Spatially tunable deposition to compensate within wafer differential bow
US-12338531-B2 · Jun 24, 2025 · US
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Mudrow Matthew patents
Mudrow Matthew is listed as an inventor on 10 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Mudrow Matthew |
| Total patents | 10 |
| First publication | Jun 28, 2018 |
| Latest publication | Jun 24, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Spatially tunable deposition to compensate within wafer differential bow
US-2024167161-A1 · May 23, 2024 · US
Spatially tunable deposition to compensate within wafer differential bow
US-11946142-B2 · Apr 2, 2024 · US
Spatially tunable deposition to compensate within wafer differential bow
US-2022298632-A1 · Sep 22, 2022 · US
High temperature heating of a substrate in a processing chamber
US-2022199379-A1 · Jun 23, 2022 · US
Showerhead with configurable gas outlets
US-2022136107-A1 · May 5, 2022 · US
High power low pressure UV bulb with plasma resistant coating
US-10354857-B2 · Jul 16, 2019 · US
Rapid chamber clean using concurrent in-situ and remote plasma sources
US-10161034-B2 · Dec 25, 2018 · US
Rapid chamber clean using concurrent in-situ and remote plasma sources
US-2018305814-A1 · Oct 25, 2018 · US
High power low pressure uv bulb with plasma resistant coating
US-2018182607-A1 · Jun 28, 2018 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 10 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/505 | 8 |
| H01J37/3244 | 6 |
| C23C16/4585 | 6 |
| C23C16/45597 | 5 |
| C23C16/45565 | 5 |