of evacuation conduits.

12 . The system of claim 1 , comprising:
one or more cavities located in the pedestal module, and wherein the one or more cavities are configured to be fluid communication with the outer plenum.

13 . The system of claim 12 , wherein the one or more cavities in the pedestal module is an annular channel.

14 . The system of claim 1 , wherein the step around the outer portion of the faceplate is a separate ring.

15 . A method for preventing reactor chemistries from escaping from a cavity for processing semiconductor substrates, comprising:
processing a substrate in the cavity of a chemical deposition apparatus, the cavity formed between a showerhead module and a pedestal module configured to receive the substrate, wherein the showerhead module includes a plurality of inlets which delivers reactor chemistries to the cavity and exhaust outlets which remove reactor chemistries and inert gases from the cavity; feeding an inert seal gas feed into an outer plenum configured to deliver the inert gas into a narrow gap between the pedestal module and a step around an outer portion of the faceplate, which surrounds an outer edge of the cavity; and flowing the inert seal gas radially inwardly at least partly through the narrow gap to form a gas seal.

16 . The method of claim 15 , comprising:
purging the cavity of reactor chemistries by increasing the flow rate of the inert seal gas into the cavity through the narrow gap; and evacuating the reactor chemistries from the cavity with an evacuation apparatus fluidly connected to the concentric outlets of the showerhead module.

17 . The method of claim 16 , comprising
removing the inert seal gas from a zone surrounding a periphery of the substrate on the pedestal module through an evacuation passage in fluid communication with an evacuation apparatus.

18 . The method of claim 15 , comprising:
flowing the inert seal gas into the narrow gap at a Peclet number greater than about 1.0.

19 . The method of claim 15 , comprising:
depositing a layer on a substrate via at least one of the following processes: chemical vapor deposition, plasma-enhanced chemical vapor deposition, atomic layer deposition, plasma-enhanced atomic layer deposition, pulsed layer deposition, and/or plasma enhanced pulsed deposition.

20 . The method of claim 15 , comprising:
feeding the inert seal gas to the narrow gap at about 100 cc/minute to about 5.0 slm (standard liters per minute).

21 . The method of claim 15 , comprising:
adjusting the flow rate of the inert seal gas into the narrow gap based on a pressure produced by the exhaust outlets surrounding the plurality of inlets.

22 . The method of claim 15 , comprising adjusting a pressure in an inner portion of an isolation chamber of the chemical deposition apparatus and which is located outside the cavity, and wherein the pressure adjustment is in tandem with changes in cavity pressure and process gas flow rate to enable sealing with minimized diffusion of the inert seal gas into the cavity.

23 . The method of claim 15 , comprising:
adjusting the flow rate of the inert seal gas to enable sealing and low diffusion of the inert gas into the cavity.

Assignees

• Lam Res Corp

Inventors

• Chandrasekharan Ramesh
• Sangplung Saangrut

Classifications

• H10P72/0441

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H01L21/67017 Primary

  Electricity · mapped topic

• C23C16/45544

  characterized by the apparatus · CPC title

• C23C16/4409 Primary

  characterised by sealing means · CPC title