Electro-oxidative metal removal in through mask interconnect fabrication

Patent metadata

Field	Value
Publication number	US-11610782-B2
Application number	US-202016875715-A
Country	US
Kind code	B2
Filing date	May 15, 2020
Priority date	Jul 28, 2017
Publication date	Mar 21, 2023
Grant date	Mar 21, 2023

Abstract

In one implementation a cathode for electrochemical metal removal has a generally disc-shaped body and a plurality of channels in the generally disc-shaped body, where the channels are configured for passing electrolyte through the body of the cathode. The channels may be fitted with non-conductive (e.g., plastic) tubes that in some embodiments extend above the body of the cathode to a height of at least 1 cm. The cathode may also include a plurality of indentations at the edge to facilitate electrolyte flow at the edge of the cathode. In some embodiments the cathode includes a plurality of non-conductive fixation elements on a conductive surface of the cathode, where the fixation elements are attachable to one or more handles for removing the cathode from the electrochemical metal removal apparatus.

First claim

The invention claimed is:

1. A cathode for electrochemical metal removal, the cathode having a generally disc-shaped body, and comprising:
(a) a plurality of channels, wherein the channels are configured for passing an electrolyte through the generally disc-shaped body of the cathode; and
(b) a plurality of indentations at an edge of the cathode,
wherein the cathode further comprises a plurality of through-tubes fitted into the plurality of channels.

2. The cathode of claim 1 , wherein the plurality of through-tubes are non-conductive through-tubes.

3. The cathode of claim 1 , wherein the plurality of through-tubes fitted into the plurality of channels are plastic through-tubes.

4. The cathode of claim 1 , wherein the plurality of through-tubes are fitted into the plurality of channels, such that the through-tubes extend to at least about 1 cm above the generally disc-shaped body of the cathode.

5. The cathode of claim 1 , wherein the plurality of through-tubes are fitted into the plurality of channels, such that the through-tubes extend above the generally disk-shaped body of the cathode to a height of 1.2-4.5 cm.

6. The cathode of claim 1 , wherein the cathode is a stainless steel cathode.

7. The cathode of claim 1 , wherein the plurality of through-tubes fitted into the plurality of channels are attached to the cathode by a plurality of clip rings.

8. The cathode of claim 1 , wherein the cathode further comprises a centrally located mounting bolt configured to connect the cathode to an electrical buss terminal.

9. The cathode of claim 1 , wherein the cathode further comprises a centrally located mounting bolt configured to connect the cathode to an electrical buss terminal, wherein the mounting bolt has an insulating coating that is configured to prevent an inner portion of the bolt from contacting the electrolyte.

10. The cathode of claim 1 , further comprising a plurality of non-conductive fixation elements configured to be attachable to one or more handles.

11. The cathode of claim 10 , wherein the fixation elements are positioned at different radial positions on the generally disc-shaped body of the cathode, such that no two fixation elements reside at a same radius.

12. The cathode of claim 1 , further comprising a plurality of non-conductive fixation elements and at least one handle attached to the fixation elements.

13. The cathode of claim 1 , further comprising four non-conductive fixation elements and two handles attached to the fixation elements.

14. A cathode for electrochemical metal removal, the cathode having a generally disc-shaped body and comprising a plurality of non-conductive fixation elements on a conductive surface of the cathode, wherein the fixation elements are configured for being attachable to one or more handles.

15. The cathode of claim 14 , wherein the fixation elements are positioned at different radial positions on the generally disc-shaped body of the cathode, such that no two fixation elements reside at a same radius.

16. The cathode of claim 14 , wherein the cathode is a stainless steel cathode.

17. The cathode of claim 14 , wherein the cathode further comprises a plurality of channels, wherein the channels are configured for passing an electrolyte through the generally disc-shaped body of the cathode.

18. The cathode of claim 14 , wherein the cathode further comprises a plurality of channels and non-conductive tubes fitted into the plurality of channels, wherein the channels are configured for passing an electrolyte through the generally disc-shaped body of the cathode.

19. A cathode for electrochemical metal removal, the cathode having a generally disc-shaped body, and comprising:
(a) a plurality of channels, wherein the channels are configured for passing an electrolyte through the generally disc-shaped body of the cathode; and
(b) a plurality of indentations at an edge of the cathode,
wherein the cathode further comprises a centrally located mounting bolt configured to connect the cathode to an electrical buss terminal.

20. The cathode of claim 19 , wherein the mounting bolt has an insulating coating that is configured to prevent an inner portion of the bolt from contacting the electrolyte.

Assignees

• Lam Res Corp

Inventors

• Thorkelsson Kari
• Abraham Richard G
• Mayer Steven T

Classifications

• H10P72/0476

  comprising at least one plating chamber · CPC title

• H10P72/0422

  for wet etching · CPC title

• H10P50/667

  by liquid etching only · CPC title

• H10P14/46

  using a liquid · CPC title

• H10W70/05

  of insulating or insulated package substrates, or of interposers, or of redistribution layers (manufacture or treatment of leadframes H10W70/04) · CPC title