Spatially tunable deposition to compensate within wafer differential bow

Patent metadata

Field	Value
Publication number	US-11946142-B2
Application number	US-202017633942-A
Country	US
Kind code	B2
Filing date	Aug 6, 2020
Priority date	Aug 16, 2019
Publication date	Apr 2, 2024
Grant date	Apr 2, 2024

Abstract

A plasma processing chamber for depositing a film on an underside surface of a wafer, includes showerhead pedestal. The showerhead pedestal includes a first zone and a second zone. An upper separator fin is disposed over a top surface of the showerhead pedestal and a lower separator fin is disposed under the top surface of the showerhead pedestal and aligned with the upper separator fin. The first zone is configured for depositing a first film to the underside surface of the wafer and the second zone is configured for depositing a second film to the underside surface of the wafer. In another embodiment, a top surface of the showerhead pedestal may be configured to receive a masking plate instead of the upper separator fin. The masking plate is configured with a first area that has openings and a second area that is masked. The first areas is used to provide the process gas to a portion of the underside surface of the wafer for depositing a film.

First claim

The invention claimed is:

1. A showerhead pedestal (ShoPed) for use in a plasma processing chamber for depositing films on an underside surface of a wafer, comprising:
a first zone disposed in the ShoPed;
a second zone disposed in the ShoPed;
an upper separator fin disposed over a top surface of the ShoPed; and
a lower separator fin disposed under the top surface of the ShoPed and aligned with the upper separator fin;
wherein the first zone is configured for depositing a first film on the underside surface of the wafer, the second zone is configured for depositing a second film on the underside surface of the wafer, and
wherein the upper separator fin and the lower separator fin define separation boundaries between the first film and the second film.

2. The ShoPed of claim 1 , wherein the first zone includes a first plenum for containing a volume of a first process gas and the second zone includes a second plenum for containing a volume of a second process gas.

3. The ShoPed of claim 2 , wherein the first plenum is connected to a first end of a first feed, a second end of the first feed configured to be connected to a first process gas source to receive the first process gas and the second plenum is connected to a first end of a second feed, a second end of the second feed configured to be connected to a second process gas source to receive the second process gas.

4. The ShoPed of claim 2 , wherein the first zone includes a first set of outlets interfacing with the first plenum and the second zone includes a second set of outlets interfacing with the second plenum, the first set of outlets providing the first process gas for generating the first film and the second set of outlets providing the second process gas for generating the second film.

5. The ShoPed of claim 1 , wherein the ShoPed is configured to be connected to a radio frequency power supply to receive power to generate the first film and the second film, and
a controller to control deposition of the first film and the second film.

6. The ShoPed of claim 5 , wherein the radio frequency power supply is configured to provide power to selectively generate the first film, or the second film, or both the first and second films at any given time.

7. The ShoPed of claim 1 , wherein the plasma processing chamber further includes an upper electrode showerhead that is disposed in a top portion and oriented opposite to the ShoPed, the upper electrode showerhead is configured for depositing a third film to a top surface of the wafer, when received in the plasma processing chamber, and wherein the upper electrode showerhead is configured to be connected to a second radio frequency power supply to receive power to generate the third film.

8. The ShoPed of claim 1 , wherein the upper separator fin includes a tapered top portion, a flat bottom portion and a body extending between the tapered top portion and the flat bottom portion, wherein the tapered top portion is proximate to and separated from the underside surface of the wafer when the wafer is supported on a carrier ring that is supported by a wafer support on the top surface of the ShoPed, and wherein the flat bottom portion is connected to the top surface of the ShoPed.

9. The ShoPed of claim 8 , wherein the flat bottom portion is embedded inside the ShoPed.

10. The ShoPed of claim 8 , wherein the flat bottom portion is affixed to the top surface of the ShoPed.

11. The ShoPed of claim 1 , further including a wafer support defined on an edge region of the top surface for receiving a carrier ring supporting a wafer, the edge region including a plurality of recesses distributed along a circumference of the edge region, each recess configured to receive a corresponding extension defined on an underside surface of the carrier ring supporting the wafer.

12. The ShoPed of claim 1 , further including a wafer support defined on an edge region of the top surface for receiving a carrier ring supporting a wafer, the wafer support including a plurality of spacers located along a circumference of the edge region, each spacer of the plurality of spacers including a recess that is configured to mate with a corresponding mating extension defined on a bottom surface of the carrier ring.

13. The ShoPed of claim 11 , wherein the wafer support is a support ring coupled to a lift mechanism and configured to be vertically adjustable.

14. The ShoPed of claim 1 , wherein a shape and size of the first zone and the second zone are determined with a mathematical model generated using a machine-learning algorithm or using an in-situ metrology tool.

15. A showerhead pedestal (ShoPed) for use in a plasma processing chamber for depositing films on an underside surface of a wafer, comprising:
an inner plenum configured to receive a volume of process gas;
a set of outlets defined on a top surface of the ShoPed and configured to interface with the inner plenum to provide the process gas for depositing a film;
a masking plate disposed over the top surface of the ShoPed, the masking plate including a first area that includes openings and a second area that is masked,
wherein the first area of the masking plate is configured to provide the process gas to a portion of the underside surface of the wafer for depositing the film.

16. The ShoPed of claim 15 , wherein the masking plate is disposed over the top surface of the ShoPed so as to define a first gap between the top surface of the ShoPed and a bottom surface of the masking plate and a second gap between a top surface of the masking plate and the underside surface of the wafer, the first and the second gaps used to receive the process gas from the inner plenum of the ShoPed and generate the film for deposition.

17. The ShoPed of claim 15 , wherein the ShoPed includes a support surface defined along an outer edge of the top surface of the ShoPed to support a carrier ring supporting the wafer when the carrier ring and the wafer are received in the plasma processing chamber, the support surface configured to support the carrier ring with the wafer such that the wafer is spaced apart from the top surface of the masking plate, wherein an edge of the masking plate includes a top profile that complements a profile of an underside surface of the carrier ring.

18. The ShoPed of claim 17 , wherein the support surface is defined by a set of spacers distributed uniformly along the outer edge on the top surface of the ShoPed, a top surface of each spacer of the set of spacers including a recess for receiving a ring extension defined on the bottom surface of the carrier ring, a size and shape of the recess matching a size and shape of the ring extension.

19. The ShoPed of claim 15 , wherein the ShoPed is connected to:
(a) a plurality of gas sources through a gas feed to allow the gas feed to supply a plurality of process gases to the inner plenum for depositing different films in different portions on the underside surface of the wafer; and
(b) a radio frequency power supply, so as to receive power to generate the film, wherein the film is one of a first film generated using a first process gas or a second film generated using a second process gas.

20. The ShoPed of claim 15 , wherein the ShoPed is configured to be connected to a controller to control deposition of the film in the portion defined on the underside surface of the wafer.

Assignees

• Lam Res Corp

Inventors

• Shaikh Fayaz A
• Vintila Adriana
• Mudrow Matthew
• Linebarger Jr Nick Ray
• Yin Xin
• Lee James F
• Williams Brian Joseph

Classifications

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/7621

  characterised by supporting two or more semiconductor substrates · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/0434

  mainly by convection · CPC title