Coated active cantilever probes for use in topography imaging in opaque liquid environments, and methods of performing topography imaging

Patent metadata

Field	Value
Publication number	US-11906546-B2
Application number	US-202017623789-A
Country	US
Kind code	B2
Filing date	Jul 6, 2020
Priority date	Jul 3, 2019
Publication date	Feb 20, 2024
Grant date	Feb 20, 2024

Abstract

Active cantilever probes having a thin coating incorporated into their design are disclosed. The probes can be operated in opaque and/or chemically harsh environments without the need of a light source or optical system and without being significantly negatively impacted by corrosion. The probes include a substrate that has a cantilever, a thermomechanical actuator associated with the cantilever, a piezoresistive stress sensor disposed on the cantilever, and a thin coating disposed on the cantilever and the piezoresistive stress sensor. The coating is bonded to the substrate, is thermally conductive, and has a low thermal resistance. Further, the thin coating is configured to have little to no impact on one or more of a mass of the active probe, a residual stress of the cantilever, or a stiffness of the active probe. Techniques for performing topography and making other measurements in an opaque and/or chemically harsh environment are also provided.

First claim

What is claimed is:

1. An active probe, comprising:
a substrate, the substrate including a cantilever having a base region and a tip region;
a thermomechanical actuator associated with the cantilever and configured to cause the cantilever to deflect;
a piezoresistive stress sensor disposed on the cantilever at the base region and configured to measure deflection of the cantilever at the tip region; and
a thin coating disposed on the cantilever and the piezoresistive stress sensor, the coating being bonded to the substrate, thermally conductive, and having a thermal resistance, in which a thermal time constant τ is less than 1/ƒ, where ƒ is a cantilever resonance frequency,
wherein the thin coating is configured to have a negligible impact, or no impact, on at least one of a resonance frequency or a maximum output amplitude on the cantilever and the piezoresistive stress sensor, the negligible impact being characterized by at least one of the thin coating increasing the resonance frequency by less than about 11% or decreasing the maximum output amplitude less than about eleven-fold,
wherein the thin coating comprises a photoresist identifiable as “Positiv 20.”

2. The probe of claim 1 , wherein the thermomechanical actuator comprises a heating element.

3. The probe of claim 1 , wherein the thermomechanical actuator comprises a plurality of layers of the substrate with at least one layer of the plurality of layers having a different coefficient of thermal expansion than another layer of the plurality of layers.

4. The probe of claim 1 , wherein a thickness of the thin coating is substantially uniform across a surface area of the substrate.

5. The probe of claim 1 , wherein a thickness of the thin coating is approximately in the range of about 0.1 micrometers to about 10 micrometers.

6. The probe of claim 1 , wherein the thin coating is configured to be chemically inactive in an opaque liquid environment.

7. The probe of claim 6 , wherein the opaque liquid environment comprises at least one of a crude oil, whole blood, and sulfuric acid.

8. The probe of claim 1 , wherein the thin coating comprises parylene.

9. The probe of claim 1 , wherein a linear relationship exists between a voltage across the piezoresistive stress sensor and deflection of the cantilever.

10. The probe of claim 1 , wherein the probe is configured to perform topography imaging.

11. The probe of claim 10 , wherein the probe is configured to perform topography imaging without either of a light source or an optical system.

12. The probe of claim 10 , wherein the probe is configured to operate in an opaque environment.

13. The probe of claim 1 , wherein the negligible impact is characterized by the thin coating increasing the resonance frequency by less than about 11% and decreasing the maximum output amplitude less than about eleven-fold.

Assignees

• Massachusetts Inst Technology
• Nano Analytik Gmbh
• Synfuels Americas Corp
• Synsfuels Americas Corp

Inventors

• Xia Fangzhou
• Yang Chen
• Wang Yi
• Youcef-Toumi Kamal
• Reuter Christoph
• Ivanov Tzvetan
• Holz Mathias
• Rangelow Ivo

Classifications

• G01Q10/045 Primary

  Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe · CPC title

• G01Q20/04

  Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge · CPC title

• G01Q30/14

  Liquid environment · CPC title

• G01Q70/08

  Probe characteristics · CPC title