Tungsten wordline fill in high aspect ratio 3d nand architecture
US-2026026324-A1 · Jan 22, 2026 · US
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Yao Yakuan patents
Yao Yakuan is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Yao Yakuan |
| Total patents | 7 |
| First publication | Sep 24, 2020 |
| Latest publication | Jan 22, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Multi-step pre-clean for selective metal gap fill
US-11776806-B2 · Oct 3, 2023 · US
Multi-step pre-clean for selective metal gap fill
US-2022270871-A1 · Aug 25, 2022 · US
Multi-step pre-clean for selective metal gap fill
US-11380536-B2 · Jul 5, 2022 · US
Method for forming a metal gapfill
US-11355391-B2 · Jun 7, 2022 · US
Multi-Step Pre-Clean for Selective Metal Gap Fill
US-2021351032-A1 · Nov 11, 2021 · US
Method for forming a metal gapfill
US-2020303250-A1 · Sep 24, 2020 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 6 |
| Lam Res Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10W20/057 | 7 |
| H10W20/081 | 6 |
| H10P72/0468 | 6 |
| H01L21/76879 | 5 |
| H10P72/0454 | 4 |