Edge rings with insteps and oversized holes for preventing lift pin contact therewith in substrate processing systems
US-2026088263-A1 · Mar 26, 2026 · US
This page is not indexed by search engines while we improve data quality.
Casaes Raphael patents
Casaes Raphael is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Casaes Raphael |
| Total patents | 13 |
| First publication | May 12, 2015 |
| Latest publication | Mar 26, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Edge rings providing kinematic coupling and corresponding substrate processing systems
US-12500068-B2 · Dec 16, 2025 · US
Edge ring arrangement with moveable edge rings
US-2024355667-A1 · Oct 24, 2024 · US
Ion beam etch system and method
US-2024355597-A1 · Oct 24, 2024 · US
Edge ring arrangement with moveable edge rings
US-12027410-B2 · Jul 2, 2024 · US
Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features
US-2024038504-A1 · Feb 1, 2024 · US
Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features
US-11798789-B2 · Oct 24, 2023 · US
Edge ring arrangement with moveable edge rings
US-2021183687-A1 · Jun 17, 2021 · US
Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features
US-2020395195-A1 · Dec 17, 2020 · US
Moveable edge coupling ring for edge process control during semiconductor wafer processing
US-10658222-B2 · May 19, 2020 · US
Recent patents
Latest publications not already listed above.
Moveable edge ring design
US-2019013232-A1 · Jan 10, 2019 · US
Moveable edge coupling ring for edge process control during semiconductor wafer processing
US-2016211166-A1 · Jul 21, 2016 · US
Controlling temperature of a faraday shield
US-9029267-B2 · May 12, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 13 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7612 | 11 |
| H10P72/7611 | 11 |
| H10P72/0421 | 11 |
| H01J37/32642 | 11 |
| H01J37/32715 | 11 |