Assembly provided with coolant flow channel, method of controlling assembly provided with coolant flow channel, and substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-11569073-B2
Application number	US-201816110201-A
Country	US
Kind code	B2
Filing date	Aug 23, 2018
Priority date	Aug 25, 2017
Publication date	Jan 31, 2023
Grant date	Jan 31, 2023

Abstract

An assembly provided with a coolant flow channel includes a base in which the coolant flow channel is formed; and a protrusion component that is disposed in the coolant flow channel, wherein the protrusion component is liftable or rotatable.

First claim

What is claimed is:

1. An assembly comprising:
a coolant flow channel having a spiral shape;
a base in which the coolant flow channel is formed;
a protrusion component that is disposed in the flow channel, wherein the protrusion component is liftable,
a heater; and
a controller that controls vertical movement of the protrusion component,
wherein an inlet hole through which the coolant enters and an outlet hole from which the coolant exits are formed in the coolant flow channel,
wherein a single cross section includes a center point of the spiral shape, a cross section of the entire coolant flow channel from the inlet hole to the outlet hole, and a cross section of the protrusion component,
wherein the flow channel is formed of a flow channel forming component, and the flow channel forming component includes an elliptical protrusion that forms a through hole passing through the flow channel without contacting the flow channel, and
wherein the controller stores a table that defines correspondence between a plurality of intermediate values of electric power supplied to the heater and a respective plurality of intermediate values of height of the protrusion component, each of the plurality of intermediate values being in a range between a zero power level and a maximum power level, and the controller controls the vertical movement of the protrusion component in accordance with the table, in response to detecting a value of the electric power supplied to the heater.

2. The assembly according to claim 1 , wherein the protrusion component is disposed at a singular point of a temperature distribution in the coolant flow channel.

3. The assembly according to claim 1 ,
wherein the protrusion component includes, a first protrusion component and a second protrusion component, and the inlet hole and the outlet hole are singular points of a temperature distribution in the coolant flow channel, and,
wherein the first protrusion component is disposed in a vicinity of the inlet hole, and the second protrusion component is disposed in a vicinity of the outlet hole.

4. The assembly according to claim 1 ,
wherein a central portion of the coolant flow channel is a singular point of a temperature distribution in the coolant now channel at which a direction of a flow of the coolant changes, and the protrusion component is disposed at the singular point or in a vicinity of the singular point.

5. The assembly according to claim 1 , wherein another through hole is formed in the coolant flow channel, and wherein the through hole is a singular point of a temperature distribution in the coolant flow channel, and the protrusion component is disposed in a vicinity of the singular point.

6. The assembly according to claim 1 , wherein the protrusion component is a screw or a baffle plate.

7. The assembly according to claim 1 , wherein the assembly provided with the coolant flow channel includes a mounting surface and an electrostatic chuck,
wherein the mounting surface is disposed adjacent to the base, and an object to be processed is placed on the mounting surface, and
wherein the electrostatic chuck electrostatically attracts the object to be processed.

8. The assembly according to claim 1 , wherein the assembly provided with the coolant flow channel includes a plate shaped component disposed adjacent to the base, wherein the plate shaped component functions as an electrode.

9. A substrate processing apparatus comprising:
a mounting table disposed in a processing container, wherein an object to be processed is placed on the mounting table;
an upper electrode disposed to face the mounting table; and
an assembly provided with a coolant flow channel having a spiral shape,
wherein the assembly provided with the coolant flow channel includes a base in which the coolant flow channel is formed, a protruding component disposed in the coolant flow channel, the protruding component being liftable, a heater, and a controller that controls vertical movement of the protrusion component,
wherein an inlet hole through which the coolant enters and an outlet hole from which the coolant exits are formed in the coolant flow channel,
wherein a single cross section includes a center point of the spiral shape, a cross section of the entire coolant flow channel from the inlet hole to the outlet hole, and a cross section of the protrusion component,
wherein the flow channel is formed of a low channel forming component, and the flow channel forming component includes an elliptical protrusion that forms a through hole passing through the flow channel without contacting the flow channel,
wherein the controller stores a table that defines correspondence between a plurality of intermediate values of electric power supplied to the heater and a respective plurality of intermediate values of height of the protrusion component, each of the plurality of intermediate values being in a range between a zero power level and a maximum power level, and the controller controls the vertical movement of the protrusion component in accordance with the table, in response to detecting a value of the electric power supplied to the heater, and
wherein the assembly provided with the coolant flow channel is disposed in at least one of the mounting table and the upper electrode.

10. A method of controlling an assembly provided with a coolant flow channel,
wherein the coolant flow channel has a spiral shape, and the assembly provided with the coolant flow channel includes a base in which the coolant flow channel is formed, a protrusion component disposed in the coolant flow channel, the protrusion component being liftable, a heater, and a controller that stores a table that defines correspondence between a plurality of intermediate values of electric power supplied to the heater and a respective plurality of intermediate values of height of the protrusion component, each of the plurality of intermediate values being in a range between a zero power level and a maximum power level, and that controls vertical movement of the protrusion component,
wherein an inlet hole through which the coolant enters and an outlet hole from which the coolant exits are formed in the coolant flow channel,
wherein a single cross section includes a center point of the spiral shape a cross section of the entire coolant flow channel from the inlet hole to the outlet hole, and a cross section of the protrusion component,
wherein the flow channel is formed of a flow channel forming component, and the flow channel forming component includes an elliptical protrusion that forms a through hole passing through the flow channel without contacting the flow channel, and
wherein the method includes
supplying the coolant at a predetermined temperature to the coolant flow channel,
supplying predetermined electric power to the heater, and
controlling the vertical movement of the protrusion component in accordance with the table, in response to detecting a value of the electric power supplied to the heater.

Assignees

• Tokyo Electron Ltd

Inventors

• Hirose Jun
• Oohashi Kaoru

Classifications

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/722

  Details of electrostatic chucks · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/72

  using electrostatic chucks · CPC title