Charged particle beam apparatus

Patent metadata

Field	Value
Publication number	US-11398367-B2
Application number	US-202016928931-A
Country	US
Kind code	B2
Filing date	Jul 14, 2020
Priority date	Aug 8, 2019
Publication date	Jul 26, 2022
Grant date	Jul 26, 2022

Abstract

A charged particle beam apparatus includes a database that stores a to-be-used-in-calculation device model for use in estimation of a circuit of a sample and an optical condition under which a charged particle beam is applied to the sample, a charged particle beam optical system that controls the beam applied to the sample under the optical condition, a detector that detects secondary electrons emitted from the sample excited by the application of the beam and outputs a detection signal based on the secondary electrons, and a computing unit that generates a to-be-used-in-computation netlist based on the to-be-used-in-calculation device model, estimates a first application result when the beam is applied to the sample based on the to-be-used-in-computation netlist and the optical condition, and compares the first application result with a second application result when the beam is applied to the sample based on the optical condition.

First claim

What is claimed is:

1. A charged particle beam apparatus comprising:
a database configured to store a to-be-used-in-calculation device model for use in estimation of a circuit of a sample and an optical condition under which a charged particle beam is applied to the sample;
a charged particle beam optical system comprising a lens barrel mounted on a sample chamber and operatively coupled with a controller configured to control the charged particle beam applied to the sample under the optical condition;
a detector configured to detect secondary electrons emitted from the sample excited by the application of the charged particle beam and output a detection signal based on the secondary electrons; and
a computer configured to generate a to-be-used-in-computation netlist on a basis of the to-be-used-in-calculation device model, estimate a first application result when the charged particle beam is applied to the sample on a basis of the to-be-used-in-computation netlist and the optical condition, and compare the first application result with a second application result when the charged particle beam is applied to the sample on a basis of the optical condition.

2. The charged particle beam apparatus according to claim 1 , wherein the computer is further configured to update the to-be-used-in-calculation device model when the first application result and the second application result differs from each other, and identify the to-be-used-in-computation netlist as a netlist describing the circuit of the sample when the first application result and the second application result coincide with each other.

3. The charged particle beam apparatus according to claim 2 , wherein the computer is further configured to change a parameter value included in the to-be-used-in-calculation device model, and update the to-be-used-in-computation netlist using the parameter value changed.

4. The charged particle beam apparatus according to claim 1 , wherein the second application result includes any one of the detection signal, an inspection image based on the detection signal, brightness of the inspection image, or brightness of each pixel of the inspection image.

5. The charged particle beam apparatus according to claim 1 , wherein the to-be-used-in-calculation device model includes a model representing a defect in a device.

6. The charged particle beam apparatus according to claim 1 , wherein the to-be-used-in-calculation device model includes any one of a model defining a circuit of a device, a mathematical expression defining electrical characteristics of the device, a shape of the device, or physical properties of the device.

7. The charged particle beam apparatus according to claim 6 , wherein the to-be-used-in-calculation device model includes a parameter value of a circuit element included in the circuit of the device.

8. The charged particle beam apparatus according to claim 2 , wherein the computer is further configured to generate an inspection image on a basis of the detection signal, and generate a correspondence table that associates a position of a plug electrode in the inspection image with each node in the to-be-used-in-computation netlist identified.

9. The charged particle beam apparatus according to claim 1 , wherein
the database stores a pulse conversion condition under which the charged particle beam is pulsed,
the charged particle beam optical system controls the charged particle beam applied to the sample under the optical condition and the pulse conversion condition, and
the computer estimates the first application result on a basis of the optical condition and the pulse conversion condition.

10. The charged particle beam apparatus according to claim 1 , wherein the computer is further configured to compare, using a plurality of the to-be-used-in-calculation device models, and one of the optical conditions, the first application result and the second application result for each of the to-be-used-in-calculation device models.

11. The charged particle beam apparatus according to claim 1 , wherein the computer is further configured to compare, using one of the to-be-used-in-calculation device models, and a plurality of the optical conditions, the first application result and the second application result for each of the optical conditions.

Assignees

• Hitachi High Tech Corp

Inventors

• Miwa Takafumi
• Nakamura Yohei
• Tsuno Natsuki
• KIMIZUKA Heita
• Fukuda Muneyuki

Classifications

• H01J2237/24475

  Scattered electron detectors · CPC title

• H01J37/24 Primary

  Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for · CPC title

• H01J2237/2817

  Pattern inspection · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title