Edge rings with insteps and oversized holes for preventing lift pin contact therewith in substrate processing systems
US-2026088263-A1 · Mar 26, 2026 · US
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Ford Grayson patents
Ford Grayson is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ford Grayson |
| Total patents | 6 |
| First publication | Dec 17, 2020 |
| Latest publication | Mar 26, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Edge rings providing kinematic coupling and corresponding substrate processing systems
US-12500068-B2 · Dec 16, 2025 · US
Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features
US-2024038504-A1 · Feb 1, 2024 · US
Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features
US-11798789-B2 · Oct 24, 2023 · US
Plasma processing chamber
US-2022002863-A1 · Jan 6, 2022 · US
Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features
US-2020395195-A1 · Dec 17, 2020 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 6 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32642 | 6 |
| H10P72/7612 | 5 |
| H10P72/7611 | 5 |
| H10P72/0421 | 5 |
| H01J2237/20 | 5 |