Compact fluid analysis device and method to fabricate

Patent metadata

Field	Value
Publication number	US-9617149-B2
Application number	US-201414567301-A
Country	US
Kind code	B2
Filing date	Dec 11, 2014
Priority date	May 22, 2013
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

The present disclosure relates to a device for analyzing a fluid sample. In one aspect, the device includes a fluidic substrate that comprises a micro-fluidic component embedded in the fluidic substrate configured to propagate a fluid sample via capillary force through the device and a means for providing a fluid sample connected to the micro-fluidic component. The device also includes a lid attached to the fluidic substrate at least partly covering the fluidic substrate and at least partly closing the micro-fluidic component. The fluidic substrate may be a silicon fluidic substrate and the lid may be a CMOS chip. In another aspect, embodiments of the present disclosure relate to a method for fabricating such a device, and the method may include providing a fluidic substrate, providing a lid, and attaching, through a CMOS compatible bonding process, the fluidic substrate to the lid to close the fluidic substrate at least partly.

First claim

The invention claimed is:

1. A device for analyzing a fluid sample, the device comprising:
a fluidic substrate comprising:
a micro-fluidic component embedded in the fluidic substrate and configured to propagate a fluid sample via capillary force through the micro-fluidic component, and
a means for providing a fluid sample connected to the micro-fluidic component; and

a lid attached to the fluidic substrate, at least partly covering the fluidic substrate, and at least partly closing the micro-fluidic component,
wherein the fluidic substrate is a silicon fluidic substrate,
and wherein the lid is a Complimentary Metal-Oxide Semiconductor (CMOS) chip, wherein the CMOS chip includes at least one electrical component, and wherein the at least one electrical component is in direct contact with the fluid sample when the fluid sample is present in the device.

2. The device according to claim 1 , wherein the lid comprises a transistor layer electrically connected to the at least one electrical component, and wherein the at least one electrical component includes at least one of the following biosensing circuitry, an electrode for sensing purposes, an electrode for fluid manipulation purposes, circuitry for data communication purposes, circuitry for wireless data communication purposes, a temperature sensor, a heater electrode for temperature control, or a fluid sensor and an electrode for fluidic viscosity control.

3. The device according to claim 1 , wherein the means for providing a fluid sample is an integrated needle fabricated from silicon and comprising an inner fluidic channel connected to the micro-fluidic component, and wherein the needle is a protruding portion of the fluidic substrate and is positioned to penetrate skin tissue when pressed against the skin tissue.

4. The device according to claim 3 , wherein the fluidic substrate comprises a cut-out, and wherein the needle is positioned in the cut-out.

5. The device according to claim 3 , wherein the fluidic substrate comprises a protection structure for protecting the needle, and wherein the protection structure is removably attached to the fluidic substrate.

6. The device according to claim 1 , wherein the fluidic substrate further comprises at least one optical waveguide to allow optical excitation and sensing of the fluid sample when present in the device.

7. The device according to claim 1 , wherein at least one of the fluidic substrate or the lid comprises at least one through-hole for application of a biochemical reagent to at least one region of the micro-fluidic component or to at least one region of the lid.

8. The device according to claim 1 , wherein the lid is bonded to the fluidic substrate using a lithographically patterned polymer.

9. The device according to claim 1 , further comprising metal contacts electrically connected to the lid for read-out of electrical signals from the lid.

10. The device according to claim 1 , wherein at least part of one or more of the fluidic substrate or the lid is fabricated from a transparent material to allow optical inspection of a fluid sample when the fluid sample is present in the micro-fluidic component.

11. The device according to claim 1 , wherein the device is configured to allow insertion into a mobile communication device.

12. The device according to claim 1 , wherein the micro-fluidic component further includes micro-pillars arranged to create the capillary force that propagates the fluid sample through the micro-fluidic component.

13. The device according to claim 12 , wherein the micro-pillars are arranged to create the capillary force by varying one or more of distances between micro-pillars, dimensions of the micro-pillars, or shapes of the micro-pillars.

14. A device for analyzing a fluid sample, the device comprising:
a fluidic substrate comprising a micro-fluidic component embedded in the fluidic substrate and configured to propagate a fluid sample via capillary force through the micro-fluidic component, wherein the fluidic substrate is a silicon fluidic substrate; and
a CMOS chip attached to the silicon fluidic substrate, at least partly covering the fluidic substrate, and at least partly closing the micro-fluidic component, wherein the CMOS chip includes at least one electrical component, and wherein the at least one electrical component is in direct contact with the fluid sample when the fluid sample is present in the device.

15. A method for fabricating a device for analyzing a fluid sample, the method comprising:
providing a fluidic substrate comprising a micro-fluidic component embedded in the fluidic substrate and configured to propagate a fluid sample via capillary force through the micro-fluidic component, and a means for providing a fluid sample connected to the micro-fluidic component;
providing a lid; and
attaching the fluidic substrate to the lid to close the fluidic substrate at least partly,
wherein the fluidic substrate is a silicon fluidic substrate and the lid is CMOS chip,
wherein the CMOS chip includes at least one electrical component, and wherein the at least one electrical component is in direct contact with the fluid sample when the fluid sample is present in the device,
and wherein the fluidic substrate is attached to the lid using a CMOS compatible bonding process.

16. The method according to claim 15 , wherein providing the fluidic substrate comprises:
providing a silicon substrate, providing an oxide mask, and patterning the oxide mask to create fine structures in the oxide mask;
providing a protection layer to protect the oxide mask;
patterning coarse structures;
etching of the coarse structures;
growing oxide for protecting the coarse structures;
removing the protection layer;
etching the fine structures; and
removing the oxide.

17. The method according to claim 15 , wherein surfaces of the fluidic substrate and the lid are partially or fully coated to modify surface interactions of the substrate with the fluid sample.

18. Use of the device according to claim 1 to perform microscopy.

Assignees

• Imec Vzw

Inventors

• Lagae Liesbet
• Peumans Peter

Classifications

• Y10T436/143333

  Saccharide [e.g., DNA, etc.] · CPC title

• B01L2300/0887

  Laminated structure · CPC title

• B01L2300/1833

  using electrical currents in the sample itself · CPC title

• B01L2400/0415

  electrical forces, e.g. electrokinetic · CPC title

• A61B5/15087

  short range, e.g. between console and disposable (using implanted devices A61B5/150877) · CPC title