Chemical liquid, chemical liquid storage body, chemical liquid filling method, and chemical liquid storage method

Patent metadata

Field	Value
Publication number	US-11740557-B2
Application number	US-202217740438-A
Country	US
Kind code	B2
Filing date	May 10, 2022
Priority date	Sep 27, 2016
Publication date	Aug 29, 2023
Grant date	Aug 29, 2023

Abstract

An object of the present invention is to provide a chemical liquid having excellent developability and excellent defect inhibition performance. Another object of the present invention is to provide a chemical liquid storage body, a chemical liquid filling method, and a chemical liquid storage method. The chemical liquid according to an embodiment of the present invention is a chemical liquid containing an organic solvent, a metal impurity, and an organic impurity, in which the metal impurity contains metal atoms, a total content of the metal atoms in the chemical liquid with respect to a total mass of the chemical liquid is equal to or smaller than 50 mass ppt, a total content of the organic impurity in the chemical liquid with respect to the total mass of the chemical liquid is 0.1 to 10,000 mass ppm, the organic impurity contains an alcohol impurity, and a mass ratio of a content of the alcohol impurity to the total content of the organic impurity is 0.0001 to 0.5.

First claim

What is claimed is:

1. A chemical liquid storage body comprising:
a storage tank; and
a chemical liquid that is stored in the storage tank,
wherein a liquid contact portion contacting the chemical liquid in the storage tank is formed of a nonmetallic material or electropolished stainless steel, and
wherein the chemical liquid comprises:
an organic solvent;
a metal impurity; and
an organic impurity,
the metal impurity contains metal atoms,
the total content of the metal atoms in the chemical liquid with respect to the total mass of the chemical liquid is equal to or smaller than 50 mass ppt,
the total content of the organic impurity in the chemical liquid with respect to the total mass of the chemical liquid is 0.1 to 1500 mass ppm,
the organic impurity contains an alcohol impurity,
the mass ratio of the content of the alcohol impurity to the total content of the organic impurity is 0.0001 to 0.5, and

the organic solvent contains at least one compound selected from the group consisting of diethyl ether, dipropyl ether, diisopropyl ether, butyl methyl ether, butyl ethyl ether, butyl propyl ether, dibutyl ether, diisobutyl ether, tert-butyl methyl ether, tert-butyl ethyl ether, tert-butyl propyl ether, di-tert-butyl ether, dipentyl ether, diisoamyl ether, cyclopentyl methyl ether, cyclohexyl methyl ether, bromomethyl methyl ether, α,α-dichloromethyl methyl ether, chloromethyl ethyl ether, 2-chloroethyl methyl ether, 2-bromoethyl methyl ether, 2,2-dichloroethyl methyl ether, 2-chloroethyl ethyl ether, 2-bromoethyl ethyl ether, (±)-1,2-dichloroethyl ethyl ether, 2,2,2-trifluoroethyl ether, ethyl vinyl ether, butyl vinyl ether, allyl ethyl ether, allyl propyl ether, allyl butyl ether, diallyl ether, 2-methoxypropene, ethyl-1-propenylether, cis-1-bromo-2-ethoxyethylene, 2-chloroethyl vinyl ether, allyl-1,1,2,2-tetrafluoroethyl ether, octane, isooctane, nonane, decane, methyl cyclohexane, decalin, xylene, ethyl benzene, diethyl benzene, cumene, sec-butyl benzene, cymene, dipentene, methyl pyruvate, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate, methyl methoxypropionate, cyclohexanone, isoamyl acetate, amyl aceate, n-amyl acetate, chloroform, dichloromethane, 1,4-dioxane, hexyl alcohol, γ-butyrolactone, 2-heptanone, 2-hydroxymethyl butyrate, cyclohexanone dimethyl acetal, 4-methyl-2-pentanol, and tetrahydrofuran.

2. The chemical liquid storage body according to claim 1 ,
wherein the nonmetallic material is at least one material selected from the group consisting of a polyethylene resin, a polypropylene resin, a polyethylene-polypropylene resin, polytetrafluoroethylene, a tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, a tetrafluoroethylene-hexafluoropropylene copolymer resin, a tetrafluoroethylene-ethylene copolymer resin, a chlorotrifluoro ethylene-ethylene copolymer resin, a vinylidene fluoride resin, a chlorotrifluoroethylene copolymer resin, and a vinyl fluoride resin.

3. The chemical liquid storage body according to claim 1 ,
wherein the metal impurity contains a Fe atom, a Ni atom, a Cr atom, and a Pb atom,
a mass ratio of a content of the Fe atom to the total content of the metal atoms is 0.01 to 0.5,
a mass ratio of a content of the Cr atom to the total content of the metal atoms is 0.01 to 0.5,
a mass ratio of a content of the Ni atom to the total content of the metal atoms is 0.01 to 0.5, and
a mass ratio of a content of the Pb atom to the total content of the metal atoms is 0.005 to 0.3.

4. The chemical liquid storage body according to claim 1 ,
wherein a mass ratio of a total content of a component having a boiling point equal to or higher than 250° C. to a total content of a component having a boiling point lower than 250° C. in the chemical liquid is 0.00001 to 0.001.

5. The chemical liquid storage body according to claim 1 ,
wherein a content of water in the chemical liquid with respect to the total mass of the chemical liquid is 0.1% to 1.5% by mass.

6. The chemical liquid storage body according to claim 1 ,
wherein the number of objects to be counted having a size equal to or greater than 0.1 μm that are counted by a light scattering liquid-borne particle counter is equal to or smaller than 100/mL.

7. The chemical liquid storage body according to claim 1 ,
wherein the organic solvent has a boiling point lower than 200° C.

8. The chemical liquid storage body according to claim 1 ,
wherein the organic solvent contains at least one kind of compound selected from the group consisting of propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate, methyl methoxypropionate, hexyl alcohol, 2-heptanone, isoamyl acetate, cyclohexanone, y-butyrolactone, diisoamyl ether, 2-hydroxymethyl butyrate, cyclohexanone dimethyl acetal, and 4-methyl-2-pentanol.

Assignees

• Fujifilm Corp

Inventors

• Kamimura Tetsuya
• Takahashi Satomi

Classifications

• H10P76/2041

  Photolithographic processes · CPC title

• G03F7/325 Primary

  Non-aqueous compositions · CPC title

• B65D88/06

  cylindrical (B65D88/12 takes precedence) · CPC title

• B65D88/08

  with a vertical axis · CPC title

• C08F10/06

  Propene · CPC title