Silicon-nitride-containing thermal chemical vapor deposition coating
US-10087521-B2 · Oct 2, 2018 · US
US11618970B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11618970-B2 |
| Application number | US-202017115238-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 8, 2020 |
| Priority date | Jun 14, 2019 |
| Publication date | Apr 4, 2023 |
| Grant date | Apr 4, 2023 |
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Nano-wire growth processes, nano-wires, and articles having nano-wires are disclosed. The nano-wire growth process includes trapping growth-inducing particles on a substrate, positioning the substrate within a chamber, closing the chamber, applying a vacuum to the chamber, introducing a precursor gas to the chamber, and thermally decomposing the precursor gas. The thermally decomposing of the precursor gas grows nano-wires from the growth-inducing particles. The nano-wires and the articles having the nano-wires are produced by the nano-wire growth process.
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What is claimed is: 1. A nano-wire growth process, comprising: trapping growth-inducing particles on a substrate; positioning the substrate within a chamber; closing the chamber; applying a vacuum to the chamber; introducing a precursor gas to the chamber; thermally decomposing the precursor gas; wherein the thermally decomposing of the precursor gas grows nano-wires from the growth-inducing particles; wherein the substrate is stainless steel, 304 stainless steel, 316 stainless steel, or a combination thereof. 2. A nano-wire growth process, comprising: trapping growth-inducing particles on a substrate; positioning the substrate within a chamber; closing the chamber; applying a vacuum to the chamber; introducing a precursor gas to the chamber; thermally decomposing the precursor gas; wherein the thermally decomposing of the precursor gas grows nano-wires from the growth-inducing particles; wherein the substrate has a polished surface, a mirror-polished surface, an average Ra surface roughness value of less than 20 micro-inches, an average Ra surface roughness value of greater than 20 micro-inches, or a combination thereof. 3. A tribological component of a tribological device comprising nano-wires produced by a nano-wire growth process, the nano-wire growth process comprising: trapping growth-inducing particles on a substrate; positioning the substrate within a chamber; closing the chamber; applying a vacuum to the chamber; introducing a precursor gas to the chamber; thermally decomposing the precursor gas; wherein the thermally decomposing of the precursor gas grows nano-wires from the growth-inducing particles; wherein the tribological component is bushings, bearings, brake pads, gun barrels, rifle bolts, boring equipment, earth-handling equipment, medical devices or other tribological components having desirable surface properties.
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