Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope

Patent metadata

Field	Value
Publication number	US-9336983-B2
Application number	US-201514755264-A
Country	US
Kind code	B2
Filing date	Jun 30, 2015
Priority date	Jun 30, 2014
Publication date	May 10, 2016
Grant date	May 10, 2016

Abstract

The invention refers to a scanning particle microscope comprising: (a) at least one reference object which is fixedly arranged at an output of the scanning particle microscope for a particle beam so that the reference object can at least partially be imaged by use of the electron beam; (b) at least one scanning unit operable to scan a particle beam of the scanning particle microscope across at least one portion of the reference object; and (c) at least one setting unit operable to change at least one setting of the scanning particle microscope.

First claim

What is claimed is:

1. A scanning particle microscope comprising:
a. at least one reference object which is fixedly arranged at an output of the scanning particle microscope for a particle beam so that the reference object can at least partially be imaged by the particle beam;
b. at least one scanning unit operable to scan the particle beam of the scanning particle microscope across at least one portion of the reference object; and
c. at least one setting unit operable to change at least one setting of the scanning particle microscope.

2. The scanning particle microscope according to claim 1 , wherein the at least one scanning unit is further operable to scan the particle beam of the scanning particle microscope across at least one portion of the reference object prior to and after at least one setting change of the scanning particle microscope by the setting unit, and wherein the scanning particle microscope further comprises an evaluation unit operable to detect the position of a point of impact of the particle beam on a sample surface relative to the reference object based on data obtained during the scanning prior to and after the setting change.

3. The scanning particle microscope according to claim 1 , wherein the reference object comprises a lattice-like structure and/or a locator structure.

4. The scanning particle microscope according to claim 3 , wherein the lattice-like structure of the reference object comprises openings having a width of ≦100 μm, preferred ≦50 μm, more preferred ≦30 μm, and most preferred ≦10 μm.

5. The scanning particle microscope according to claim 3 , wherein the lattice-like structure and/or the locator structure of the reference object has an outer dimension ≧0.1 mm, preferred ≧0.3 mm, more preferred ≧1.0 mm, and most preferred ≧5.0 mm.

6. The scanning particle microscope according to claim 3 , wherein a lattice bar of the lattice-like structure and/or a locator of the locator structure of the reference object has a width of ≦5 μm, preferred ≦2 μm, more preferred ≦1 μm, and most preferred ≦0.5 μm.

7. The scanning particle microscope according to claim 3 , wherein a distance of the lattice-like structure and/or of the locator structure of the reference object from the sample surface is ≦250 μm, preferred ≦100 μm, more preferred ≦50 μm, and most preferred ≦10 μm.

8. The scanning particle microscope according to claim 3 , wherein the lattice-like structure is electrically conductive for compensating surface charges on the sample surface.

9. The scanning particle microscope according to claim 8 , wherein one end of the reference object is arranged on the scanning particle microscope in an electrically isolating way.

10. The scanning particle microscope according to claim 9 , wherein the reference object comprises an amplifier, in particular a trans-impedance amplifier, which is spatially separated arranged from the reference object and wherein the amplifier is connected with the reference object in an electrically conductive way.

11. The scanning particle microscope according to claim 1 , wherein the reference object has marks by which data measured during scanning can be assigned to a partial area of the area of the reference object.

12. The scanning particle microscope according to claim 3 , wherein the locator structure comprises at least one locator in form of a spear head, and/or wherein the locator structure comprises at least two locators, which are arranged so that the spear heads point to the center of a circle and the center of the circle is within a scanning region of the scanning unit.

13. The scanning particle microscope according to claim 2 , wherein the setting unit sets the scanning particle microscope so that the particle beam simultaneously images at least one portion of the reference object and at least one object available on the sample surface.

14. The scanning particle microscope according to claim 1 , wherein the setting of the scanning particle microscope comprises: setting of a magnification, setting of a focus, setting of a stigmator, setting of an acceleration voltage, setting of a beam shift, adjusting a position of a particle source of the scanning particle microscope and/or changing of an aperture diaphragm.

15. A measuring apparatus with a scanning particle microscope according to claim 1 and a scanning probe microscope, wherein the measuring apparatus is operable to take into account a position change caused by a setting change of the scanning particle microscope when determining a distance between a point of impact of the particle beam of the scanning particle microscope on a sample surface and an interaction point of a probe of the scanning probe microscope with the sample surface.

16. The measuring apparatus according to claim 15 , wherein a change of the distance between the point of impact and the interaction point is determined from the distance of the point of impact and the interaction point prior to the setting change of the scanning particle microscope and a vector of the change of position of the point of impact due to a setting change of the scanning particle microscope.

17. A method for determining at least one change of position of a particle beam of a scanning particle microscope due to at least one setting change of the scanning particle microscope, wherein the method comprises the following steps:
a. at least partial scanning of a reference object for a first time by use of the particle beam of the scanning particle microscope using a scanning unit, wherein the reference object is fixedly arranged at an output of the scanning particle microscope for a particle beam;
b. changing at least one setting of the scanning particle microscope using a setting unit;
c. at least partial scanning of the reference object for a second time by use of the particle beam of the scanning particle microscope using the scanning unit; and
d. determining the change of position of the particle beam of the scanning particle microscope from data of the first and second scanning using an evaluation unit.

18. The method according to claim 17 , wherein determining the change of position of the particle beam comprises: determining a relative shift of the reference object with respect to a scan region of the scanning unit.

19. The method according to claim 17 , further comprising: measuring an electrical current generated by the reference object during scanning.

20. The method according to claim 17 further comprising:
determining a change of distance between a point of impact of the scanning particle microscope on the sample surface and an interaction point of a probe of a scanning probe microscope on the sample surface from a distance of the point of interaction and the interaction point prior to changing at least one setting of the scanning particle microscope and a vector of the change of position of the point of impact due to the setting change of the scanning particle microscope.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Budach Michael
• Baur Christof
• Cujas Dajana
• Heberlein Robert
• Batz Marion

Classifications

• H01J37/265 Primary

  Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/2826

  Calibration · CPC title

• G01Q30/02

  Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope · CPC title

• H01J2237/2583

  using tunnel effects, e.g. STM, AFM · CPC title