Sputtering target packaging structure and method of packaging sputtering target

Patent metadata

Field	Value
Publication number	US-11345533-B2
Application number	US-201916694618-A
Country	US
Kind code	B2
Filing date	Nov 25, 2019
Priority date	Nov 26, 2018
Publication date	May 31, 2022
Grant date	May 31, 2022

Abstract

A sputtering target packaging structure comprising:a sputtering target including a cylinder part, a flange part disposed on an opening part at one end of the cylinder part, and a cap disposed on an opening part at the other end of the cylinder part; anda packing material made up of a sheet and covering an inner surface and an outer surface of the sputtering target in a close contact state, whereinthe packing material includes seal parts on both end sides of the sputtering target.

First claim

The invention claimed is:

1. A sputtering target packaging structure comprising:
a sputtering target including a cylinder part, a flange part disposed on an opening part at one end of the cylinder part, and a cap disposed on an opening part at the other end of the cylinder part; and
a packing material made up of a sheet and covering an inner surface and an outer surface of the sputtering target in a close contact state, wherein
the packing material includes seal parts on both end sides of the sputtering target.

2. The sputtering target packaging structure according to claim 1 , wherein the seal parts are located outside both ends of the sputtering target.

3. The sputtering target packaging structure according to claim 1 , wherein a vacuum state is achieved between the packing material and the sputtering target.

4. The sputtering target packaging structure according to claim 1 , wherein a gap between the flange part of the sputtering target and the packing material of the packaging structure is less than 10 mm after one week under atmospheric pressure at 20° C. from the time of packaging.

5. A sputtering target packaging structure comprising:
a sputtering target including a cylinder part, a flange part disposed on an opening part at one end of the cylinder part, and a cap disposed on an opening part at the other end of the cylinder part; and
a packing material made up of a sheet, wherein
a vacuum state is achieved between the sputtering target and the packing material and/or the sputtering target and the packing material are in a close contact state, and wherein
a gap between the flange part of the cylindrical sputtering target and the packing material is less than 10 mm after one week under atmospheric pressure at 20° C. from the time of packaging when the packing material is pulled outward in a longitudinal direction of the cylindrical sputtering target with a force of 20N.

6. The sputtering target packaging structure according to claim 1 , wherein the packing material has a characteristic of hardly allowing permeation of oxygen and water.

7. The sputtering target packaging structure according to claim 1 , wherein the sputtering target has a length of 1000 mm or more and 5000 mm or less in a longitudinal direction.

8. A method of packaging a sputtering target including a cylinder part, a flange part disposed on an opening part at one end of the cylinder part, and a cap disposed on an opening part at the other end of the cylinder part with a packing material, comprising the steps of:
covering an outside of the sputtering target with the packing material made up of a tubular sheet including opening parts at one end and the other end such that the flange part side of the sputtering target faces toward the one end of the packing material;
closing the opening part at one end of the packing material;
pushing into the inside of the sputtering target the one end of the packing material having the opening part closed on the flange part side of the sputtering target;
performing vacuuming from the opening part at the other end of the packing material on the cap side of the sputtering target and closing the opening part at the other end; and
opening a portion of the packing material on the flange part side of the sputtering target, performing vacuuming from an opening part in the portion, and closing the opening part in the portion.

9. A method of packaging a sputtering target including a cylinder part, a flange part disposed on an opening part at one end of the cylinder part, and a cap disposed on an opening part at the other end of the cylinder part with a packing material, comprising the steps of:
covering an outside of the sputtering target with the packing material made up of a bag-shaped sheet including a closing part at one end and an opening part at the other end such that the flange part side of the sputtering target faces toward the closing part of the packing material;
pushing into the inside of the sputtering target the one end of the closing part of the packing material on the flange part side of the sputtering target;
performing vacuuming from the opening part at the other end of the packing material on the cap side of the sputtering target and closing the opening part at the other end; and
opening a portion of the packing material on the flange part side of the sputtering target, performing vacuuming from an opening part in the portion, and closing the opening part in the portion.

10. The method of packaging a sputtering target according to claim 8 , wherein the step of pushing the packing material into the inside of the sputtering target includes pushing the packing material into the inside of the sputtering target while inserting a core into the inside of the sputtering target.

11. The method of packaging a sputtering target according to claim 10 , wherein at least one of the vacuuming from the opening part at the other end and the vacuuming from the opening part in the portion is performed with the core inserted inside the sputtering target, and wherein the method includes extracting the core after the vacuuming.

12. A method of packaging a sputtering target including a cylinder part, a flange part disposed on an opening part at one end of the cylinder part, and a cap disposed on an opening part at the other end of the cylinder part with a packing material, comprising the steps of:
covering an outside of the sputtering target with the packing material made up of a bag-shaped sheet including an opening part at one end and a closing part at the other end such that the flange part side of the sputtering target faces toward the opening part of the packing material;
closing the opening part at one end of the packing material;
opening a portion of the closing part of the packing material on the cap side of the sputtering target;
opening a portion of the packing material on the flange part side of the sputtering target;
pushing into the inside of the sputtering target the one end of the packing material having the opening part closed on the flange part side of the sputtering target;
performing vacuuming from the opening part in the portion on the cap side and closing the opening part in the portion on the cap side; and
performing vacuuming from the opening part in the portion on the flange part side and closing the opening part in the portion on the flange part side.

13. The method of packaging a sputtering target according to claim 12 , wherein the step of pushing the packing material into the inside of the sputtering target includes pushing the packing material into the inside of the sputtering target while inserting a core into the inside of the sputtering target.

14. The method of packaging a sputtering target according to claim 13 , wherein at least one of the vacuuming from the opening part in the portion on the cap side and the vacuuming from the opening part in the portion on the flange part side is performed with the core inserted inside the sputtering target, and wherein the method includes extracting the core after the vacuuming.

15. The method of packaging a sputtering target according to claim 8 , wherein the packing material has a characteristic of hardly allowing permeation of oxygen and water.

16. The method of packaging a sputtering target according to claim 8 , wherein the length of the packing material in the longitudinal direction is twice or more the length of the sputtering target in the longitudinal direction.

17. The method of packaging a sputtering target according to claim 8 , comprising sealing the packing material along the longitu

Assignees

• Sumitomo Chemical Co

Inventors

• Nishioka Koji
• Satoh Naoya

Classifications

• B65B31/04

  Evacuating, pressurising or gasifying filled containers or wrappers by means of nozzles through which air or other gas, e.g. an inert gas, is withdrawn or supplied · CPC title

• H01J37/3423 Primary

  Shape · CPC title

• H01J37/3414

  Targets · CPC title

• C23C14/3407 Primary

  Cathode assembly for sputtering apparatus, e.g. Target · CPC title

• B65B25/00

  Packaging other articles presenting special problems (bundling B65B27/00) · CPC title