Fluidic cavities for on-chip layering and sealing of separation arrays

Patent metadata

Field	Value
Publication number	US-11612889-B2
Application number	US-202117162002-A
Country	US
Kind code	B2
Filing date	Jan 29, 2021
Priority date	Feb 13, 2019
Publication date	Mar 28, 2023
Grant date	Mar 28, 2023

Abstract

A method for fabricating a fluidic device includes depositing a sacrificial material on a pillar array arranged on a substrate. The method also includes removing a portion of the sacrificial material. The method further includes depositing a sealing layer on the pillar array to form a sealed fluidic cavity.

First claim

What is claimed is:

1. A fluidic device comprising:
a first pillar array arranged on a substrate, the first pillar array comprising a plurality of pillars and a plurality of extraction columns, each extraction column comprising an access opening, each access opening of each extraction column being a single slit within a sidewall of the extraction column; and
a sealing layer arranged on the first pillar array to form a sealed fluidic cavity.

2. The fluidic device of claim 1 , wherein the fluidic device comprises a deterministic lateral displacement (DLD) device.

3. The fluidic device of claim 1 , wherein the sealing layer comprises an oxide.

4. The fluidic device of claim 1 further comprising a second pillar array arranged between the first pillar array and the sealing layer.

5. The fluidic device of claim 1 , wherein the first pillar array comprises an oxide.

6. The fluidic device of claim 5 , wherein the oxide is silicon dioxide.

7. A fluidic device comprising:
a first pillar array arranged on a substrate, the first pillar array comprising a plurality of pillars and a plurality of extraction columns, each extraction column comprising an access opening each access opening of each extraction column being three slits within a sidewall of the extraction column; and
a sealing layer arranged on the first pillar array to form a sealed fluidic cavity.

8. A fluidic device comprising:
a first pillar array arranged on a substrate, the first pillar array comprising a plurality of pillars and a plurality of extraction columns, each extraction column comprising an access opening, each extraction column includes an inverted U-shaped structure;
a sealing layer arranged on the first pillar array to form a sealed fluidic cavity; and
an oxide layer arranged on the sealing layer, the oxide layer having a plurality of vent holes aligned over the plurality of extraction columns.

9. The fluidic device of claim 8 , wherein the fluidic device comprises a deterministic lateral displacement (DLD) device.

10. The fluidic device of claim 8 , wherein the sealing layer comprises an oxide.

11. The fluidic device of claim 8 further comprising a second pillar array arranged between the first pillar array and the sealing layer.

12. The fluidic device of claim 8 , wherein the first pillar array comprises an oxide.

13. The fluidic device of claim 12 , wherein the oxide is silicon dioxide.

14. The fluidic device of claim 8 , wherein the access opening of the inverted U-shaped structure faces a direction of fluid flow.

Assignees

• IBM

Inventors

• Colgan Evan
• Smith Joshua T
• Wunsch Benjamin

Classifications

• G01N15/0255

  with mechanical, e.g. inertial, classification, and investigation of sorted collections (with centrifuges G01N15/042) · CPC title

• B01L2300/12

  Specific details about materials · CPC title

• B81C1/00111

  Tips, pillars, i.e. raised structures (microneedles A61M37/0015) · CPC title

• B01L3/502723

  characterised by venting arrangements · CPC title

• B01L3/502707 Primary

  characterised by the manufacture of the container or its components · CPC title