Apparatus and method for determining a position of an element on a photolithographic mask

Patent metadata

Field	Value
Publication number	US-11650495-B2
Application number	US-202217847641-A
Country	US
Kind code	B2
Filing date	Jun 23, 2022
Priority date	Jan 21, 2019
Publication date	May 16, 2023
Grant date	May 16, 2023

Abstract

The present application relates to an apparatus for determining a position of at least one element on a photolithographic mask, said apparatus comprising: (a) at least one scanning particle microscope comprising a first reference object, wherein the first reference object is disposed on the scanning particle microscope in such a way that the scanning particle microscope can be used to determine a relative position of the at least one element on the photolithographic mask relative to the first reference object; and (b) at least one distance measuring device, which is embodied to determine a distance between the first reference object and a second reference object, wherein there is a relationship between the second reference object and the photolithographic mask.

First claim

What is claimed is:

1. An apparatus for determining a position of at least one element on a sample, the apparatus comprising:
a. at least one scanning particle microscope comprising a first reference object, wherein the first reference object is disposed on the scanning particle microscope while the scanning particle microscope determines a relative position of the at least one element on the sample relative to the first reference object; and
b. at least one distance measuring device, which is embodied to determine a distance between the first reference object and a second reference object, the second reference object being different from the first reference object wherein there is a relationship between the second reference object and the sample, and wherein the relationship comprises a known distance between the second reference object and the sample.

2. The apparatus of claim 1 , wherein the first reference object is attached to an output of the scanning particle microscope for at least one particle beam and configured to enable the first reference object to be imaged, at least in part, by the at least one particle beam.

3. The apparatus of claim 1 , wherein the first reference object comprises at least three marks which span a coordinate system.

4. The apparatus of claim 3 , wherein the at least three marks have lateral dimensions ranging from 1 nm to 5000 nm and/or wherein the at least three marks have a height ranging from 1 nm to 1000 nm.

5. The apparatus of claim 3 , wherein the at least three marks have a material composition that differs from the material composition of other portions of the first reference object.

6. The apparatus of claim 1 , wherein the first reference object is disposed within a depth of field of at least one particle beam of the scanning particle microscope.

7. The apparatus of claim 1 , wherein the first reference object comprises a first number of unit cells, wherein each unit cell comprises at least three marks, wherein a second number of particle beams pass through the first number of unit cells, wherein the following applies to the second number: 1≤second number≤first number, and wherein the following applies to the first number: first number>10.

8. The apparatus of claim 1 , wherein the first reference object comprises a film, on which at least three marks which span a coordinate system are disposed.

9. The apparatus of claim 1 , wherein the first reference object has at least one aperture configured to enable at least one particle beam to pass and sense the sample.

10. The apparatus of claim 9 , wherein a scanning unit of the scanning particle microscope is embodied to scan the at least one particle beam over at least one part of the first reference object and over the element of the sample in a common scanning process.

11. The apparatus of claim 1 , wherein the first reference object is electrically conductive and configured to enable compensation of surface charges of the sample.

12. The apparatus of claim 1 , wherein the scanning particle microscope comprises an evaluation unit that is embodied to determine, from a change in the first reference object, a distortion of an image recorded by the at least one particle beam of the particle beam microscope and/or wherein the evaluation unit is further embodied to determine, on the basis of a model, an electrostatic charge of the sample from a change in the first reference object.

13. The apparatus of claim 1 , wherein the at least one distance measuring device comprises at least one interferometer.

14. The apparatus of claim 1 , wherein the first reference object is embodied to reflect a light beam of the distance measuring device.

15. The apparatus of claim 1 , wherein the second reference object comprises at least one element from the following group: the sample, a sample holder, a reflection apparatus which is attached to the sample and configured to reflect a light beam of the distance measuring device, and a reflection apparatus which is attached to a sample holder and configured to reflect a light beam of the distance measuring device.

16. The apparatus of claim 3 , wherein the at least three marks have lateral dimensions ranging from 10 nm to 50 nm, and/or wherein the at least three marks have a height ranging from 10 nm to 200 nm.

17. A method for determining a position of at least one element on a sample, the method including the steps of:
a. at least partial scanning of the at least one element on the sample and of a first reference object by at least one particle beam of a scanning particle microscope in a common scanning process in which the first reference object is disposed on the scanning particle microscope;
b. determining a relative position of the at least one element on the sample relative to the first reference object from the scan data; and
c. determining a distance between the first reference object and a second reference object by use of a distance measuring device, the second reference object being different from the first reference object, wherein there is a relationship between the second reference object and the sample, and wherein the relationship comprises a known distance between the second reference object and the sample.

18. The method of claim 17 , further including the step of: determining the position of the at least one element on the sample from the distance between the first and second reference objects and the relative position determined in step b.

19. The method of claim 17 , wherein determining the relative position in step b. comprises: determining a change in position of the at least one particle beam relative to the sample during the at least partial scanning of the at least one element on the sample.

20. A computer program containing instructions which prompt a computer system of an apparatus for determining a position of at least one element on a sample to carry out method steps for determining the position of the at least one element on the sample,
wherein the apparatus comprises:
at least one scanning particle microscope comprising a first reference object, wherein the first reference object is disposed on the scanning particle microscope while the scanning particle microscope determines a relative position of the at least one element on the sample relative to the first reference object; and
at least one distance measuring device, which is embodied to determine a distance between the first reference object and a second reference object, the second reference object being different from the first reference object, wherein there is a relationship between the second reference object and the sample, and wherein the relationship comprises a known distance between the second reference object and the sample; and

wherein the method steps comprise:
at least partial scanning of the at least one element on the sample and of the first reference object by at least one particle beam of the scanning particle microscope in a common scanning process, in which the first reference object is disposed on the scanning particle microscope;
determining the relative position of the at least one element on the sample relative to the first reference object from the scan data; and
determining the distance between the first reference object and the second reference object by use of the distance measuring device.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Budach Michael
• Auth Nicole

Classifications

• G03F1/86 Primary

  by charged particle beam [CPB] · CPC title

• H01J37/263 Primary

  Contrast, resolution or power of penetration · CPC title

• G03F7/70283

  Mask effects on the imaging process · CPC title

• H01J2237/2826

  Calibration · CPC title

• G03F7/70358

  Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging · CPC title