Chemical liquid, chemical liquid storage body, chemical liquid filling method, and chemical liquid storage method

Patent metadata

Field	Value
Publication number	US-11360389-B2
Application number	US-201916365016-A
Country	US
Kind code	B2
Filing date	Mar 26, 2019
Priority date	Sep 27, 2016
Publication date	Jun 14, 2022
Grant date	Jun 14, 2022

Abstract

An object of the present invention is to provide a chemical liquid having excellent developability and excellent defect inhibition performance. Another object of the present invention is to provide a chemical liquid storage body, a chemical liquid filling method, and a chemical liquid storage method. The chemical liquid according to an embodiment of the present invention is a chemical liquid containing an organic solvent, a metal impurity, and an organic impurity, in which the metal impurity contains metal atoms, a total content of the metal atoms in the chemical liquid with respect to a total mass of the chemical liquid is equal to or smaller than 50 mass ppt, a total content of the organic impurity in the chemical liquid with respect to the total mass of the chemical liquid is 0.1 to 10,000 mass ppm, the organic impurity contains an alcohol impurity, and a mass ratio of a content of the alcohol impurity to the total content of the organic impurity is 0.0001 to 0.5.

First claim

What is claimed is:

1. A chemical liquid comprising:
an organic solvent;
a metal impurity; and
an organic impurity,
wherein the metal impurity contains metal atoms,
the total content of the metal atoms in the chemical liquid with respect to the total mass of the chemical liquid is equal to or smaller than 50 mass ppt,
the total content of the organic impurity in the chemical liquid with respect to the total mass of the chemical liquid is 0.1 to 1500 mass ppm,
the organic impurity contains an alcohol impurity,
the mass ratio of the content of the alcohol impurity to the total content of the organic impurity is 0.0001 to 0.5, and
the organic solvent contains at least one compound selected from the group consisting of propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate, hexyl alcohol, 2-heptanone, isoamyl acetate, cyclohexanone, γ-butyrolactone, 2-hydroxymethyl butyrate, and cyclohexanone dimethyl acetal.

2. The chemical liquid according to claim 1 ,
wherein the metal impurity contains a Fe atom, a Ni atom, a Cr atom, and a Pb atom,
the mass ratio of the content of the Fe atom to the total content of the metal atoms is 0.01 to 0.5,
the mass ratio of the content of the Cr atom to the total content of the metal atoms is 0.01 to 0.5,
the mass ratio of the content of the Ni atom to the total content of the metal atoms is 0.01 to 0.5, and
the mass ratio of the content of the Pb atom to the total content of the metal atoms is 0.005 to 0.3.

3. The chemical liquid according to claim 1 ,
wherein the content of water in the chemical liquid with respect to the total mass of the chemical liquid is 0.1% to 1.5% by mass.

4. The chemical liquid according to claim 1 ,
wherein the number of objects to be counted having a size equal to or greater than 0.1 μm that are counted by a light scattering liquid-borne particle counter is equal to or smaller than 100/mL.

5. The chemical liquid according to claim 1 ,
wherein the organic solvent has a boiling point lower than 200° C.

6. A chemical liquid storage body comprising:
a storage tank; and
the chemical liquid according to claim 1 that is stored in the storage tank,
wherein a liquid contact portion contacting the chemical liquid in the storage tank is formed of a nonmetallic material or electropolished stainless steel.

7. The chemical liquid storage body according to claim 6 ,
wherein the nonmetallic material is at least one kind of material selected from the group consisting of a polyethylene resin, a polypropylene resin, a polyethylene-polypropylene resin, polytetrafluoroethylene, a tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, a tetrafluoroethylene-hexafluoropropylene copolymer resin, a tetrafluoroethylene-ethylene copolymer resin, a chlorotrifluoro ethylene-ethylene copolymer resin, a vinylidene fluoride resin, a chlorotrifluoroethylene copolymer resin, and a vinyl fluoride resin.

8. A chemical liquid filling method for filling a storage tank with the chemical liquid according to claim 1 by transferring the chemical liquid to the storage tank from a tank lorry including a tank storing the chemical liquid, comprising:
a step of connecting the tank and the storage tank to each other through a first connection member; and
a step of filling the storage tank with the chemical liquid in the tank by transferring the chemical liquid to the storage tank through the first connection member.

9. The chemical liquid filling method according to claim 8 ,
wherein the first connection member is a member satisfying a condition 1 or a condition 2 described below,
condition 1: under a condition in which a ratio of a mass of the first connection member to a volume of the chemical liquid transferred to and filled into the storage tank becomes 10% provided that a liquid temperature of the chemical liquid is 25° C., in a case where the first connection member is immersed for 1 week in the chemical liquid having a liquid temperature of 25° C., the total content of the metal atoms contained in the metal impurity eluted into the chemical liquid is equal to or smaller than 1.0 mass ppt,
condition 2: under a condition in which a ratio of a mass of the first connection member to a volume of the chemical liquid transferred to and filled into the storage tank becomes 10% provided that a liquid temperature of the chemical liquid is 25° C., in a case where the first connection member is immersed for 1 week in the chemical liquid having a liquid temperature of 25° C., the total content of the organic impurity eluted into the chemical liquid is equal to or smaller than 1.0 mass ppt.

10. The chemical liquid filling method according to claim 8 ,
wherein a liquid contact portion, which contacts the chemical liquid, of at least one kind of constituent selected from the group consisting of the tank, the storage tank, and the first connection member is formed of a nonmetallic material or electropolished stainless steel.

11. The chemical liquid filling method according to claim 10 ,
wherein the nonmetallic material is at least one kind of material selected from the group consisting of a polyethylene resin, a polypropylene resin, a polyethylene-polypropylene resin, polytetrafluoroethylene, a tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, a tetrafluoroethylene-hexafluoropropylene copolymer resin, a tetrafluoroethylene-ethylene copolymer resin, a chlorotrifluoro ethylene-ethylene copolymer resin, a vinylidene fluoride resin, a chlorotrifluoroethylene copolymer resin, and a vinyl fluoride resin.

12. The chemical liquid filling method according to claim 8 , further comprising:
a step of transferring the chemical liquid, which has been transferred to and filled into the storage tank, to a supply tank, which is connected to the storage tank through a second connection member, through the second connection member such that the supply tank is filled with the chemical liquid.

13. The chemical liquid filling method according to claim 12 ,
wherein a liquid contact portion, which contacts the chemical liquid, of at least one kind of constituent selected from the group consisting of the supply tank and the second connection member is formed of a nonmetallic material or electropolished stainless steel.

14. The chemical liquid filling method according to claim 13 ,
wherein the nonmetallic material is at least one kind of material selected from the group consisting of a polyethylene resin, a polypropylene resin, a polyethylene-polypropylene resin, polytetrafluoroethylene, a tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, a tetrafluoroethylene-hexafluoropropylene copolymer resin, a tetrafluoroethylene-ethylene copolymer resin, a chlorotrifluoro ethylene-ethylene copolymer resin, a vinylidene fluoride resin, a chlorotrifluoroethylene copolymer resin, and a vinyl fluoride resin.

15. The chemical liquid filling method according to claim 12 , further comprising:
a step of transferring the chemical liquid, which has been transferred to and filled into the supply tank, to a device, which is connected to the supply tank through a third connection member, through the third connection member such that the device is filled with the chemical liquid.

16. The chemical liquid filling method according to claim 15 ,
wherein a liquid contact portion, which contacts the chemical liquid, of at least one kind of constituent selected from the group consisting of the device and the third connection member is formed of a nonmetallic material or electropolished stainles

Assignees

• Fujifilm Corp

Inventors

• Kamimura Tetsuya
• Takahashi Satomi

Classifications

• H10P76/2041

  Photolithographic processes · CPC title

• G03F7/16 Primary

  Coating processes; Apparatus therefor (applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74) · CPC title

• C08F10/06

  Propene · CPC title

• C08F14/26

  Tetrafluoroethene · CPC title

• B65D88/06

  cylindrical (B65D88/12 takes precedence) · CPC title