Component and method of manufacturing a component using an ultrathin carrier

Patent metadata

Field	Value
Publication number	US-11367654-B2
Application number	US-201916248255-A
Country	US
Kind code	B2
Filing date	Jan 15, 2019
Priority date	Jul 5, 2012
Publication date	Jun 21, 2022
Grant date	Jun 21, 2022

Abstract

A system and method for manufacturing a packaged component are disclosed. An embodiment comprises forming a plurality of components on a carrier, the plurality of components being separated from each other by kerf regions on a front side of the carrier and forming a metal pattern on a backside of the carrier, wherein the metal pattern covers the backside of the carrier except over regions corresponding to the kerf regions. The method further comprises generating the component by separating the carrier.

First claim

What is claimed is:

1. A method for manufacturing a component, the method comprising:
forming a plurality of components disposed on a front side of a first carrier comprising a semiconductor substrate, the plurality of components being separated from each other by kerf regions;
attaching the front side of the first carrier on a second carrier;
forming a planar metal pattern on a backside of the first carrier, wherein the planar metal pattern covers the backside of the first carrier except over regions corresponding to the kerf regions, and wherein the planar metal pattern comprises free standing metal blocks separated by the regions corresponding to the kerf regions;
removing the second carrier and placing the first carrier on a sawing foil; and
separating the component from the first carrier,
wherein forming the planar metal pattern comprises forming a metal seed layer and electro-plating a metal of the planar metal pattern on the metal seed layer, and forming an under-layer between the seed layer and a substrate of the component, wherein the under-layer comprises a metal adhesion layer and a metal barrier layer.

2. The method according to claim 1 , wherein the planar metal pattern comprises copper (Cu).

3. The method according to claim 1 , wherein the substrate of the component and the planar metal pattern comprises about the same thickness.

4. The method according to claim 1 , wherein the substrate of the component comprises a thickness of about 40 μm or less, and wherein the planar metal pattern comprises a thickness of about 20 μm or more.

5. The method according to claim 1 , wherein separating the component from the first carrier comprises laser cutting the first carrier along the regions.

6. A method for manufacturing a component, the method comprising:
providing a first carrier with a first main surface at a front side of the first carrier and a second main surface at a backside of the first carrier;
disposing a plurality of components at the front side of the first carrier;
attaching the first main surface of the first carrier to a second carrier;
forming a planar patterned metal layer over the second main surface of the first carrier, the planar patterned metal pattern comprising free standing metal blocks separated by spaces;
removing the second carrier and placing the first carrier on a sawing foil; and
separating the component from the first carrier along the spaces,
wherein forming the planar patterned metal layer comprises forming a metal seed layer and plating a metal layer over the seed layer, and forming an under-layer between the metal seed layer and a substrate of the component, wherein the under-layer comprises a metal layer stack of aluminum and titanium, and wherein the seed layer comprises the same material as the planar patterned metal layer.

7. The method according to claim 6 , wherein the first carrier is thinned at the backside before the planar patterned metal layer is formed.

8. The method according to claim 6 , wherein forming the planar patterned metal layer comprises forming a photoresist over the seed layer.

9. The method according to claim 6 , wherein the substrate of the component comprises a thickness of about 40 μm or less, and wherein the planar patterned metal layer comprises a thickness of about 20 μm or more.

10. The method according to claim 6 , wherein separating the component from the first carrier comprises laser cutting the first carrier.

11. The method according to claim 6 , further comprising placing the component on a leadframe, and encapsulating the component and at least a portion of the leadframe.

12. The method according to claim 11 , wherein placing the component on the leadframe comprises wire bonding or clip bonding the component to the leadframe.

13. A method of manufacturing a wafer, the method comprising:
forming kerf regions and chips on a first main surface of the wafer;
forming a planar metal pattern on a second main surface of the wafer, wherein the planar metal pattern covers the second main surface of the wafer except over regions corresponding to the kerf regions, and wherein the planar metal pattern comprises free standing metal blocks separated by the regions corresponding to the kerf regions, wherein forming the planar metal pattern comprises forming a metal seed layer and electro-plating a metal of the planar metal pattern on the metal seed layer; and
forming an under-layer between the seed layer and a substrate of the wafer, wherein the under-layer comprises a metal adhesion layer and a metal barrier layer.

14. The method according to claim 13 , wherein the planar metal pattern comprises copper (Cu).

15. The method according to claim 13 , wherein forming the planar metal pattern comprises forming the metal seed layer in a metal bath and patterning a photoresist over the seed layer.

Assignees

• Infineon Technologies Ag

Inventors

• Mayer Karl
• Napetschnig Evelyn
• Pinczolits Michael
• Sternad Michael
• Roesner Michael

Classifications

• H10W74/00

  Encapsulations, e.g. protective coatings · CPC title

• H10W72/884

  Die-attach connectors and bond wires · CPC title

• H10W90/756

  between a chip and a stacked lead frame, conducting package substrate or heat sink · CPC title

• H10W72/886

  Die-attach connectors and strap connectors · CPC title

• H10W72/07636

  Soldering or alloying · CPC title