Chemical liquid, chemical liquid storage body, and pattern forming method

Patent metadata

Field	Value
Publication number	US-11079677-B2
Application number	US-201916519004-A
Country	US
Kind code	B2
Filing date	Jul 23, 2019
Priority date	Feb 20, 2017
Publication date	Aug 3, 2021
Grant date	Aug 3, 2021

Abstract

An object of the present invention is to provide a chemical liquid which makes it difficult for a defect to occur on a substrate after development. Another object of the present invention is to provide a chemical liquid storage body and a pattern forming method.The chemical liquid of the according to an embodiment of the present invention contains a main agent which is formed of one kind of organic solvent or formed of a mixture of two or more kinds of organic solvents, an impurity metal, and a surfactant, in which a vapor pressure of the main agent is 60 to 1,340 Pa at 25° C., the impurity metal contains particles containing one kind of metal selected from the group consisting of Fe, Cr, Ni, and Pb, in a case where the chemical liquid contains one kind of particles, a content of the particles in the chemical liquid is 0.001 to 30 mass ppt with respect to a total mass of the chemical liquid, and in a case where the chemical liquid contains two or more kinds of particles, a content of each kind of the particles in the chemical liquid is 0.001 to 30 mass ppt with respect to the total mass of the chemical liquid.

First claim

What is claimed is:

1. A chemical liquid comprising:
a main agent which is formed of one kind of organic solvent or formed of a mixture of two or more kinds of organic solvents;
an impurity metal; and
a surfactant,
wherein a vapor pressure of the main agent is 60 to 1,340 Pa at 25° C.,
the impurity metal contains particles containing one kind of metal selected from the group consisting of Fe, Cr, Ni, and Pb,
in a case where the chemical liquid contains one kind of particles, a content of the particles in the chemical liquid is 0.001 to 30 mass ppt with respect to a total mass of the chemical liquid, and
in a case where the chemical liquid contains two or more kinds of particles, a content of each kind of the particles in the chemical liquid is 0.001 to 30 mass ppt with respect to the total mass of the chemical liquid.

2. The chemical liquid according to claim 1 ,
wherein the impurity metal contains one kind of metal selected from the group consisting of Fe, Cr, Ni, and Pb,
in a case where the chemical liquid contains one kind of metal, a content of the metal in the chemical liquid is 0.001 to 100 mass ppt with respect to the total mass of the chemical liquid, and
in a case where the chemical liquid contains two or more kinds of the metals, a content of each of the metals in the chemical liquid is 0.001 to 100 mass ppt with respect to the total mass of the chemical liquid.

3. The chemical liquid according to claim 2 ,
wherein a surface tension of the main agent is 25 to 40 mN/m at 25° C.

4. The chemical liquid according to claim 2 ,
wherein the organic solvent in the main agent is in an area surrounded by the following 4 points in a ternary diagram with apexes each showing a contribution rate of a dispersion element in Hansen solubility parameters of organic solvents, a contribution rate of a dipole-dipole force element in Hansen solubility parameters of organic solvents, and a contribution rate of a hydrogen bond element in Hansen solubility parameters of organic solvents,
first point: a contribution rate of a dispersion element=40%, a contribution rate of a dipole-dipole force element=60%, and a contribution rate of a hydrogen bond element=0%,
second point: a contribution rate of a dispersion element=40%, a contribution rate of a dipole-dipole force element=0%, and a contribution rate of a hydrogen bond element=60%,
third point: a contribution rate of a dispersion element=80%, a contribution rate of a dipole-dipole force element=0%, and a contribution rate of a hydrogen bond element=20%,
fourth point: a contribution rate of a dispersion element=80%, a contribution rate of a dipole-dipole force element=20%, and a contribution rate of a hydrogen bond element=0%.

5. The chemical liquid according to claim 1 ,
wherein a surface tension of the main agent is 25 to 40 mN/m at 25° C.

6. The chemical liquid according to claim 1 ,
wherein the organic solvent in the main agent is in an area surrounded by the following 4 points in a ternary diagram with apexes each showing a contribution rate of a dispersion element in Hansen solubility parameters of organic solvents, a contribution rate of a dipole-dipole force element in Hansen solubility parameters of organic solvents, and a contribution rate of a hydrogen bond element in Hansen solubility parameters of organic solvents,
first point: a contribution rate of a dispersion element=40%, a contribution rate of a dipole-dipole force element=60%, and a contribution rate of a hydrogen bond element=0%,
second point: a contribution rate of a dispersion element=40%, a contribution rate of a dipole-dipole force element=0%, and a contribution rate of a hydrogen bond element=60%,
third point: a contribution rate of a dispersion element=80%, a contribution rate of a dipole-dipole force element=0%, and a contribution rate of a hydrogen bond element=20%,
fourth point: a contribution rate of a dispersion element=80%, a contribution rate of a dipole-dipole force element=20%, and a contribution rate of a hydrogen bond element=0%.

7. The chemical liquid according to claim 1 ,
wherein the organic solvent contains at least one kind of compound selected from the group consisting of propylene glycol monomethyl ether, cyclopentanone, butyl acetate, propylene glycol monomethyl ether acetate, cyclohexanone, ethyl lactate, 2-hydroxymethyl isobutyrate, cyclopentanone dimethyl acetal, γ-butyrolactone, dimethyl sulfoxide, ethylene carbonate, propylene carbonate, 1-methyl-2-pyrrolidone, isoamyl acetate, 4-methyl-2-pentanol, diethylene glycol monomethyl ether, dimethyl ether, diethyl ether, diethylene glycol monoisobutyl ether, diglyme, diethylene glycol diethyl ether, triethylene glycol dimethyl ether, tetraethylene glycol dimethyl ether, triethylene glycol butyl methyl ether, diethylene glycol monobutyl ether, anisole, 1,4-dimethoxybenzene, 1,2-dimethoxybenzene, 1,3-dimethoxybenzene, 1,4-diphenoxybenzene, 4-methoxytoluene, phenetole, and 3-methoxymethyl propionate.

8. The chemical liquid according to claim 1 ,
wherein a content mass ratio of a content of the surfactant to a total content of the particles of the impurity metal is 1×10 8 to 1×10 12 .

9. The chemical liquid according to claim 1 ,
wherein the number of objects to be counted having a size equal to or greater than 100 nm that are counted by a light scattering-type liquid-borne particle counter is 1 to 100/mL.

10. The chemical liquid according to claim 1 , further comprising:
water,
wherein a content of the water in the chemical liquid is 0.01% to 1.0% by mass.

11. The chemical liquid according to claim 1 , further comprising:
an organic impurity,
wherein a content of the organic impurity in the chemical liquid is 1 to 10,000 mass ppm.

12. The chemical liquid according to claim 11 ,
wherein the organic impurity contains a high-boiling-point component having a boiling point equal to or higher than 300° C., and
a total content of the high-boiling-point component is 0.1 to 30 mass ppm with respect to the total mass of the chemical liquid.

13. The chemical liquid according to claim 12 ,
wherein a content mass ratio of a content of the surfactant to a content of the high-boiling-point component is 1 to 1×10 4 .

14. The chemical liquid according to claim 1 ,
wherein the surfactant is at least one kind of compound selected from the group consisting of acetylene glycol, polyoxyethylene alkyl ether, polyoxyethylene alkyl amine, a glycerin fatty acid ester, a sorbitan fatty acid ester, alkyl betaine, a quaternary ammonium salt, polyoxyethylene allyl phenyl ether phosphate, and polyoxyethylene allyl phenyl ether sulfate.

15. The chemical liquid according to claim 14 ,
wherein the surfactant is at least one kind of compound selected from the group consisting of acetylene glycol, polyoxyethylene alkyl ether, and polyoxyethylene alkyl amine.

16. The chemical liquid according to claim 1 that is used in at least one kind of chemical agent selected from the group consisting of a prewet solution and a developer.

17. A chemical liquid storage body comprising:
a container; and
the chemical liquid according to claim 1 that is stored in the container,
wherein a liquid contact portion contacting the chemical liquid in the container is formed of a nonmetallic material or stainless steel.

18. The chemical liquid storage body according to claim 17 ,
wherein the nonmetallic material is at least one kind of material selected from the group consisting of a polyethylene resin, a polypropylene resin, a polyethylene-polypropylene resin, polytetrafluoroeth

Assignees

• Fujifilm Corp

Inventors

• Kamimura Tetsuya

Classifications

• H10P76/00

  Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography · CPC title

• G03F7/004 Primary

  Photosensitive materials (G03F7/12, G03F7/14 take precedence) · CPC title

• G03F7/2041

  in the presence of a fluid, e.g. immersion; using fluid cooling means · CPC title

• G03F7/16

  Coating processes; Apparatus therefor (applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74) · CPC title

• G03F7/26

  Processing photosensitive materials; Apparatus therefor (G03F7/12 - G03F7/24 take precedence) · CPC title