Tungsten pentachloride conditioning and crystalline phase manipulation
US-11066310-B2 · Jul 20, 2021 · US
Tungsten pentachloride conditioning and crystalline phase manipulation
US11577967B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11577967-B2 |
| Application number | US-202017123445-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 16, 2020 |
| Priority date | Apr 30, 2018 |
| Publication date | Feb 14, 2023 |
| Grant date | Feb 14, 2023 |
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- Title
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Abstract
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A process of conditioning tungsten pentachloride to form specific crystalline phases are disclosed. The specific crystalline phases permit stable vapor pressures over extended periods of time during vapor deposition and etching processes.
First claim
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We claim: 1. A WCl 5 -containing composition comprising a crystalline phase having approximately 10% weight to approximately 40% weight of phase 1 WCl 5 as determined by X-ray diffraction. 2. The WCl 5 -containing composition of claim 1 , the crystalline phase having approximately 10% weight to approximately 35% weight of Phase 1 WCl 5 . 3. The WCl 5 -containing composition of claim 1 , the crystalline phase having approximately 10% weight to approximately 30% weight of Phase 1 WCl 5 . 4. The WCl 5 -containing composition of claim 1 , the crystalline phase having approximately 10% weight to approximately 25% weight of Phase 1 WCl 5 .
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by d-values or two theta-values, e.g. as X-ray diagram · CPC title
- C01G41/04Primary
Halides · CPC title
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- What does patent US11577967B2 cover?
- A process of conditioning tungsten pentachloride to form specific crystalline phases are disclosed. The specific crystalline phases permit stable vapor pressures over extended periods of time during vapor deposition and etching processes.
- Who is the assignee on this patent?
- Air Liquide
- What technology area does this patent fall under?
- Primary CPC classification C01G41/04. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Feb 14 2023 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).