Multi-step pre-clean for selective metal gap fill

Patent metadata

Field	Value
Publication number	US-11776806-B2
Application number	US-202217742712-A
Country	US
Kind code	B2
Filing date	May 12, 2022
Priority date	May 5, 2020
Publication date	Oct 3, 2023
Grant date	Oct 3, 2023

Abstract

Methods for pre-cleaning substrates having metal and dielectric surfaces are described. The substrate is exposed to a strong reductant to remove contaminants from the metal surface and damage the dielectric surface. The substrate is then exposed to an oxidation process to repair the damage to the dielectric surface and oxidize the metal surface. The substrate is then exposed to a weak reductant to reduce the metal oxide to a pure metal surface without substantially affecting the dielectric surface. Processing tools and computer readable media for practicing the method are also described.

First claim

What is claimed is:

1. A processing tool comprising:
a central transfer station including a robot configured to move a substrate between process chambers;
a first process chamber connected to the central transfer station and configured to perform a strong reduction process to remove surface contaminants from a metal surface and create defects in a dielectric sidewall;
a second process chamber connected to the central transfer station and configured to perform an oxidation process to repair defects in the dielectric sidewall and oxidize the metal surface to form a metal oxide;
a third process chamber connected to the central transfer station and configured to perform a weak reduction process to reduce the metal oxide to pure metal without substantially damaging the dielectric sidewall; and
at least one controller connected to the central transfer station, the first process chamber, the second process chamber and the third process chamber, the at least one controller having: a configuration to move a substrate between and among the central transfer station, the first process chamber, the second process chamber and the third process chamber; a configuration to perform the strong reduction process in the first process chamber; a configuration to perform the oxidation process in the second process chamber; and a configuration to perform the weak reduction process in the third process chamber.

2. The processing tool of claim 1 , wherein the configuration to perform the strong reduction process comprises controlling a flow of a reductant comprising a hydrogen plasma.

3. The processing tool of claim 2 , wherein the configuration to perform the strong reduction process comprises controlling an inductively coupled plasma.

4. The processing tool of claim 2 , wherein the hydrogen plasma is a high density, high energy plasma.

5. The processing tool of claim 2 , wherein the hydrogen plasma has a pressure in a range of 5 mTorr to 10 mTorr.

6. The processing tool of claim 2 , wherein the substrate is maintained at a temperature in a range of 200° C. to 500° C. during the hydrogen plasma.

7. The processing tool of claim 2 , wherein a bias in a range of 30 W to 300 W is applied to the substrate during the hydrogen plasma.

8. The processing tool of claim 1 , wherein the configuration to perform the oxidation process comprises controlling a flow of an oxidizer comprising an oxygen plasma.

9. The processing tool of claim 8 , wherein the substrate is maintained at a temperature in a range of −15° C. to 180° C. during exposure to the oxygen plasma.

10. The processing tool of claim 8 , wherein the oxygen plasma is a conductively coupled plasma (CCP) or an inductively coupled plasma (ICP).

11. The processing tool of claim 10 , wherein the oxygen plasma is a high density, low energy plasma.

12. The processing tool of claim 10 , wherein the oxygen plasma has a pressure in a range of 5 mTorr to 50 mTorr.

13. The processing tool of claim 1 , wherein the configuration to perform the weak reduction process comprises controlling a flow of a hydrogen plasma.

14. The processing tool of claim 13 , wherein the hydrogen plasma comprises a conductively coupled plasma (CCP).

15. The processing tool of claim 14 , wherein the plasma is at a pressure in a range of 5 Torr to 30 Torr.

16. The processing tool of claim 14 , wherein the plasma is a low density, low energy plasma.

17. The processing tool of claim 14 , wherein the substrate is maintained at a temperature in a range of 400° C. to 450° C. during weak reduction process.

Assignees

• Applied Materials Inc

Inventors

• Cen Xi
• Yao Yakuan
• Lai Yiming
• Wu Kai
• Gelatos Avgerinos V
• Or David T
• Kashefi Kevin
• Lei Yu
• Dong Lin
• Ren He
• Xu Yi
• Naik Mehul
• Chen Hao
• Ling Mang-Mang

Classifications

• H10P72/0468

  comprising a chamber adapted to a particular process · CPC title

• H10P72/0454

  surrounding a central transfer chamber · CPC title

• H10P14/6532

  by exposure to a plasma · CPC title

• H10P14/6528

  In-situ cleaning after layer formation, e.g. removing process residues · CPC title

• H10P14/6314

  of a metallic layer · CPC title