Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features

Patent metadata

Field	Value
Publication number	US-11798789-B2
Application number	US-201816960818-A
Country	US
Kind code	B2
Filing date	Sep 10, 2018
Priority date	Aug 13, 2018
Publication date	Oct 24, 2023
Grant date	Oct 24, 2023

Abstract

A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.

First claim

What is claimed is:

1. A first edge ring for a substrate support, the first edge ring comprising:
an annular-shaped body sized and shaped to surround an upper portion of the substrate support, wherein the annular-shaped body defines
an upper surface,
a lower surface,
a radially inner surface, and
a radially outer surface; and

one or more lift pin receiving elements disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three lift pins,
wherein
the one or more lift pin receiving elements comprises only three lift pin receiving elements and contacts a respective one of the three lift pins at only two points at a time, and
each of the three lift pin receiving elements comprises a respective ‘V’-shaped groove extending radially relative to a center of the annular-shaped body, the three lift pin receiving elements contact the three lift pins at only six points at a time to provide the kinematic coupling.

2. The first edge ring of claim 1 , wherein the three lift pin receiving elements are disposed along the lower surface of the annular-shaped body.

3. The first edge ring of claim 1 , wherein:
the annular-shaped body comprises an inner diameter; and
the inner diameter is greater than an outer diameter of a top portion of the substrate support.

4. The first edge ring of claim 1 , wherein the annular-shaped body is formed at least partially of a non-volatile material.

5. The first edge ring of claim 1 , wherein at least one of the one or more lift pin receiving elements comprises walls at 60-120° relative to each other.

6. The first edge ring of claim 1 , wherein at least one of the one or more lift pin receiving elements comprises walls at 45° relative to each other.

7. The first edge ring of claim 1 , wherein:
the one or more lift pin receiving elements comprise at least one groove with a rounded vertex portion; and
the rounded vertex portion has a radius between 0.018″ and 0.035″.

8. The first edge ring of claim 1 , wherein the one or more lift pin receiving elements include at least one of a rounded groove, a groove with half conically shaped ends, or a groove with quarter hemi-spherically shaped ends.

9. The first edge ring of claim 1 , wherein the one or more lift pin receiving elements include chamfered side walls.

10. The first edge ring of claim 1 , wherein at least one of the one or more lift pin receiving elements includes a beveled portion to guide one of the three lift pins into the at least one of the one or more lift pin receiving elements.

11. The first edge ring of claim 1 , wherein the one or more lift pin receiving elements include at least one groove with parallel side walls and a flat or rounded top wall.

12. The first edge ring of claim 1 , wherein the one or more lift pin receiving elements include at least one notch disposed at a bottom periphery of the annular-shaped body.

13. The first edge ring of claim 12 , wherein the at least one notch includes:
a ‘V’-shaped groove and a half conically shaped end; or
a quarter hemi-spherically shaped end.

14. The first edge ring of claim 1 , wherein the one or more lift pin receiving elements are spaced 120° apart relative to a center of the annular-shaped body.

15. The first edge ring of claim 1 , wherein each of the ‘V’-shaped grooves is shaped such that the corresponding one of the three lift pins does not contact an uppermost portion or a vertex portion of the ‘V’-shaped groove.

16. A system comprising:
the first edge ring of claim 1 ; and
the three lift pins.

17. The system of claim 16 , wherein a ratio of a depth of each ‘V’-shaped groove and a diameter of a corresponding one of the three lift pins is 1:1.

18. The system of claim 16 , wherein a ratio between a depth of each ‘V’-shaped groove and a diameter of a corresponding one of the three lift pins is between 10:1 and 1:8.

19. The system of claim 16 , wherein:
one of the ‘V’-shaped grooves includes side walls; and
a ratio between a width of the one of the ‘V’-shaped grooves and a diameter of a corresponding one of the three lift pins is between 20:1 and 1:4.

20. The system of claim 16 , wherein a ratio between a depth that one of the three lift pins is disposed into one of the ‘V’-shaped grooves and a depth of the one of the ‘V’-shaped grooves is between 10:1 and 1:8.

21. The system of claim 16 wherein each of the three lift pins is shaped to contact two points on surfaces of a corresponding one of the one or more lift pin receiving elements at a time and not contact a top surface or vertex portion of the corresponding one of the one or more lift pin receiving elements.

22. The system of claim 16 , wherein the three lift pins are formed at least partially of a volatile material.

23. The system of claim 16 , further comprising:
at least one actuator for moving the three lift pins; and
a controller configured to control operation of the at least one actuator.

24. The system of claim 16 , further comprising:
a second edge ring; and
at least one stabilizing element disposed in at least one pocket of the annular-shaped body and applying pressure on the second edge ring.

25. The system of claim 16 , further comprising:
a second edge ring; and
a third edge ring,
wherein the first edge ring, the second edge ring and the third edge ring are arranged in a stack.

26. The system of claim 25 , wherein the second edge ring and the third edge ring are each formed at least partially of a volatile material.

27. The system of claim 16 , further comprising a second edge ring comprising a first top surface and a second top surface, wherein:
the first top surface is disposed adjacent a top surface of the substrate support and below a periphery of a substrate, wherein the first top surface is disposed (i) at a level higher than a level of a bottom surface of the first edge ring, and (ii) radially inside the first edge ring;
the second top surface is disposed below a portion of the first edge ring, the second top surface is disposed at a level lower than the level of the bottom surface of the first edge ring; and
an instep from the first top surface to the second top surface.

28. The system of claim 27 , wherein the second edge ring is formed at least partially of a volatile material.

29. The first edge ring of claim 1 , wherein each of the ‘V’-shaped grooves extend in a linear radial direction.

30. The system of claim 1 , wherein inner wall surfaces of each of the ‘V’-shaped grooves are flat and arranged such that each of the inner wall surfaces contacts only one point at a time of a corresponding one of the three lift pins.

31. The first edge ring of claim 1 , wherein the annular-shaped body is sized and shaped to move independently from the substrate support.

32. The first edge ring of claim 1 , wherein the annular-shaped body is sized and shaped to be isolated from substrate support plate of the substrate support.

33. The first edge ring of claim 1 , wherein the radially inner surface is sized and shaped to surround an outer peripheral edge of a substrate support plate of the substrate support.

34. A system comprising:
the first edge ring of claim 1 ; and
the substrate support comprising a s

Assignees

• Lam Res Corp

Inventors

• Sanchez Alejandro
• Ford Grayson
• Ehrlich Darrell
• Alwan Aravind
• Leung Kevin
• Contreras Anthony
• Han Zhumin
• Casaes Raphael
• Wu Joanna

Classifications

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/7611 Primary

  characterised by edge profile or support profile · CPC title

• H10P72/0421

  for drying etching · CPC title

• H01J2237/20

  Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated · CPC title

• H01J2237/20235

  Z movement or adjustment · CPC title