Charged particle beam device, simulation method, and simulation device

Patent metadata

Field	Value
Publication number	US-9966225-B2
Application number	US-201415329638-A
Country	US
Kind code	B2
Filing date	Jul 28, 2014
Priority date	Jul 28, 2014
Publication date	May 8, 2018
Grant date	May 8, 2018

Abstract

A simulation device calculates a detection number of electrons generated by charged particles radiated to a sample by a simulation and generates a simulation image of the sample. The simulation device holds penetration length information ( 272 ) in which incidence conditions of the charged particles and a penetration length are associated with each other, sample configuration information ( 271 ) which shows a configuration of a sample, and emission electron number information in which the incidence conditions of the charged particles and an emission electron number are associated with each other. The simulation device calculates the number of electrons emitted from a predetermined incidence point, on the basis of incidence conditions at the predetermined incidence point, the penetration length information ( 272 ), the sample configuration information ( 271 ), and the emission electron number information.

First claim

The invention claimed is:

1. A charged particle beam device for scanning a sample with charged particles, detecting electrons generated by the charged particles, and forming a scanning image, the charged particle beam device comprising:
a chamber;
a charged particle source which radiates a charged particle beam to the sample disposed in the chamber;
a detector which detects the electrons from the sample;
a control unit which generates a scanning image on the basis of a detection result by the detector and displays the scanning image; and
a simulation image generation unit which calculates a detection number of the electrons generated by the charged particles radiated to the sample by a simulation and generates a simulation image of the sample, wherein
the simulation image generation unit holds penetration length information in which incidence conditions of the charged particles and a penetration length are associated with each other, sample configuration information showing a configuration of the sample, and emission electron number information in which the incidence conditions of the charged particles and an emission electron number are associated with each other,
the number of electrons emitted from a predetermined incidence point is calculated on the basis of incidence conditions at the predetermined incidence point, the penetration length information, the sample configuration information, and the emission electron number information, and
in calculation of a detection number of electrons generated by the charged particles incident on a first incidence point of the sample
a first incidence condition of the charged particles at the first incidence point is determined on the basis of radiation conditions of the charged particles and the sample configuration information,
a spherical penetration region centered at the first incidence point is determined on the basis of the first incidence condition and having a radius defined by the penetration length information,
a sample configuration in the penetration region is specified on the basis of the sample configuration information, and
the number of electrons emitted from the first incidence point is calculated on the basis of the first incidence condition, the sample configuration in the penetration region, and the emission electron number information.

2. The charged particle beam device according to claim 1 , wherein
the incidence conditions in the penetration length information include charged particle energy and a sample material, and
the incidence conditions in the emission electron number information include an incidence angle, the charged particle energy, and the sample material.

3. The charged particle beam device according to claim 2 , further comprising:
reflectance information that shows a relation of the incidence conditions of the electrons in the sample and reflectance,
wherein the emission electron number information shows a relation of the incidence conditions of the charged particles and an electron emission angle distribution and a relation of the incidence conditions of the charged particles and an electron energy distribution, and
the simulation image generation unit determines the number of electrons at each of different energies to be emitted from the first incidence point in a first emission direction, on the basis of the emission electron number information, determines whether the electrons emitted from the first incidence point in the first emission direction are incident on the sample again, on the basis of the sample configuration information, determines a sample incidence angle of the electrons in the first emission direction, on the basis of the first emission direction and the sample configuration information, when the electrons in the first emission direction are incident on the sample again, determines reflectance of the electrons at each of the different energies, on the basis of the incidence angle and the reflectance information, and determines a reflection number of electrons at each of the different energies from the reflectance and the number of electrons at each of the different energies in the first emission direction.

4. The charged particle beam device according to claim 1 , wherein
the simulation image generation unit determines incidence conditions for each of partial regions of different configurations in the penetration region, on the basis of the radiation conditions and the sample configuration information, determines the number of electrons emitted from a point of each of the partial regions, on the basis of the incidence conditions for each of the partial regions and the emission electron number information, and determines the number of electrons emitted from the first incidence point, on the basis of the number of electrons emitted from the point of each of the partial regions.

5. The charged particle beam device according to claim 4 , wherein
the simulation image generation unit determines the number of electrons emitted from the first incidence point, on the basis of the number of electrons emitted from the point of each of the partial regions and a ratio of surface sizes of the partial regions.

6. The charged particle beam device according to claim 1 , wherein
the simulation image generation unit generates a plurality of simulation images under different radiation conditions, calculates an index value of contrast based on electron detection numbers of two analysis points in each of the plurality of simulation images, and determines radiation conditions in actual observation of the sample, on the basis of the index value.

7. The charged particle beam device according to claim 1 , wherein
the simulation image generation unit generates a plurality of simulation images under different radiation conditions, calculates an inclination of a line profile on the same line of the sample in each of the plurality of simulation images, and determines radiation conditions in actual observation of the sample, on the basis of the inclination.

8. The charged particle beam device according to claim 1 , wherein
the simulation image generation unit corrects at least one of the penetration length information and the emission electron number information, on the basis of a comparison result of an actual scanning image of the sample and a plurality of simulation images under different radiation conditions.

9. The charged particle beam device according to claim 8 , wherein
the simulation image generation unit corrects the emission electron number information, on the basis of a brightness difference of a first analysis point of the sample between the actual scanning image and each of the plurality of simulation images.

10. The charged particle beam device according to claim 8 , wherein
the simulation image generation unit corrects the penetration length information, on the basis of a difference of line profiles from a first analysis point in a first region of the sample to a boundary with a second region having a configuration different from a configuration of the first region, between the actual scanning image and each of the plurality of simulation images.

11. A simulation method for calculating a detection number of electrons generated by charged particles radiated to a sample in a charged particle beam device by a simulation, the simulation method comprising:
determining a first incidence condition of the charged particles at a first incidence point of the sample, on the basis of radiation conditions of the charged particles from a charged particle source and sample configuration information showing a configuration of the sample;
determining a spherical penetration region centered at the first

Assignees

• Hitachi Ltd

Inventors

• Bizen Daisuke
• Sakakibara Makoto
• Ohta Hiroya
• Tanaka Junichi

Classifications

• H01J2237/226

  Image reconstruction · CPC title

• H01J37/24

  Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for · CPC title

• H01J37/244 Primary

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/261

  Details · CPC title

• H01J2237/221

  Image processing · CPC title