Method for correcting an image, storage medium and projection device

Patent metadata

Field	Value
Publication number	US-11287646-B2
Application number	US-201916551918-A
Country	US
Kind code	B2
Filing date	Aug 27, 2019
Priority date	Mar 24, 2017
Publication date	Mar 29, 2022
Grant date	Mar 29, 2022

Abstract

Disclosed is a method for correcting an image, a storage medium, and a projection device. The method is applied to a projection device, the projection device including a grating and a light generation component. The method includes: determining, in a region in which a projection image projected by the projection device overlaps with a projected image projected through the grating by detection light output from the projection device, diffraction spots having a diameter not equal to a preset value as target diffraction spots; determining a group of target diffraction spots continuously arranged in a horizontal or vertical direction, as well as diffraction spots having a diameter equal to the preset value that are respectively located on both sides of the group of target diffraction spots, as a region to be corrected; determining an angle α i between a plane of an i th diffraction spot and a plane of an (i+1) th diffraction spot that are adjacent in the horizontal or vertical direction in the region to be corrected; and determining a corrected projection length of the (i+1) th diffraction spot according to the preset value and angles α 1 to α i .

First claim

What is claimed is:

1. A method for correcting an image, wherein the method is applied to a projection device comprising a grating and a light generation component, the method comprising:
determining (S 101 ), in a region in which a projection image projected by the projection device overlaps with a projected image projected through the grating by detection light output from the projection device, diffraction spots having a diameter not equal to a preset value as target diffraction spots;
determining (S 102 ) a group of target diffraction spots continuously arranged in a horizontal or vertical direction, as well as diffraction spots having a diameter equal to the preset value that are respectively located on both sides of the group of target diffraction spots, as a region to be corrected;
determining (S 103 ) an angle α i between a plane of an i th diffraction spot and a plane of an (i+1) th diffraction spot that are adjacent in the horizontal or vertical direction in the region to be corrected, wherein i=1, 2, . . . , N, and N is the total number of spots in the region to be corrected; and
determining (S 104 ) a corrected projection length of the (i+1) th diffraction spot according to the preset value and angles α 1 to α i .

2. The method according to claim 1 , wherein the determining (S 103 ) an angle α i between a plane of an i th diffraction spot and a plane of an (i+1) th diffraction spot that are adjacent in the horizontal or vertical direction in the region to be corrected comprises:
determining a line segment having a first circle center and a second circle center as end points as a first line segment, wherein the first circle center is a circle center of the i th diffraction spot, and the second circle center is a circle center of the (i+1) th diffraction spot;
determining a line segment having the first circle center and a first projection point as end points as a third line segment, the first projection point being a projection point of the second circle center on a plane of the i th diffraction spot; and
determining an angle between the first line segment and the third line segment as the angle α i .

3. The method according to claim 2 , wherein the determining (S 103 ) an angle α i between a plane of an i th diffraction spot and a plane of an (i+1) th diffraction spot that are adjacent in the horizontal or vertical direction in the region to be corrected further comprises:
determining a line segment having the first projection point and the second circle center as end points as a second line segment;
determining a length of the third line segment and a length of the second line segment, respectively; and
determining the angle α i according to the lengths of the third line segment and the second line segment.

4. The method according to claim 3 , wherein the determining a length of the third line segment and a length of the second line segment comprises:
determining the length of the third line segment according to a diameter of the i th diffraction spot and a diameter of the (i+1) th diffraction spot; and
determining the length of the second line segment according to a projection distance of the i th diffraction spot and a projection distance of the (i+1) th diffraction spot.

5. The method according to claim 1 , wherein the method further comprises:
determining position information of the (i+1) th diffraction spot;
determining the (i+1) th region on the projection picture that is covered by the i th diffraction spot, according to the position information of the (i+1) th diffraction spot;
correcting the (i+1) th region on the projection picture according to the corrected projection length of the (i+1) th diffraction spot.

6. The method according to claim 1 , wherein the method further comprises:
emitting, by the light generation component, detection light for correcting a projection image projected by the projection device.

7. The method according to claim 1 , wherein the projection device comprises an image collection component, and the method comprises:
photographing a projection image projected by the projection device;
photographing a projected image projected through the grating by detection light.

8. A non-transitory computer storage medium storing computer executable instructions which, when executed by one or more processors, cause the one or more processors to:
determine, in a region in which a projection image projected by a projection device overlaps with a projected image projected through the grating by detection light output from the projection device, diffraction spots having a diameter not equal to a preset value as target diffraction spots, wherein the projection device comprises a grating and a light generation component;
determine a group of target diffraction spots continuously arranged in a horizontal or vertical direction, as well as diffraction spots having a diameter equal to the preset value that are respectively located on both sides of the group of target diffraction spots, as a region to be corrected;
determine an angle α i between a plane of an i th diffraction spot and a plane of an (i+1) th diffraction spot that are adjacent in the horizontal or vertical direction in the region to be corrected, wherein i=1, 2, . . . , N, and N is the total number of spots in the region to be corrected; and
determine a corrected projection length of the (i+1) th diffraction spot according to the preset value and angles α 1 to α i .

9. The non-transitory computer storage medium according to claim 8 , wherein to determine an angle α i between a plane of an i th diffraction spot and a plane of an (i+1) th diffraction spot that are adjacent in the horizontal or vertical direction in the region to be corrected, the computer executable instructions cause the one or more processors to:
determine a line segment having a first circle center and a second circle center as end points as a first line segment, wherein the first circle center is a circle center of the i th diffraction spot, and the second circle center is a circle center of the (i+1) th diffraction spot;
determine a line segment having the first circle center and a first projection point as end points as a third line segment, the first projection point being a projection point of the second circle center on a plane of the i th diffraction spot; and
determine an angle between the first line segment and the third line segment as the angle α i .

10. The non-transitory computer storage medium according to claim 9 , wherein to determine an angle α i between a plane of an i th diffraction spot and a plane of an (i+1) th diffraction spot that are adjacent in the horizontal or vertical direction in the region to be corrected, the computer executable instructions cause the one or more processors to:
determine a line segment having the first projection point and the second circle center as end points as a second line segment;
determine a length of the third line segment and a length of the second line segment, respectively; and
determine the angle α i according to the lengths of the third line segment and the second line segment.

11. The non-transitory computer storage medium according to claim 10 , wherein to determine a length of the third line segment and a length of the second line segment, the computer executable instructions cause the one or more processors to:
determine the length of the third line segment according to a diameter of the i th diffraction spot and a diameter of the (i+1) th diffraction spot; and
determine the length of the second line segment according to a projection distance of the i th diffraction spot and a projection distance of

Assignees

• Xian Zhongxing New Software Co Ltd

Inventors

• Wu Yonghui
• Zhang Yinzhong

Classifications

• G02B27/0043 Primary

  in projection exposure systems, e.g. microlithographic systems · CPC title

• G06T2207/20021

  Dividing image into blocks, subimages or windows · CPC title

• G06T2207/30168

  Image quality inspection · CPC title

• H04N9/3185

  Geometric adjustment, e.g. keystone or convergence (optical or mechanical adjustment of convergence H04N9/317; using scanning means H04N3/22; optical or mechanical adjustments of projectors not peculiar to the presence of an electronic spatial light modulator G03B21/14) · CPC title

• G06T2207/30208

  Marker matrix · CPC title