Apparatus for analyzing and/or processing a sample with a particle beam and method
US-12586755-B2 · Mar 24, 2026 · US
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Auth Nicole patents
Auth Nicole is listed as an inventor on 17 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Auth Nicole |
| Total patents | 17 |
| First publication | Jul 23, 2020 |
| Latest publication | Mar 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Repair process for clear defects on euv psm masks
US-2026036897-A1 · Feb 5, 2026 · US
Method and apparatus for mask repair
US-12535729-B2 · Jan 27, 2026 · US
Devices and methods for examining and/or processing an element for photolithography
US-12135540-B2 · Nov 5, 2024 · US
High resolution, low energy electron microscope for providing topography information and method of mask inspection
US-2024272099-A1 · Aug 15, 2024 · US
Method and apparatus for determining optical properties of deposition materials used for lithographic masks
US-2024219844-A1 · Jul 4, 2024 · US
Method and apparatus for repairing a defect of a sample using a focused particle beam
US-2024186109-A1 · Jun 6, 2024 · US
Method and apparatus for mask repair
US-2023280647-A1 · Sep 7, 2023 · US
Apparatus for analyzing and/or processing a sample with a particle beam and method
US-2023238209-A1 · Jul 27, 2023 · US
Apparatus for analyzing and/or processing a sample with a particle beam and method
US-2023238213-A1 · Jul 27, 2023 · US
Recent patents
Latest publications not already listed above.
Apparatus and method for determining a position of an element on a photolithographic mask
US-11650495-B2 · May 16, 2023 · US
Device and method for processing a microstructured component
US-11487211-B2 · Nov 1, 2022 · US
Apparatus and method for determining a position of an element on a photolithographic mask
US-2022334469-A1 · Oct 20, 2022 · US
Apparatus and method for determining a position of an element on a photolithographic mask
US-11385540-B2 · Jul 12, 2022 · US
Device and method for processing a microstructured component
US-2021173310-A1 · Jun 10, 2021 · US
Devices and methods for examining and/or processing an element for photolithography
US-2021132594-A1 · May 6, 2021 · US
Apparatus and method for determining a position of an element on a photolithographic mask
US-2020233299-A1 · Jul 23, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 17 |
| Hoinkis Elke | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/28 | 9 |
| G03F1/74 | 8 |
| G03F1/86 | 8 |
| H01J2237/2817 | 6 |
| G03F7/7085 | 6 |