Semiconductor processing device

Patent metadata

Field	Value
Publication number	US-11946136-B2
Application number	US-202017014820-A
Country	US
Kind code	B2
Filing date	Sep 8, 2020
Priority date	Sep 20, 2019
Publication date	Apr 2, 2024
Grant date	Apr 2, 2024

Abstract

A semiconductor processing device is disclosed. The device can include a reactor and a solid source vessel configured to supply a vaporized solid reactant to the reactor. A process control chamber can be disposed between the solid source vessel and the reactor. The device can include a valve upstream of the process control chamber. A control system can be configured to control operation of the valve based at least in part on feedback of measured pressure in the process control chamber.

First claim

What is claimed is:

1. A semiconductor processing device comprising:
a reactor;
a solid source vessel configured to supply a vaporized reactant to the reactor;
a process control chamber in fluid communication with the solid source vessel and the reactor between the solid source vessel and the reactor, wherein the process control chamber is configured to collect vaporized reactant before being delivered to the reactor;
a process control valve upstream of the process control chamber between the solid source vessel and the process control chamber; and
a control system configured to control operation of the process control valve based at least in part on feedback of measured pressure in the process control chamber.

2. The device of claim 1 , further comprising a pressure transducer configured to measure the pressure in the process control chamber.

3. The device of claim 1 , wherein the control system comprises a proportional-integral-derivative (PID) controller.

4. The device of claim 1 , wherein the process control valve comprises an on/off binary valve.

5. The device of claim 1 , further comprising a first thermal zone at a first temperature and a second thermal zone at a second temperature higher than the first temperature,
wherein the solid source vessel is disposed in the first thermal zone, and wherein the process control valve and the process control chamber are disposed in the second thermal zone.

6. The device of claim 5 , wherein the second temperature is higher than the first temperature by an amount in a range of 5° C. to 45° C.

7. The device of claim 1 , further comprising a filter between the solid source vessel and the process control chamber.

8. The device of claim 1 , further comprising a reactor supply valve between the process control chamber and the reactor, the reactor supply valve configured to pulse the vaporized reactant to the reactor.

9. The device of claim 1 , wherein the reactor comprises a reaction chamber and a dispersion device to disperse the vaporized reactant into the reaction chamber.

10. A device for forming a vaporized reactant, the device comprising:
a solid source vessel disposed in a first thermal zone at a first temperature;
a process control chamber downstream of and in fluid communication with the solid source vessel, the process control chamber disposed in a second thermal zone at a second temperature that is higher than the first temperature and configured to collect and transfer the vaporized reactant to a reactor downstream of the process control chamber;
a process control valve upstream of the process control chamber and disposed in the second thermal zone between the solid source vessel and the process control chamber; and
a control system configured to control operation of the process control valve based at least in part on feedback of measured pressure in the process control chamber.

11. The device of claim 10 , further comprising a pressure transducer configured to measure the pressure in the process control chamber.

12. The device of claim 10 , wherein the control system comprises a proportional-integral-derivative (PID) controller.

13. The device of claim 10 , wherein the process control valve comprises an on/off binary valve.

14. The device of claim 10 , further comprising a filter between the solid source vessel and the process control chamber.

15. The device of claim 10 , further comprising the reactor downstream of the process control volume and a reactor supply valve between the process control chamber and the reactor, the reactor supply valve configured to pulse the vaporized reactant to the reactor.

16. The device of claim 15 , wherein the reactor comprises a reaction chamber and a dispersion device to disperse the vaporized reactant into the reaction chamber.

17. A method of forming a vaporized reactant, the method comprising: vaporizing a solid reactant to form a reactant vapor; transferring the reactant vapor to a process control chamber; collecting the reactant vapor in the process control chamber; controlling operation of a process control valve upstream of the process control chamber based at least in part on feedback of measured pressure in the process control chamber; and transferring the reactant vapor from the process control chamber to a reaction chamber.

18. The method of claim 17 , further comprising measuring the pressure in the process control chamber with a pressure transducer.

19. The method of claim 17 , wherein controlling the operation of the process control valve comprises using a proportional-integral-derivative (PID) controller.

20. The method of claim 17 , wherein controlling the operation of the process control valve comprises controlling a duration in which the process control valve is opened.

Assignees

• Asm Ip Holding Bv

Inventors

• Winkler Jereld Lee
• Shero Eric James
• White Carl Louis
• Swaminathan Shankar
• Zope Bhushan

Classifications

• H10P14/6334

  using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition (deposition by physical ablation of a target H10P14/6329) · CPC title

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title

• C23C16/448 Primary

  characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials · CPC title

• H01L21/02271

  Electricity · mapped topic

• H01L21/0262

  Electricity · mapped topic