Dynamic sweep-plow microcantilever device and methods of use

Patent metadata

Field	Value
Publication number	US-10352963-B2
Application number	US-201615389052-A
Country	US
Kind code	B2
Filing date	Dec 22, 2016
Priority date	Dec 22, 2015
Publication date	Jul 16, 2019
Grant date	Jul 16, 2019

Abstract

Implementations include a dynamic sweep-plow microcantilever (DSPM) device for nano-machining, nano-manufacturing, and nano-imaging using SPMs (e.g., an AFM). The DSPM device includes two elongated cantilevered arms that are spaced apart at their proximal ends and on which a piezoelectric layer is disposed. The distal ends of the arms are coupled together, and a distal tip is coupled to the distal ends and extends below a plane that includes a lower surface of the arms. The DSPM device is mounted on the AFM and applies nano-machining force through vibration that is induced by the piezoelectric layers on the arms. The DSPM device can vibrate such that the tip undergoes one or both of bending and torsional vibrations, which allows the DSPM device to perform both plowing and/or sweeping in nano-scale. The piezoelectric layers can be used for sensing by collecting vibrational feedback at the distal tip using a laser sensor.

First claim

The invention claimed is:

1. A dynamic sweep plow microcantilever device comprising:
a first elongated cantilevered arm having a first proximal end, a first distal end, a first upper surface, and a first lower surface, wherein the first upper and lower surfaces extend between the first proximal and distal ends and are spaced apart from each other and face opposite directions;
a second elongated cantilevered arm having a second proximal end, a second distal end, a second upper surface, and a second lower surface, wherein the second upper and lower surfaces extend between the second proximal and distal ends and are spaced apart from each other and face opposite directions, wherein the first and second proximal ends are coupled to a base and are spaced apart from each other;
a first piezoelectric layer disposed on the first lower surface and a second piezoelectric layer disposed on the second lower surface, the first piezoelectric layer is electrically coupled to first base electrodes and the second piezoelectric layer is electrically coupled to second base electrodes;
a distal tip coupled to the first and second distal ends, a distal end of the distal tip extending below a plane that includes the first and second lower surfaces;
further comprising a microcontroller coupled to the first and second base electrodes, the microcontroller configured to control motion of the tip by communicating electrical inputs to the first and second piezoelectric layers via the electrodes, wherein:
electrical inputs to the first and second piezoelectric layers that have the same amplitude and in-phase frequency cause the distal tip to vibrate vertically,
electrical inputs that have the same amplitude and 180° out of phase frequency cause the distal tip to vibrate laterally, and
electrical inputs that have a combination of a first input and a second input cause the distal tip to vibrate laterally and rotationally (3D vibration), wherein the first input has the same amplitude and in-phase frequency and the second input has the same amplitude and 180° out of phase frequency.

2. The dynamic sweep plow microcantilever device of claim 1 , wherein the first and second elongated cantilevered arms extend parallel to each other.

3. The dynamic sweep plow microcantilver device of claim 1 , wherein the first and second elongated cantilevered arms intersect at the distal ends thereof.

4. The dynamic sweep plow microcantilver device of claim 1 , wherein the distal tip has a triangular prism shape, a pyramidal shape, a cone shape, or a spherical shape.

5. The dynamic sweep plow microcantilever device of claim 1 , wherein the distal tip is formed by etching.

6. The dynamic sweep plow microcantilever device of claim 1 , wherein the distal tip is separately formed and attached to the first and second distal ends.

7. The dynamic sweep plow microcantilever device of claim 1 , further comprising a third piezoelectric layer disposed on the first upper surface and a fourth piezoelectric layer disposed on the second upper surface, wherein the third piezoelectric layer is electrically coupled to a third base electrode, and the fourth piezoelectric layer is electrically coupled to a fourth base electrode.

8. The dynamic sweep plow microcantilever device of claim 1 , wherein the base is coupled to an atomic force microscope.

9. The dynamic sweep plow microcantilever device of claim 1 , wherein the first and/or second elongated cantilevered arms are vibrated at a resonance frequency.

10. The dynamic sweep plow microcantilever device of claim 1 , wherein the first and/or second elongated cantilevered arms are vibrated at any frequency.

11. The dynamic sweep plow microcantilever device of claim 10 , wherein the first and/or second cantilevered arms are vibrated at an ultrasonic frequency.

12. The dynamic sweep plow microcantilever device of claim 1 , wherein the first and second elongated cantilevered arms are vibrated at a frequency, and the device further comprises a microprocessor in electrical communication with the first and second base electrodes, the microprocessor being configured for increasing the vibration frequency to increase the vertical and/or torsional movement of the distal tip or decreasing the vibration frequency to decrease the vertical and/or torsional movement of the distal tip.

13. The dynamic sweep plow microcantilever device of claim 1 , wherein the first and second piezoelectric layers are the same.

14. The dynamic sweep plow microcantilever device of claim 1 , wherein the first and second piezoelectric layers are different.

Assignees

• Univ Alabama

Inventors

• Omidi Ehsan
• Mahmoodi Nima

Classifications

• G01Q80/00

  Applications, other than SPM, of scanning-probe techniques (manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08) · CPC title

• G01Q70/10

  Shape or taper · CPC title

• G01Q10/045 Primary

  Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe · CPC title

• G03F7/0002

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title