Optical element and lithography system

Patent metadata

Field	Value
Publication number	US-11874525-B2
Application number	US-202217805175-A
Country	US
Kind code	B2
Filing date	Jun 2, 2022
Priority date	Dec 9, 2019
Publication date	Jan 16, 2024
Grant date	Jan 16, 2024

Abstract

An optical element reflects radiation, such as EUV radiation. The optical element includes a substrate with a surface to which a reflective coating is applied. The substrate has at least one channel through which a coolant can flow. The substrate is formed from fused silica, such as titanium-doped fused silica, or a glass ceramic. The channel has a length of at least 10 cm below the surface to which the reflective coating is applied. The cross-sectional area of the channel varies by no more than +/−20% over the length of the channel.

First claim

What is claimed is:

1. An optical element, comprising:
a substrate comprising a surface; and
an EUV reflective coating supported by the surface,
wherein:
the substrate is monolithic;
the substrate comprises a member selected from the group consisting of fused silica and a glass ceramic;
the substrate comprises a channel configured to have a coolant flow therethrough;
below the surface supporting the EUV reflective coating, the channel has a length that is at least 10 centimeters;
below the surface supporting the EUV reflective coating, the channel has a cross-sectional area that varies by no more than +/−20% over the length of the channel.

2. The optical element of claim 1 , wherein, below the surface supporting the EUV reflective coating, the length of the channel is at least 20 centimeters.

3. The optical element of claim 2 , wherein, below the surface supporting the EUV reflective coating, the cross-sectional area of the channel varies by no more than +/−10% over the length of the channel.

4. The optical element of claim 1 , wherein, below the surface supporting the EUV reflective coating, the cross-sectional area of the channel varies by no more than +/−10% over the length of the channel.

5. The optical element of claim 1 , wherein the substrate comprises a titanium-doped fused silica.

6. The optical element of claim 1 , wherein the channel has a mean cross-sectional area of between 100 square micrometers and 25 square millimeters.

7. The optical element of claim 1 , wherein the channel has a mean cross-sectional area of between one square millimeter and 25 square millimeters.

8. The optical element of claim 1 , wherein the cross-sectional area of the channel has a ratio of height to width of less than 5:1.

9. The optical element of claim 1 , wherein the surface supporting the EUV reflective coating has a maximum extent of between 10 centimeters and 100 centimeters in at least one direction perpendicular to a thickness direction of the substrate.

10. The optical element of claim 1 , wherein:
the optical element comprises a plurality of channels configured to have the coolant flow therethrough; and
for at least one of the channels:
the channel runs at a substantially constant distance from the surface supporting the EUV reflective coating to which the reflective coating; and
the substantially constant distance is between one to three times a distance between adjacent channels.

11. The optical element of claim 10 , wherein the surface supporting the EUV reflective coating is curved.

12. The optical element of claim 1 , wherein the optical element comprises a plurality of channels, and a distance between adjacent channels is not greater than a distance of the channels from the surface supporting the EUV reflective surface.

13. The optical element of claim 1 , wherein the substrate comprises titanium-doped fused silica having a zero-crossing temperature that varies by no more than 5 K peak-to-valley in a volume region of the substrate between the channel the surface supporting the EUV coating.

14. The optical element of claim 1 , wherein the substrate comprises titanium-doped fused silica having a coefficient of thermal expansion that varies by less than 0.5 K/cm in a volume region of the substrate between the channel the surface supporting the EUV coating.

15. The optical element of claim 1 , wherein the channel has a roughness R a of less than 5 μm rms on its inner side.

16. A lithography system, comprising:
an optical element according to claim 1 ,
wherein the lithography system is an EUV lithography system.

17. The lithography system of claim 16 , further comprising a cooling device configured to cause the coolant to flow through the channel.

18. The lithography system of claim 16 , further comprising a cooling device configured to cause the coolant to flow through the channel with an overall volumetric flow rate of at least one liter per minute.

19. The lithography system of claim 16 , further comprising a cooling device configured to cause the coolant to flow through the channel with a Reynolds number of less than 1000.

20. The optical element of claim 1 , wherein the channel is curved in a direction perpendicular to a thickness direction of the substrate.

21. An optical element, comprising:
a substrate comprising a surface; and
an EUV reflective coating supported by the surface,
wherein:
the substrate comprises a member selected from the group consisting of fused silica and a glass ceramic;
the substrate comprises a channel configured to have a coolant flow therethrough;
the channel has a roughness R a of less than 5 μm rms on its inner side;
below the surface supporting the EUV reflective coating, the channel has a length that is at least 10 centimeters;
below the surface supporting the EUV reflective coating, the channel has a cross-sectional area that varies by no more than +/−20% over the length of the channel.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Eva Eric

Classifications

• G02B7/1815 Primary

  with cooling or heating systems (cooling arrangements for laser mirrors H01S3/0401) · CPC title

• B23K26/0624

  using ultrashort pulses, i.e. pulses of 1 ns or less · CPC title

• B23K26/55

  for creating voids inside the workpiece, e.g. for forming flow passages or flow patterns · CPC title

• C03C14/004

  the non-glass component being in the form of particles or flakes · CPC title

• G02B5/085

  at least one of the reflecting layers comprising metal · CPC title