Chemical liquid, chemical liquid storage body, manufacturing method of chemical liquid, and manufacturing method of chemical liquid storage body

Patent metadata

Field	Value
Publication number	US-10884338-B2
Application number	US-201916366621-A
Country	US
Kind code	B2
Filing date	Mar 27, 2019
Priority date	Sep 28, 2016
Publication date	Jan 5, 2021
Grant date	Jan 5, 2021

Abstract

An object of the present invention is to provide a chemical liquid which has excellent defect inhibition performance and hardly breaks a transfer pipe line that a device for manufacturing the chemical liquid includes at the time of manufacturing the chemical liquid. Another object of the present invention is to provide a chemical liquid storage body, a manufacturing method of a chemical liquid, and a manufacturing method of a chemical liquid storage body. The chemical liquid according to an embodiment of the present invention is a chemical liquid containing an organic solvent and an ion of at least one kind of atom selected from the group consisting of an Fe atom, a Cr atom, a Ni atom, and a Pb atom, in which in a case where the chemical liquid contains one kind of the ion, a content of the metal ion is 0.1 to 100 mass ppt, in a case where the chemical liquid contains two or more kinds of the ions, a content of each of the metal ions is 0.1 to 100 mass ppt, and a charge potential is equal to or lower than 100 mV.

First claim

What is claimed is:

1. A chemical liquid comprising;
an organic solvent;
an ion of at least one kind of atom selected from the group consisting of an Fe atom, a Cr atom, a Ni atom, and a Pb atom, and
an organic impurity,
wherein in a case where the chemical liquid contains one kind of the ion, a content of the ion is 0.1 to 100 mass ppt,
in a case where the chemical liquid contains two or more kinds of the ions, a content of each of the ions is 0.1 to 100 mass ppt,
a charge potential of the chemical liquid is equal to or lower than 100 mV, and
a total content of the organic impurity in the chemical liquid is 1 to 3,000 mass ppm.

2. The chemical liquid according to claim 1 , further comprising:
particles containing at least one kind of atom selected from the group consisting of a Cr atom, a Zn atom, an Al atom, and a Pb atom,
wherein a content of the particles in the chemical liquid with respect to the total mass of the chemical liquid is 0.1 to 100 mass ppt.

3. The chemical liquid according to claim 1 ,
wherein a number of objects to be counted having a size equal to or greater than 0.1 μm that are counted by a light scattering-type liquid-borne particle counter is 1 to 100/mL.

4. The chemical liquid according to claim 1 , further comprising:
water,
wherein a content of the water in the chemical liquid is 0.01% to 1% by mass.

5. The chemical liquid according to claim 1 ,
wherein the organic solvent contains at least one kind of compound selected from the group consisting of propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate, ethyl lactate, methyl methoxypropionate, cyclopentanone, cyclohexanone, y-butyrolactone, diisoamyl ether, butyl acetate, and 4-methyl-2-pentanol.

6. A chemical liquid storage body comprising;
a container; and
the chemical liquid according to claim 1 that is stored in the container,
wherein a liquid contact portion, which contacts the chemical liquid, in the container is formed of a metallic material containing a Cr atom and an Fe atom, and
the metallic material is at least one kind of material selected from the group consisting of stainless steel and electropolished stainless steel.

7. The chemical liquid storage body according to claim 6 ,
wherein a mass ratio of a content of the Cr atom to a content of the Fe atom in the metallic material is higher than 0.5 and less than 3.5.

8. A manufacturing method of a chemical liquid that is for manufacturing the chemical liquid according to claim 1 , comprising:
an organic solvent preparation step of preparing an organic solvent; and
a filtering step of passing a substance to be purified containing the organic solvent through a filter so as to obtain a chemical liquid,
wherein the filtering step satisfies a condition 1 and a condition 2 described below,
condition 1: at the time when the substance to be purified passes through the filter, a temperature of the substance to be purified is lower than 23° C.,
condition 2: at the time when the substance to be purified passes through the filter, a temperature of the substance to be purified satisfies Expression 1,
(Expression 1) a temperature of the substance to be purified<a flashing point of the organic solvent−5
in Expression 1, the unit of each of the temperature of the substance to be purified and the flashing point of the organic solvent is ° C.

9. A manufacturing method of a chemical liquid storage body that is for manufacturing the chemical liquid storage body according to claim 6 , comprising:
an organic solvent preparation step of preparing an organic solvent;
a filtering step of passing a substance to be purified containing the organic solvent through a filter so as to obtain a chemical liquid; and
a storing step of storing the chemical liquid in a container so as to obtain a chemical liquid storage body,
wherein the filtering step and the storing step satisfy a condition 3 and a condition 4 described below,
condition 3: at the time when the substance to be purified passes through the filter, a temperature of the substance to be purified is lower than 23° C., and at the time when the chemical liquid is stored in the container, a temperature of the chemical liquid is lower than 23° C.,
condition 4: at the time when the substance to be purified passes through the filter, a temperature of the substance to be purified satisfies Expression 1, and at the time when the chemical liquid is stored in the container, a temperature of the chemical liquid satisfies Expression 2,
(Expression 1) a temperature of the substance to be purified<a flashing point of the organic solvent−5,
(Expression 2) a temperature of the chemical liquid<a flashing point of the organic solvent−5,
in Expression 1 and Expression 2, the unit of each of the temperature of the substance to be purified, the temperature of the chemical liquid, and the flashing point of the organic solvent is ° C.

10. A manufacturing method of a chemical liquid storage body that is for manufacturing the chemical liquid storage body according to claim 7 , comprising:
an organic solvent preparation step of preparing an organic solvent;
a filtering step of passing a substance to be purified containing the organic solvent through a filter so as to obtain a chemical liquid; and
a storing step of storing the chemical liquid in a container so as to obtain a chemical liquid storage body,
wherein the filtering step and the storing step satisfy a condition 3 and a condition 4 described below,
condition 3: at the time when the substance to be purified passes through the filter, a temperature of the substance to be purified is lower than 23° C., and at the time when the chemical liquid is stored in the container, a temperature of the chemical liquid is lower than 23° C.,
condition 4: at the time when the substance to be purified passes through the filter, a temperature of the substance to be purified satisfies Expression 1, and at the time when the chemical liquid is stored in the container, a temperature of the chemical liquid satisfies Expression 2,
(Expression 1) a temperature of the substance to be purified<a flashing point of the organic solvent−5,
(Expression 2) a temperature of the chemical liquid<a flashing point of the organic solvent−5,
in Expression 1 and Expression 2, the unit of each of the temperature of the substance to be purified, the temperature of the chemical liquid, and the flashing point of the organic solvent is ° C.

11. The chemical liquid according to claim 1 ,
wherein the chemical liquid contains an Fe ion, a Cr ion, a Ni ion, and a Pb ion,
a content of the Fe ion with respect to the total mass of the chemical liquid is 0.1 to 10 mass ppt,
a content of the Cr ion with respect to the total mass of the chemical liquid is 0.1 to 10 mass ppt,
a content of the Ni ion with respect to the total mass of the chemical liquid is 0.1 to 10 mass ppt, and
a content of the Pb ion with respect to the total mass of the chemical liquid is 0.1 to 10 mass ppt.

12. The chemical liquid according to claim 1 ,
wherein the chemical liquid contains particles containing Fe atoms, particles containing Zn atoms, particles containing Al atoms, and particles containing Pb atoms,
a content of the particles containing Fe atoms with respect to the total mass of the chemical liquid is 0.1 to 30 mass ppt,
a content of the particles containing Zn atoms with respect to the total mass of the chemical liquid is 0.1 to 20 mass ppt,
a content of the particles containing Al atoms with respect to the total mass of the chemical liquid is 0.1 to 20 mass ppt, and
a content of t

Assignees

• Fujifilm Corp

Inventors

• Kamimura Tetsuya

Classifications

• G03F7/16 Primary

  Coating processes; Apparatus therefor (applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74) · CPC title

• B01D71/641

  Polyamide-imides · CPC title

• B01D2313/502

  Concentrate storage tanks · CPC title

• B01D61/362

  Pervaporation · CPC title

• G03F7/3057

  characterised by the processing units other than the developing unit, e.g. washing units · CPC title